40 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 19170372 | METHOD FOR COATING A SUBSTRATE | BERMAN, JASON | 1794 | Non-Final OA | Apr 04, 2025 |
| 18906920 | ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS | NGUYEN, HUNG | 2882 | Non-Final OA | Oct 04, 2024 |
| 18899247 | CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY INSTALLATION AND METHOD | WHITESELL, STEVEN H | 1759 | Non-Final OA | Sep 27, 2024 |
| 18895292 | DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS | WHITESELL, STEVEN H | 1759 | Non-Final OA | Sep 24, 2024 |
| 18778483 | INFEROMETRIC MEASURING APPARATUS | SCHNASE, PAUL DANIEL | 2877 | Non-Final OA | Jul 19, 2024 |
| 18775344 | METHOD FOR DETERMINING A LOCATION OF AN OBJECT SURFACE | ASFAW, MESFIN T | 2882 | Non-Final OA | Jul 17, 2024 |
| 18732005 | APPARATUS AND METHOD FOR AVOIDING A DEGRADATION OF AN OPTICAL USED SURFACE OF A MIRROR MODULE, PROJECTION SYSTEM, ILLUMINATION SYSTEM AND PROJECTION EXPOSURE APPARATUS | RIDDLE, CHRISTINA A | 2882 | Non-Final OA | Jun 03, 2024 |
| 18679841 | METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPTICAL PRODUCTION SYSTEM WHEN ILLUMINATING AND IMAGING AN OBJECT BY MEANS OF AN OPTICAL MEASUREMENT SYSTEM | WHITESELL, STEVEN H | 1759 | Non-Final OA | May 31, 2024 |
| 18670858 | METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MICROSTRUCTURED SAMPLE | RIVERA-MARTINEZ, GUILLERMO M | 2677 | Non-Final OA | May 22, 2024 |
| 18648644 | OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUCH AN OPTICAL SYSTEM | MENDOZA, ALEXANDRIA ARELLANO | 2877 | Non-Final OA | Apr 29, 2024 |
| 18648561 | OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUCH AN OPTICAL SYSTEM | PERSAUD, DEORAM | 2882 | Non-Final OA | Apr 29, 2024 |
| 18625314 | METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE | OSENBAUGH-STEWART, ELIZA W | 2881 | Final Rejection | Apr 03, 2024 |
| 18590076 | EUV LITHOGRAPHY SYSTEM COMPRISING A GAS-BINDING COMPONENT IN THE FORM OF A FOIL | ASFAW, MESFIN T | 2882 | Final Rejection | Feb 28, 2024 |
| 18587228 | METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA | CARLSON, JOSHUA MICHAEL | 2877 | Non-Final OA | Feb 26, 2024 |
| 18437409 | EUV COLLECTOR FOR USE IN AN EUV PROJECTION EXPOSURE APPARATUS | NGUYEN, HUNG | 2882 | Final Rejection | Feb 09, 2024 |
| 18426549 | METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITION MATERIALS USED FOR LITHOGRAPHIC MASKS | KIM, PETER B | 2882 | Non-Final OA | Jan 30, 2024 |
| 18426860 | PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY HAVING A CONNECTING ELEMENT | KIM, PETER B | 2882 | Non-Final OA | Jan 30, 2024 |
| 18419940 | APPARATUS FOR ANALYSING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD | MCCORMACK, JASON L | 2881 | Non-Final OA | Jan 23, 2024 |
| 18420245 | TEMPERATURE MEASURING DEVICE, LITHOGRAPHY APPARATUS AND METHOD FOR MEASURING A TEMPERATURE | GIBSON, RANDY W | 2855 | Non-Final OA | Jan 23, 2024 |
| 18391797 | BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEARING SYSTEM | CHANG, HANWAY | 2878 | Non-Final OA | Dec 21, 2023 |
| 18507893 | PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS | WHITESELL, STEVEN H | 1759 | Non-Final OA | Nov 13, 2023 |
| 18503693 | HEATING ARRANGEMENT AND METHOD FOR HEATING AN OPTICAL ELEMENT | WHITESELL, STEVEN H | 1759 | Final Rejection | Nov 07, 2023 |
| 18487844 | SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES | DARDANO, STEFANO ANTHONY | 2663 | Non-Final OA | Oct 16, 2023 |
| 18485370 | METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS | GOFF II, JOHN L | 1746 | Non-Final OA | Oct 12, 2023 |
| 18467095 | PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME ULTRAVIOLET WAVELENGTH RANGE AND REFLECTIVE OPTICAL ELEMENT | DABBI, JYOTSNA V | 2872 | Non-Final OA | Sep 14, 2023 |
| 18367208 | Mesh Integrity Check | CARLSON, JOSHUA MICHAEL | 2877 | Final Rejection | Sep 12, 2023 |
| 18456304 | GAS INJECTION SUBSYSTEM FOR USE IN AN INSPECTION SYSTEM TO INSPECT A SAMPLE BY USE OF CHARGED PARTICLES AND INSPECTION SYSTEM HAVING SUCH GAS INJECTION SUBSYSTEM | CHOI, JAMES J | 2878 | Non-Final OA | Aug 25, 2023 |
| 18362630 | METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY | WHITESELL, STEVEN H | 1759 | Final Rejection | Jul 31, 2023 |
| 18361092 | LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM | PERSAUD, DEORAM | 2882 | Non-Final OA | Jul 28, 2023 |
| 18226901 | METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK | MCCORMACK, JASON L | 2881 | Final Rejection | Jul 27, 2023 |
| 18350522 | OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY | GASSEN, CHRISTOPHER J | 2881 | Final Rejection | Jul 11, 2023 |
| 18212768 | END POINT DETERMINATION BY MEANS OF CONTRAST GAS | IPPOLITO, NICOLE MARIE | 2881 | Non-Final OA | Jun 22, 2023 |
| 18206673 | METHOD FOR REGISTERING STRUCTURES ON MICROLITHOGRAPHIC MASKS, COMPUTER PROGRAM PRODUCT AND MICROLITHOGRAPHIC METHOD | DINH, PAUL | 2851 | Non-Final OA | Jun 07, 2023 |
| 18322009 | MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM | RIDDLE, CHRISTINA A | 2882 | Non-Final OA | May 23, 2023 |
| 18310163 | TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SET OF IMAGES TO A SECOND SET OF IMAGES | BONANSINGA, AARON TIMOTHY | 2673 | Final Rejection | May 01, 2023 |
| 18128672 | METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM | ROLLAND, ALEX A | 1759 | Non-Final OA | Mar 30, 2023 |
| 17836367 | OPTICAL ELEMENT HAVING A PROTECTIVE COATING, METHOD FOR THE PRODUCTION THEREOF AND OPTICAL ARRANGEMENT | MEDICH, ANGELA MARGOT | 2871 | Non-Final OA | Jun 09, 2022 |
| 17742733 | METHOD FOR DETERMINING A REGISTRATION ERROR | RODGERS, ALEXANDER JOHN | 2661 | Final Rejection | May 12, 2022 |
| 17679720 | OPTICAL ELEMENT FOR REFLECTING EUV RADIATION, EUV LITHOGRAPHY SYSTEM AND METHOD FOR SEALING A GAP | COSGROVE, JAYSON D | 1737 | Final Rejection | Feb 24, 2022 |
| 17376664 | INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FOR CLASSIFYING ANOMALIES IN IMAGING DATASETS | WU, NICHOLAS S | 2148 | Non-Final OA | Jul 15, 2021 |
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