Prosecution Insights
Last updated: October 02, 2026
Application No. 18/683,703

NITRIDE SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

Final Rejection §102
Filed
Feb 14, 2024
Priority
Aug 26, 2021 — JP 2021-138308 +1 more
Examiner
ANYA, IGWE U
Art Unit
2891
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Shin-Etsu Chemical Co., Ltd.
OA Round
2 (Final)
85%
Grant Probability
Favorable
3-4
OA Rounds
0m
Est. Remaining
81%
With Interview

Examiner Intelligence

Grants 85% — above average
85%
Career Allowance Rate
817 granted / 961 resolved
+17.0% vs TC avg
Minimal -4% lift
Without
With
+-3.7%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
26 currently pending
Career history
970
Total Applications
across all art units

Statute-Specific Performance

§101
1.4%
-38.6% vs TC avg
§103
51.1%
+11.1% vs TC avg
§102
36.6%
-3.4% vs TC avg
§112
6.9%
-33.1% vs TC avg
Black line = Tech Center average estimate • Based on career data from 961 resolved cases

Office Action

§102
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claims 1 and 3 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Sato (US 2012/0034768). (Claim 1) Sato teaches a nitride semiconductor substrate in which a nitride semiconductor thin film is formed on a substrate (1) for film formation made of single-crystal silicon (wafer, paragraph 15), wherein a silicon nitride film (fig. 1C #4, paragraphs 15 – 17) is formed on a peripheral portion of the substrate (1) for film formation; an AIN film (5, paragraph 18, III-V compound semiconductor, Al.sub.xGa.sub.1-xN (0.ltoreq.x.ltoreq.1, x = 1) is formed on the substrate for film formation and on the silicon nitride film (4); and the nitride semiconductor thin film (5, multiple layers, paragraph 18) is formed on the AIN film, and wherein the nitride semiconductor thin film on the silicon nitride film is a single crystal (paragraph 19). (Claim 3) Sato teaches a method for manufacturing a nitride semiconductor substrate (figs. 1), the method comprising the steps of: (1) forming a silicon nitride film (fig.1D #4) on a peripheral portion of a substrate (1) for film formation made of single-crystal silicon (wafer, paragraphs 15 – 17); (2) growing an AIN (5 paragraph 18, III-V compound semiconductor, Al.sub.xGa.sub.1-xN (0.ltoreq.x.ltoreq.1, x = 1) film on the substrate (1) for film formation and on the silicon nitride film (4) on the peripheral portion; and (3) growing a GaN film, an AIGaN film, or both (5, multiple layers, paragraph 18) as a nitride semiconductor thin film on the AlN film, wherein the nitride semiconductor thin film on the silicon nitride film is a single crystal (paragraph 19). Response to Arguments Applicant’s arguments with respect to claim(s) filed on July 2, 2026 have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument. Conclusion Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Contact Information Any inquiry concerning this communication or earlier communications from the examiner should be directed to IGWE U ANYA whose telephone number is (571)272-1887. The examiner can normally be reached 8:00 AM - 6:00 PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Matthew Landau can be reached at (571) 272- 1731. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /IGWE U ANYA/Primary Examiner, Art Unit 2891 September 19, 2026
Read full office action

Prosecution Timeline

Feb 14, 2024
Application Filed
Apr 02, 2026
Non-Final Rejection mailed — §102
Jul 02, 2026
Response Filed
Sep 22, 2026
Final Rejection mailed — §102 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

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SEMICONDUCTOR DEVICE
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3y 0m to grant Granted Sep 15, 2026
Patent 12740391
CONTACT STRUCTURE, SEMICONDUCTOR DEVICE WITH THE SAME, AND METHOD FOR FABRICATING THE SAME
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Patent 12733206
VERTICAL SHIELDED GATE ACCUMULATION FIELD EFFECT TRANSISTOR
3y 6m to grant Granted Sep 08, 2026
Patent 12733417
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
2y 7m to grant Granted Sep 08, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
85%
Grant Probability
81%
With Interview (-3.7%)
2y 6m (~0m remaining)
Median Time to Grant
Moderate
PTA Risk
Based on 961 resolved cases by this examiner. Grant probability derived from career allowance rate.

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