DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Drawings
The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the each optical assembly of the plurality of optical assemblies comprising: an optical head having optics to direct a sample field-of-view (FOV) to a portion of a surface of the sample on the stage; a first external light source configured to illuminate the surface of the sample at a first oblique angle to the surface of the sample on the stage; a second external light source configured to illuminate the surface of the sample at a second oblique angle to the surface of the sample on the stage; and a focusing lens to focus a first optical image of the portion of the surface of the sample generated by the first external light source, and a second optical image of the portion of the surface of the sample generated by the second external light source onto a segment of the sensor; and a controller configured to: combine the first optical image and the second optical image generated by each optical assembly of the plurality of optical assemblies; and generate a map of point defects on the surface of the sample. must be shown or the feature(s) canceled from the claim(s). No new matter should be entered.
It appears the original disclosure shows a single optical assembly with two external light sources while claim 1 calls for a plurality of optical assemblies each of which comprise two distinct light sources.
Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claim 10 is rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
It is unclear how first and second oblique angles orthogonal to each other. According, to Merriam-Webster, orthogonal is defined as intersecting or lying at right angles. It is unclear how two angles are orthogonal to each other. In addition, it is understood that lines and planes can to orthogonal to each other. Clarification is needed to determine the scope of the claim.
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claim(s) 7-9, 11 and 12 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Shibata et al (US 20090059216).
Regarding claim 7, Shibata et al teach (Figs. 1-12) A method of pre-bonding inspection, comprising: illuminating a surface of a sample (1) by a first light source (5) at a first oblique angle to the surface of the sample and by a second light source (250) at a second oblique angle to the surface of the sample, the surface of the sample having a two dimensional (2D) periodic pattern and defects; acquiring a first optical image (via 210) generated by the first light source and a second optical image (via 200) generated by the second light source; and acquiring an optical image of point defects on the surface of the sample specifying locations ([0034]-map) of the point defects on the surface of the sample, by combining ([0033]-comparing, that is, combine mathematically is understood as adding a negative number) the first optical image and the second optical image.
Claims 8 and 9 are rejected because they do not recite method steps which further limit the scope of claim 7.
Regarding claim 11, Shibata et al teach ([0057]) the first light source and the second light source each comprise a uni-directional or nearly uni-directional laser or light emitting diode (LED).
Regarding claim 12, Shibata et al teach ([0036]) the acquiring the first optical image and the second optical image comprises a time delay integration (TDI) scanning of the surface of the sample.
Allowable Subject Matter
Claims are 1-6 and 13-21 allowed.
The following is an examiner’s statement of reasons for allowance:
Regarding claim 1, prior art of record does not teach An optical inspection system for pre-bonding inspection, comprising: a stage having an upper surface on which a sample to be inspected is placed; a sensor; a plurality of optical assemblies, each optical assembly of the plurality of optical assemblies comprising: an optical head having optics to direct a sample field-of-view (FOV) to a portion of a surface of the sample on the stage; a first external light source configured to illuminate the surface of the sample at a first oblique angle to the surface of the sample on the stage; a second external light source configured to illuminate the surface of the sample at a second oblique angle to the surface of the sample on the stage; and a focusing lens to focus a first optical image of the portion of the surface of the sample generated by the first external light source, and a second optical image of the portion of the surface of the sample generated by the second external light source onto a segment of the sensor; and a controller configured to: combine the first optical image and the second optical image generated by each optical assembly of the plurality of optical assemblies; and generate a map of point defects on the surface of the sample.
Regarding claim 13, prior art of record does not teach performing a pre-bonding inspection process on a substrate die having metallic bond pads, and a chiplet having metallic bond pads, comprising: generating dual optical images of a surface of the substrate die by dual-directional illumination, wherein each optical image of the dual optical images are formed using a different directional illumination of the surface of the substrate die; generating a composite optical image of point defects on the surface of the substrate die by combining the dual optical images of the surface of the substrate die; generating dual optical images of a surface of the chiplet by dual-directional illumination, wherein each optical image of the dual optical images are formed using a different directional illumination of the surface of the chiplet; and generating a composite optical image of point defects on the surface of the chiplet by combining the dual optical images of the surface of the chiplet; and inspecting the generated composite optical images, wherein inspecting the generated composite optical images comprises at least one of: determining a location of at least one of the point defects on the surface of the substrate die based on the composite optical image of the point defects on the surface of the substrate die; and determining a location of at least one of the point defects on the surface of the chiplet based on the composite optical image of the point defects on the surface of the chiplet..
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US 20200371046 is in related field of invention but it does not teach the specifics set forth by the current application.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to TONY KO whose telephone number is (571)272-1926. The examiner can normally be reached Monday-Friday 9-5pm.
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Georgia Epps can be reached at 571-272-2328. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/TONY KO/Primary Examiner, Art Unit 2878
TK