DETAILED CORRESPONDENCE
This Office action is in response to the application received February 22, 2024.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 11-15, and 20-22 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Claim 11 discloses a compound of formula (II) wherein the some of the variables for Formula (II) are undefined, such as “X” R1 to R4, p, q, Ra , and Rb . Claim 1 recites a formula (I) with its own defined variables, while claim 11 contains a different compound with different cations, and need their variables to be defined.
Correction is necessary.
Claims 1-10, 16-19 and 23 are seen as allowable over the prior art of record.
None of the prior art of record disclose the claimed onium salt of formula (I) in claim 1, the method of making the onium salt of claim 11, the photoacid generator recited in claim 16, the photoresist composition of claim 17 and the photolithography process of claim 19.
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure.
KIM et al (2016/0266494) disclose hardmasks with polymer having diphenoxybenzene as a precursor, however lack a disulfonate photoacid generating sulfonium or iodonium salt as claimed. with end-capped groups, photoacid and a solvent.
TEUSCHER (3,867,147) disclose light sensitive diazo compounds that can be made with diphenoxybenzene, see col. 26, line 4 and Example 117.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN S CHU whose telephone number is (571)272-1329. The examiner can normally be reached M-F, IFP-Flex.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Keith Hendricks, can be reached at telephone number 571-272-1401. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/John S. Chu/ Primary Examiner, Art Unit 1737
J. Chu
August 21, 2026
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