DETAILED ACTION
Notice of AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim(s) 1-20 are pending and are rejected.
Priority
Continuation:
The current application is a continuation of application no. 17559061 filled on 12/22/2021.
Information Disclosure Statement
The information disclosure statement(s) (IDS) submitted on 01/29/2025 is/are in compliance with the provisions of 37 CFR 1.97. Accordingly, the information disclosure statement(s) is/are being considered by the examiner.
Drawings
The drawings were received on 09/11/2024. These drawings are acceptable for the examination purpose.
Double Patenting
The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969).
A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b).
The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13.
The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer.
Claims 1-20 are rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1, 3-9, 11-15 and 17-20 of U.S. Patent No. US12130606B2. Although the claims at issue are not identical, they are not patentably distinct from each other because the instant application 18882059 claims are obvious variants of the claims of the Patent No. US12130606B2.
Regarding Claim 1:
claim 1 of U.S. Patent No. US12130606B2 discloses,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
1.
A method comprising:
1.
A method comprising:
determining, based at least in part on first disturbance data, a first actuation value associated with compensating for disturbance in a processing chamber;
[Examiner notes that, instant application limitation describes, determination of actuation value based on disturbance data and the purpose to compensate for disturbance in a processing chamber that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes determining actuation value based on disturbance data such that actuation compensates for disturbance]
determining, based at least in part on the disturbance data, a first actuation value associated with one or more components of a processing chamber, wherein actuation of the one or more components according to the first actuation value compensates for disturbance;
associating the first actuation value with an identifier corresponding to a first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
associating the first actuation value with an identifier corresponding to the first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
causing, based on retrieval of the first actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance.
[Examiner notes that, instant application limitation describes,
to compensate for the disturbance, causing actuation of one or more components during a subsequent execution of the first recipe that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes, to compensate for the disturbance, causing actuation of the one or more components during a subsequent execution of the first recipe;
the instant limitation describes broader execution of the first recipe regardless of first substrate or subsequent substrate]
causing, based on retrieval of the first actuation value via the identifier, the actuation of the one or more components while processing the first substrate or a subsequent substrate during a subsequent execution of the first recipe operation of the substrate processing recipe to preemptively compensate for the disturbance.
Regarding Claim 2:
claim 1 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
2.
wherein the first disturbance data is associated with a comparison of first sensor data and first setpoint data,
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, disturbance data that is based on comparison of the first sensor data and first setpoint data]
1.
determining disturbance data based on a comparison of the first sensor data and first setpoint data of the first recipe operation,
wherein the first sensor data is associated with processing a first substrate according to the first recipe operation, and
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, first sensor data is received while processing a first substrate during a first execution of a first recipe operation]
receiving first sensor data while processing a first substrate during a first execution of a first recipe operation of a substrate processing recipe….
wherein the first setpoint data is associated with the first recipe operation.
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, the first setpoint data is related to first recipe operation]
wherein the first setpoint data is indicative of one or more predetermined process condition setpoints for a duration of the first recipe operation
Regarding Claim 3:
claim 8 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
3.
wherein the first setpoint data is indicative of a change in one or more predetermined process condition setpoints during the first recipe operation
8.
wherein the first setpoint data is indicative of a change in the one or more predetermined process condition setpoints during the first recipe operation.
Regarding Claim 4:
claim 3 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
4.
wherein the first sensor data comprises pressure data and the first setpoint data comprises first pressure setpoint data, and wherein the actuation of the one or more components comprises actuating, based on the first actuation value, a throttle valve of the processing chamber to adjust a flow rate out of the processing chamber to cause the processing chamber to meet the first pressure setpoint data.
3.
wherein the first sensor data comprises pressure data and the first setpoint data comprises first pressure setpoint data, and wherein the actuation of the one or more components comprises actuating, based on the first actuation value, a throttle valve of the processing chamber to adjust a flow rate out of the processing chamber to cause the processing chamber to meet the first pressure setpoint data.
Regarding Claim 5:
claim 4 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
5.
wherein the first sensor data comprises pressure data and the first setpoint data comprises first pressure setpoint data, and wherein the actuation of the one or more components comprises actuating, based on the first actuation value, a throttle valve of the processing chamber to adjust a flow rate out of the processing chamber to cause the processing chamber to meet the first pressure setpoint data.
4.
wherein the first sensor data comprises temperature data and the first setpoint data comprises first temperature setpoint data, and wherein the actuation of the one or more components comprises actuating, based on the first actuation value, power provided to a heater of the processing chamber to adjust temperature in the processing chamber to cause the processing chamber to meet the first temperature setpoint data.
Regarding Claim 6:
claim 5 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
6.
determining, based on second disturbance data, a second actuation value associated with compensating for disturbance in the processing chamber.
[Examiner notes that, instant application limitation is an obvious variant of the limitation of claim 5 of US12130606B2 (right column) because, the US12130606B2 limitation describes, second actuation value is determined based on second disturbance data]
5.
determining, based on the second disturbance data, a second actuation value to use with further executions of the first recipe operation.
Regarding Claim 7:
claim 6 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
7.
performing one or more of: moving-average filtering of the first disturbance data; or time-shift compensation of the first disturbance data.
6.
performing one or more of:
moving-average filtering of the first sensor data or the disturbance data; or
time-shift compensation of the first sensor data or the disturbance data.
Regarding Claim 8:
claim 7 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
8.
wherein the determining of the first actuation value comprises providing the first disturbance data to a physics-based model
7.
wherein the determining of the first actuation value comprises providing the disturbance data to a physics-based model
and receiving output from the physics-based model indicative of the first actuation value
and receiving output from the physics-based model indicative of the first actuation value.
Regarding Claim 9:
claim 9 of U.S. Patent No. US12130606B2 discloses,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
9.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to:
9.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to:
determine, based at least in part on first disturbance data, a first actuation value associated with compensating for disturbance in a processing chamber;
[Examiner notes that, instant application limitation describes, determination of actuation value based on disturbance data and the purpose to compensate for disturbance in a processing chamber that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes determining actuation value based on disturbance data such that actuation compensates for disturbance]
determine, based at least in part on the disturbance data, a first actuation value associated with one or more components of a processing chamber, wherein actuation of the one or more components according to the first actuation value compensates for disturbance;
associate the first actuation value with an identifier corresponding to a first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
associate the first actuation value with an identifier corresponding to the first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
cause, based on retrieval of the first actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance.
[Examiner notes that, instant application limitation describes,
to compensate for the disturbance, causing actuation of one or more components during a subsequent execution of the first recipe that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes, to compensate for the disturbance, causing actuation of the one or more components during a subsequent execution of the first recipe;
the instant limitation describes broader execution of the first recipe regardless of first substrate or subsequent substrate]
cause, based on retrieval of the first actuation value via the identifier, the actuation of the one or more components while processing the first substrate or a subsequent substrate during a subsequent execution of the first recipe operation of the substrate processing recipe to preemptively compensate for the disturbance.
Regarding Claim 10:
claim 9 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
10.
wherein the first disturbance data is associated with a comparison of first sensor data and first setpoint data,
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, disturbance data that is based on comparison of the first sensor data and first setpoint data]
9.
determine disturbance data based on a comparison of the first sensor data and first setpoint data of the first recipe operation,
wherein the first sensor data is associated with processing a first substrate according to the first recipe operation, and
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, first sensor data is received while processing a first substrate during a first execution of a first recipe operation]
receive first sensor data while processing a first substrate during a first execution of a first recipe operation of a substrate processing recipe….
wherein the first setpoint data is associated with the first recipe operation.
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, the first setpoint data is related to first recipe operation]
wherein the first setpoint data is indicative of one or more predetermined process condition setpoints for a duration of the first recipe operation;
Regarding Claim 11:
claim 14 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
11.
wherein the first setpoint data is indicative of a change in one or more predetermined process condition setpoints during the first recipe operation.
14.
wherein the first setpoint data is indicative of a change in the one or more predetermined process condition setpoints during the first recipe operation.
Regarding Claim 12:
claim 11 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
12.
determine, based on second disturbance data, a second actuation value associated with compensating for disturbance in the processing chamber.
[Examiner notes that, instant application limitation is an obvious variant of the limitation of claim 5 of US12130606B2 (right column) because, the US12130606B2 limitation describes, second actuation value is determined based on second disturbance data]
11.
determine, based on the second disturbance data, a second actuation value to use with further executions of the first recipe operation.
Regarding Claim 13:
claim 12 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
13.
wherein the processing device is further to perform one or more of: moving-average filtering of the first disturbance data; or time-shift compensation of the first disturbance data.
12.
wherein the processing device is further to perform one or more of:
moving-average filtering of the first sensor data or the disturbance data;
time-shift compensation of the first sensor data or the disturbance data; or….
Regarding Claim 14:
claim 13 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
14.
wherein to determine the first actuation value, the processing device is to provide the first disturbance data to a physics-based model
13.
wherein to determine the first actuation value, the processing device is to provide the disturbance data to a physics-based model
and receive output from the physics-based model indicative of the first actuation value.
and receive output from the physics-based model indicative of the first actuation value.
Regarding Claim 15:
claim 15 of U.S. Patent No. US12130606B2 discloses,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
15.
A system comprising:
memory; and
a processing device coupled to the memory, the processing device to:
15.
A system comprising:
memory; and
a processing device coupled to the memory, the processing device to:
determine, based at least in part on first disturbance data, a first actuation value associated with compensating for disturbance in a processing chamber;
[Examiner notes that, instant application limitation describes, determination of actuation value based on disturbance data and the purpose to compensate for disturbance in a processing chamber that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes determining actuation value based on disturbance data such that actuation compensates for disturbance]
determine, based at least in part on the disturbance data, a first actuation value associated with one or more components of a processing chamber, wherein actuation of the one or more components according to the first actuation value compensates for disturbance;
associate the first actuation value with an identifier corresponding to a first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
associate the first actuation value with an identifier corresponding to the first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation;
cause, based on retrieval of the first actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance.
[Examiner notes that, instant application limitation describes,
to compensate for the disturbance, causing actuation of one or more components during a subsequent execution of the first recipe that is an obvious variant of the limitation of US12130606B2 (right column) because, the US12130606B2 limitation also describes, to compensate for the disturbance, causing actuation of the one or more components during a subsequent execution of the first recipe;
the instant limitation describes broader execution of the first recipe regardless of first substrate or subsequent substrate]
cause, based on retrieval of the first actuation value via the identifier, the actuation of the one or more components while processing the first substrate or a subsequent substrate during a subsequent execution of the first recipe operation of the substrate processing recipe to preemptively compensate for the disturbance.
Regarding Claim 16:
claim 15 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
16.
wherein the first disturbance data is associated with a comparison of first sensor data and first setpoint data,
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, disturbance data that is based on comparison of the first sensor data and first setpoint data]
15.
determine disturbance data-based on a comparison of the first sensor data and first setpoint data of the first recipe operation,
wherein the first sensor data is associated with processing a first substrate according to the first recipe operation [Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, first sensor data is received while processing a first substrate during a first execution of a first recipe operation]
receive first sensor data while processing a first substrate during a first execution of a first recipe operation of a substrate processing recipe…
wherein the first setpoint data is associated with the first recipe operation.
[Examiner notes that, claim 1 limitation of US12130606B2 (right column) describes, the first setpoint data is related to first recipe operation]
wherein the first setpoint data is indicative of one or more predetermined process condition setpoints for a duration of the first recipe operation;
Regarding Claim 17:
claim 20 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
17.
wherein the first setpoint data is indicative of a change in one or more predetermined process condition setpoints during the first recipe operation.
20.
wherein the first setpoint data is indicative of a change in the one or more predetermined process condition setpoints during the first recipe operation.
Regarding Claim 18:
claim 17 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
18.
determine, based on second disturbance data, a second actuation value associated with compensating for disturbance in the processing chamber.
[Examiner notes that, instant application limitation is an obvious variant of the limitation of claim 5 of US12130606B2 (right column) because, the US12130606B2 limitation describes, second actuation value is determined based on second disturbance data]
17.
determine, based on the second disturbance data, a second actuation value to use with further executions of the first recipe operation.
Regarding Claim 19:
claim 18 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
19.
wherein the processing device is further to perform one or more of:
moving-average filtering of the first disturbance data; or
time-shift compensation of the first disturbance data.
18.
wherein the processing device is further to perform one or more of:
moving-average filtering of the first sensor data or the disturbance data;
time-shift compensation of the first sensor data or the disturbance data; or…
Regarding Claim 20:
claim 19 of U.S. Patent No. US12130606B2 further disclose,
Claim #
Instant app. 18882059
Claim #
U.S. Patent No. US12130606B2
20.
wherein to determine the first actuation value, the processing device is to provide the first disturbance data to a physics-based model
19.
wherein to determine the first actuation value, the processing device is to provide the disturbance data to a physics-based model
and receive output from the physics-based model indicative of the first actuation value.
and receive output from the physics-based model indicative of the first actuation value.
Allowable Subject Matter
Independent claims
Claims 1, 9, and 15 would be allowable if they overcome the double patenting rejection(s) set forth in this Office action.
Reasons for Allowance
Claims 1-20 are allowable. The following is an examiner’s statement of reasons for indication of allowance:
Claims 1-8:
Regarding Claim 1:
Porthouse et al. (US20130018500A1) discloses, A method comprising: [¶4: Methods and apparatus for processing a substrate using model-based pressure control are provided herein. In some embodiments, a method of controlling a process chamber having a processing volume includes predetermining a relationship between pressure in the processing volume and a position of an exhaust valve as a function of a process parameter;];
determining, based at least in part on first disturbance data, a first actuation value associated with compensating for disturbance in a processing chamber; [¶61: the method 600…the pressure profile generator 304 may output a command pressure (Pcmd)…The pressure in the chamber 102 may be measured at the intermediate position of the exhaust valve 126 and compared to the command pressure, Pcmd. If the difference between the measured pressure and the command pressure does not fall within a desired tolerance level,…the command position (θcmd) of the exhaust valve 126 may be adjusted…to achieve the desired tolerance level.];
causing, based on…the first actuation value….actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance. [¶61: the method 600…The pressure in the chamber 102 may be measured at the intermediate position of the exhaust valve 126 and compared to the command pressure, Pcmd. If the difference between the measured pressure and the command pressure does not fall within a desired tolerance level,…the command position (θcmd) of the exhaust valve 126 may be adjusted…to achieve the desired tolerance level. The operation continues to iterate until the second position has been reached over either the first, the second, or the third times.];
SELOW (US20200090968A1) discloses, associating the first actuation value…corresponding to a first recipe operation [¶53: At 460, the method compares a difference between the parameter and a predetermined value to a predetermined threshold. If the difference is greater than the predetermined threshold (or the user does not stop the calibration) as determined at 460, the method time shifts the parameter by the delay at 462. At 464, the feedforward parameters are adjusted based on changes in the parameter during the steps and the duration of the steps.]
the first actuation value is to be retrieved… for subsequent execution of the first recipe operation [¶53: If the difference is greater than the predetermined threshold (or the user does not stop the calibration) as determined at 460, the method time shifts the parameter by the delay at 462. At 464, the feedforward parameters are adjusted based on changes in the parameter during the steps and the duration of the steps.
Examiner notes, SELOW discloses, a first recipe at 410, and then see the subsequent execution from 442-464-442 for the same recipe];
The following prior arts teach similar subject matter in the field of industrial compensation control system:
Kraus et al. (US20180138061A1) - Selective etch rate monitor:
¶48: outputs of the sensor 250 are analyzed…data from the processing of the first substrate is fed forward and used to modify the processing recipe for use on a second substrate….the processing recipe may be modified by changing one or more of the processing parameters of the process recipe….using feed forward information from a processing recipe executed on a first substrate in order to modify the process recipe for use on a second substrate. As such, the process recipe may be refined to allow for a desired outcome to be obtained in a more efficient manner.
Zhang et al. (US20190393059A1) - Model-based control of substrate processing systems:
¶4: A system for controlling a parameter of a plant associated with a substrate processing chamber…measure a response of the plant associated with the substrate processing chamber when the parameter of the plant is changed….determine a delay and a gain of the plant based on the response…receive a set point for the parameter and a measurement of the parameter….generate a prediction of a delay-free value of the parameter based on the set point for the parameter and the measurement of the parameter using the model….compare the prediction with the set point to generate a control signal, and control the parameter of the plant based on the control signal.
However, none of the above described references taken either alone or in obvious combination disclose, A method, specifically including:
associating the first actuation value with an identifier corresponding to a first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation; and
causing, based on retrieval of the first actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance.
(in combination with other elements of the claim)
having all the claimed features of applicant’s instant invention, including:
A method comprising:
determining, based at least in part on first disturbance data, a first actuation value associated with compensating for disturbance in a processing chamber;
associating the first actuation value with an identifier corresponding to a first recipe operation, wherein the first actuation value is to be retrieved, via the identifier, for subsequent execution of the first recipe operation; and
causing, based on retrieval of the first actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the first recipe operation to compensate for the disturbance.
Claims 2-8 are allowed based on their dependencies on claim 1.
Claims 9-14:
Regarding Claim 9:
The non-transitory machine-readable storage medium of claim 9 includes similar limitations as the method of claim 1. Therefore, the non-transitory machine-readable storage medium of claim 9 is allowed for the same reasons as described above in claim 1.
Claims 10-14 are allowable based on their dependencies on claim 9.
Claims 15-20:
Regarding Claim 15:
The system of claim 15 includes similar limitations as the method of claim 1. Therefore, the system of claim 15 is allowed for the same reasons as described above in claim 1.
Claims 16-20 are allowable based on their dependencies on claim 15.
It is for these reasons that applicant's invention defines over the prior art of the record.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion
The prior art made of record and not relied upon is considered pertinent to
applicant's disclosure is listed in the PTO-892 Notice of Reference Cited document.
Lee et al. (US20190393059A1) – Model-based control of substrate processing systems:
¶26: The valve unit 220…may adjust the outflow rate Qout of the process gas flowing from or exiting the mass flow controller 200. The valve unit 220 is driven in response to the correction signal S1 applied from the controller 230, and may adjust an opening degree of the channel inside the mass flow controller 200 such that the outflow rate Qout is equal to the reference (or alternatively, preset) flow rate.
SILVEIRA et al. (US20170323813A1) - Advanced temperature control for wafer carrier in plasma processing chamber:
¶8: uses closed loop control and a predictive model to control the temperature of a wafer carrier. A measured temperature is received….determine a first flow rate through a first fluid channel of the carrier thermally coupled to the first thermal zone and to determine a second flow rate through a second fluid channel of the carrier thermally coupled to the second thermal zone. A first valve coupled to the first fluid channel is modulated and a second valve coupled to the second fluid channel is modulated to control a rate of flow of thermal fluid from a heat exchanger to the respective fluid channels.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to MOHAMMED SHAFAYET whose telephone number is (571)272-8239. The examiner can normally be reached M-F 8:30 AM-5:00 PM.
Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Kenneth Lo can be reached at (571) 272-9774. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
/M.S./
Patent Examiner,
Art Unit 2116
/KENNETH M LO/Supervisory Patent Examiner, Art Unit 2116
Prosecution Insights