DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 112
The following is a quotation of the first paragraph of 35 U.S.C. 112(a):
(a) IN GENERAL.—The specification shall contain a written description of the invention, and of the manner and process of making and using it, in such full, clear, concise, and exact terms as to enable any person skilled in the art to which it pertains, or with which it is most nearly connected, to make and use the same, and shall set forth the best mode contemplated by the inventor or joint inventor of carrying out the invention.
The following is a quotation of the first paragraph of pre-AIA 35 U.S.C. 112:
The specification shall contain a written description of the invention, and of the manner and process of making and using it, in such full, clear, concise, and exact terms as to enable any person skilled in the art to which it pertains, or with which it is most nearly connected, to make and use the same, and shall set forth the best mode contemplated by the inventor of carrying out his invention.
Claims 8-13 are rejected under 35 U.S.C. 112(a) or 35 U.S.C. 112 (pre-AIA ), first paragraph, as failing to comply with the written description requirement. The claim(s) contains subject matter which was not described in the specification in such a way as to reasonably convey to one skilled in the relevant art that the inventor or a joint inventor, or for applications subject to pre-AIA 35 U.S.C. 112, the inventor(s), at the time the application was filed, had possession of the claimed invention.
The limitations of claim 8 constitute new matter as the specification fails to teach "prior to performing the first cleaning step, while keeping the second manipulator arranged between the slot… loading the vertically oriented semiconductor wafer…after performing the first cleaning step, while keeping..picking up the vertically semiconductor". Specifically, the specification fails to teach the specific order as recited in claim 8. Claims 9-10 are rejected in view of their dependency. Claim 11 constitutes new matter as the specification does not teach "and wherein the first cleaning step is the same or different from the second cleaning step". Claim 12 constitutes new matter as the specification fails to the "the guide configured to guide the gripping system between the cleaning modules, which are arranged successively in the cleaning line". The specification only teaches the cleaning line comprising a guide, no reference is given in the specification as to the function of the guide. Claim 13 constitutes new matter as the specification fails to teach "successively treating the vertically oriented semiconductor wafer during cleaning steps.
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1-3 and 5-13 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Claim 1 is indefinite as the claim fails to positively recite a step of cleaning semiconductor wafers. Additionally, the positive limitations are only directed to treating a single wafer. Re claim 1, lines 4-5, 8 and 11 should recite "the at least two cleaning modules". Claim 6 is indefinite because "the system" lacks positive antecedent basis. The examiner suggests amending the clam to recite "The method according to claim 1, wherein the gripping system comprises a further manipulator….. It is also unclear whether "further gripping system" is the same or different from at least one gripping system recited in claim 1. Claim 6, should be amended to "wafer" after the term "semiconductor" in line 3. Additionally, all claims to be amended to cleaning a semiconductor wafer or semiconductor "wafers" throughout to be consistent to as to whether a single wafer is cleaned or a plurality of wafers being cleaned. Claim 7, line 2, before "cleaning steps", insert the term "the". Claim 8 is indefinite because the last phrase recites "lift the vertically oriented semiconductor wafer out of the first cleaning module into the first cleaning module…" It appears that the wafer should be lifted out of the first cleaning module into "the second module". Claim 11 is indefinite because "the first cleaning step" and "the second cleaning step" lacks positive antecedent basis, it is noted that the first and second cleaning steps are initially recited in claim 7. Claim 13 is indefinite because "the treatment process" lacks positive antecedent basis.
Response to Arguments
The rejection of the claims as being unpatentable over Yudoovsky et al. is withdrawn in view of the arguments presented by applicant, as the prior art fails to teach or suggest the limitations of moving a first manipulator, of the two adjacent manipulators, through a slot in a cover of the first cleaning module, of the at least two cleaning modules, to load or pick up the vertically oriented semiconductor wafer, while a second manipulator, of the two adjacent manipulators, is arranged to remain between the slot in cover of the first cleaning module and a slot in the cover of a second cleaning module of the at least two cleaning modules.
Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a).
A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Sharidan Carrillo whose telephone number is (571)272-1297. The examiner can normally be reached M-F, 7:00am-4:00pm.
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael Barr can be reached at 571-272-1414. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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Sharidan Carrillo
Primary Examiner
Art Unit 1711
/Sharidan Carrillo/Primary Examiner, Art Unit 1711 bsc
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