Prosecution Insights
Last updated: May 29, 2026
Application No. 18/822,332

METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE

Non-Final OA §102
Filed
Sep 02, 2024
Priority
Sep 04, 2023 — JP 2023-143106
Examiner
GATES, BRADFORD M
Art Unit
1713
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tokyo Electron Limited
OA Round
1 (Non-Final)
74%
Grant Probability
Favorable
1-2
OA Rounds
1y 0m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 74% — above average
74%
Career Allowance Rate
500 granted / 671 resolved
+9.5% vs TC avg
Strong +24% interview lift
Without
With
+24.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
14 currently pending
Career history
694
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
81.6%
+41.6% vs TC avg
§102
2.4%
-37.6% vs TC avg
§112
7.2%
-32.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 671 resolved cases

Office Action

§102
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant's election with traverse of Group I, claims 1-5 in the reply filed on 2/20/2026 is acknowledged. The traversal is on the ground(s) that all of the claims are presented in the same action, undue diverse searching should not be required, and all claims should be examined together. This is not found persuasive because the groups would provide a serious search and examination burden if not restricted for the reasons stated in the previous action, and the groups are distinct from each other for the reasons stated in the previous action. The requirement is still deemed proper and is therefore made FINAL. Claim Rejections - 35 USC § 102 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 1-4 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Wamura et al. (U.S. Patent Application Publication 2013/0340678, hereafter Wamura ‘678). Claim 1: Wamura ‘678 teaches a method of monitoring a liquid raw material in a gas supply device (abstract), the gas supply device comprising: a raw material storage tank (60) configured to store the liquid raw material (Fig. 1, [0030]); a liquid level detector (74) configured to detect a liquid level of the liquid raw material in the raw material storage tank (Fig. 1, [0031]); a gas inlet (96) provides in the raw material storage tank and connected to a carrier gas supply (108) that supplies a carrier gas carrying a raw material to the raw material storage tank (Fig. 1, [0039], [0041]); a gas outlet (98) provided in the raw material storage tank and connected to a gas discharger (102) that discharges raw material gas and carrier gas from the raw material storage tank (Fig. 1, [0039], [0040]); and a raw material inlet (100) provided in the raw material storage tank and connected to a liquid raw material supply (114) that supplies the liquid raw material to the raw material storage tank (Fig. 1, [0039], [0041]), the method comprising: taking measurements including the flow rate of the raw material gas and supply of the liquid raw material and determining the remaining amount of liquid raw material ([0010], [0047], [0086], [0087], [0090]); taking measurements including the flow rate of the raw material gas and supply of the liquid raw material, performing calculations, and determining detection results ([0010], [0047], [0086], [0087], [0090]); and monitoring the liquid raw material based on the liquid level detector and the calculations and measurements (abstract, [0010], [0047], [0086], [0087], [0090]). Claim 2: Wamura ‘678 taches that the usage amount of the raw material can be calculated from a time when the raw material is being used and includes other values, which corresponds to the claimed coefficient related to the raw material ([0047], [0086], [0087]). Claim 3: Wamura ‘678 teaches that the replenishment amount is based on the flow rate and time of the supply of the liquid raw material ([0010], [0047], [0086], [0087], [0090]). Claim 4: Wamura ’678 teaches that the method can include taking measurements including the flow rate of the raw material gas, supply of the liquid raw material, and initial amount of liquid raw material and determining the remaining amount of liquid raw material ([0010], [0047], [0086], [0087], [0090]). Allowable Subject Matter Claim 5 is objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. The following is a statement of reasons for the indication of allowable subject matter: the prior art fails to teach or render obvious a method of monitoring a liquid raw material in a gas supply device including when the detection result of the liquid level detector does not match with the estimated detection result of the virtual sensor, determining that the liquid level detector has failed as to the context of claim 5. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to BRADFORD M GATES whose telephone number is (571)270-3558. The examiner can normally be reached Monday-Friday 9-5. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Joshua Allen can be reached at (571) 270-3176. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /BG/ /SHAMIM AHMED/Primary Examiner, Art Unit 1713
Read full office action

Prosecution Timeline

Sep 02, 2024
Application Filed
May 20, 2026
Non-Final Rejection mailed — §102 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
74%
Grant Probability
99%
With Interview (+24.2%)
2y 9m (~1y 0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 671 resolved cases by this examiner. Grant probability derived from career allowance rate.

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