Prosecution Insights
Last updated: April 19, 2026

Carl Zeiss Smt GmbH

40 pending office actions

Portfolio Summary

40
Total Pending OAs
11
Final Rejections
29
Non-Final OAs

Pending Office Actions

App #TitleExaminerArt UnitStatusFiled
19170372 METHOD FOR COATING A SUBSTRATE BERMAN, JASON 1794 Non-Final OA Apr 04, 2025
18906920 ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS NGUYEN, HUNG 2882 Non-Final OA Oct 04, 2024
18899247 CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY INSTALLATION AND METHOD WHITESELL, STEVEN H 1759 Non-Final OA Sep 27, 2024
18895292 DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS WHITESELL, STEVEN H 1759 Non-Final OA Sep 24, 2024
18778483 INFEROMETRIC MEASURING APPARATUS SCHNASE, PAUL DANIEL 2877 Non-Final OA Jul 19, 2024
18775344 METHOD FOR DETERMINING A LOCATION OF AN OBJECT SURFACE ASFAW, MESFIN T 2882 Non-Final OA Jul 17, 2024
18732005 APPARATUS AND METHOD FOR AVOIDING A DEGRADATION OF AN OPTICAL USED SURFACE OF A MIRROR MODULE, PROJECTION SYSTEM, ILLUMINATION SYSTEM AND PROJECTION EXPOSURE APPARATUS RIDDLE, CHRISTINA A 2882 Non-Final OA Jun 03, 2024
18679841 METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPTICAL PRODUCTION SYSTEM WHEN ILLUMINATING AND IMAGING AN OBJECT BY MEANS OF AN OPTICAL MEASUREMENT SYSTEM WHITESELL, STEVEN H 1759 Non-Final OA May 31, 2024
18670858 METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MICROSTRUCTURED SAMPLE RIVERA-MARTINEZ, GUILLERMO M 2677 Non-Final OA May 22, 2024
18648644 OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUCH AN OPTICAL SYSTEM MENDOZA, ALEXANDRIA ARELLANO 2877 Non-Final OA Apr 29, 2024
18648561 OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUCH AN OPTICAL SYSTEM PERSAUD, DEORAM 2882 Non-Final OA Apr 29, 2024
18625314 METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE OSENBAUGH-STEWART, ELIZA W 2881 Final Rejection Apr 03, 2024
18590076 EUV LITHOGRAPHY SYSTEM COMPRISING A GAS-BINDING COMPONENT IN THE FORM OF A FOIL ASFAW, MESFIN T 2882 Final Rejection Feb 28, 2024
18587228 METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA CARLSON, JOSHUA MICHAEL 2877 Non-Final OA Feb 26, 2024
18437409 EUV COLLECTOR FOR USE IN AN EUV PROJECTION EXPOSURE APPARATUS NGUYEN, HUNG 2882 Final Rejection Feb 09, 2024
18426549 METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITION MATERIALS USED FOR LITHOGRAPHIC MASKS KIM, PETER B 2882 Non-Final OA Jan 30, 2024
18426860 PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY HAVING A CONNECTING ELEMENT KIM, PETER B 2882 Non-Final OA Jan 30, 2024
18419940 APPARATUS FOR ANALYSING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD MCCORMACK, JASON L 2881 Non-Final OA Jan 23, 2024
18420245 TEMPERATURE MEASURING DEVICE, LITHOGRAPHY APPARATUS AND METHOD FOR MEASURING A TEMPERATURE GIBSON, RANDY W 2855 Non-Final OA Jan 23, 2024
18391797 BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEARING SYSTEM CHANG, HANWAY 2878 Non-Final OA Dec 21, 2023
18507893 PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS WHITESELL, STEVEN H 1759 Non-Final OA Nov 13, 2023
18503693 HEATING ARRANGEMENT AND METHOD FOR HEATING AN OPTICAL ELEMENT WHITESELL, STEVEN H 1759 Final Rejection Nov 07, 2023
18487844 SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES DARDANO, STEFANO ANTHONY 2663 Non-Final OA Oct 16, 2023
18485370 METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS GOFF II, JOHN L 1746 Non-Final OA Oct 12, 2023
18467095 PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME ULTRAVIOLET WAVELENGTH RANGE AND REFLECTIVE OPTICAL ELEMENT DABBI, JYOTSNA V 2872 Non-Final OA Sep 14, 2023
18367208 Mesh Integrity Check CARLSON, JOSHUA MICHAEL 2877 Final Rejection Sep 12, 2023
18456304 GAS INJECTION SUBSYSTEM FOR USE IN AN INSPECTION SYSTEM TO INSPECT A SAMPLE BY USE OF CHARGED PARTICLES AND INSPECTION SYSTEM HAVING SUCH GAS INJECTION SUBSYSTEM CHOI, JAMES J 2878 Non-Final OA Aug 25, 2023
18362630 METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY WHITESELL, STEVEN H 1759 Final Rejection Jul 31, 2023
18361092 LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM PERSAUD, DEORAM 2882 Non-Final OA Jul 28, 2023
18226901 METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK MCCORMACK, JASON L 2881 Final Rejection Jul 27, 2023
18350522 OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY GASSEN, CHRISTOPHER J 2881 Final Rejection Jul 11, 2023
18212768 END POINT DETERMINATION BY MEANS OF CONTRAST GAS IPPOLITO, NICOLE MARIE 2881 Non-Final OA Jun 22, 2023
18206673 METHOD FOR REGISTERING STRUCTURES ON MICROLITHOGRAPHIC MASKS, COMPUTER PROGRAM PRODUCT AND MICROLITHOGRAPHIC METHOD DINH, PAUL 2851 Non-Final OA Jun 07, 2023
18322009 MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM RIDDLE, CHRISTINA A 2882 Non-Final OA May 23, 2023
18310163 TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SET OF IMAGES TO A SECOND SET OF IMAGES BONANSINGA, AARON TIMOTHY 2673 Final Rejection May 01, 2023
18128672 METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM ROLLAND, ALEX A 1759 Non-Final OA Mar 30, 2023
17836367 OPTICAL ELEMENT HAVING A PROTECTIVE COATING, METHOD FOR THE PRODUCTION THEREOF AND OPTICAL ARRANGEMENT MEDICH, ANGELA MARGOT 2871 Non-Final OA Jun 09, 2022
17742733 METHOD FOR DETERMINING A REGISTRATION ERROR RODGERS, ALEXANDER JOHN 2661 Final Rejection May 12, 2022
17679720 OPTICAL ELEMENT FOR REFLECTING EUV RADIATION, EUV LITHOGRAPHY SYSTEM AND METHOD FOR SEALING A GAP COSGROVE, JAYSON D 1737 Final Rejection Feb 24, 2022
17376664 INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FOR CLASSIFYING ANOMALIES IN IMAGING DATASETS WU, NICHOLAS S 2148 Non-Final OA Jul 15, 2021

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