Prosecution Insights
Last updated: October 02, 2026
Application No. 18/883,743

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, BREAK-IN DEVICE, METHOD FOR ESTIMATING NUMBER OF FINE PARTICLES ADHERING TO SUBSTRATE, METHOD FOR DETERMINING DEGREE OF CONTAMINATION OF SUBSTRATE CLEANING MEMBER, AND METHOD FOR DETERMINING BREAK-IN PROCESSING

Non-Final OA §102
Filed
Sep 12, 2024
Priority
Jun 15, 2021 — JP 2021-099288 +1 more
Examiner
GOLIGHTLY, ERIC WAYNE
Art Unit
1714
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Ebara Corporation
OA Round
1 (Non-Final)
78%
Grant Probability
Favorable
1-2
OA Rounds
11m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 78% — above average
78%
Career Allowance Rate
680 granted / 876 resolved
+12.6% vs TC avg
Strong +26% interview lift
Without
With
+25.5%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
35 currently pending
Career history
901
Total Applications
across all art units

Statute-Specific Performance

§101
0.5%
-39.5% vs TC avg
§103
52.8%
+12.8% vs TC avg
§102
12.3%
-27.7% vs TC avg
§112
29.4%
-10.6% vs TC avg
Black line = Tech Center average estimate • Based on career data from 876 resolved cases

Office Action

§102
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Invention I (claim 1) in the reply filed on 07/29/2026 is acknowledged. Claims 2-4 are withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention, there being no allowable generic or linking claim. Specification The disclosure is objected to because of the following informalities: On page 1 of the specification, in para [0001], the phrase “, and issued as U.S. Patent No. 12,128,449 on October 29, 2024”, or the like, should be added immediately after “2022” in line 2. Appropriate correction is required. Claim Interpretation The following is a quotation of 35 U.S.C. 112(f): (f) Element in Claim for a Combination. – An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof. The following is a quotation of pre-AIA 35 U.S.C. 112, sixth paragraph: An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof. The claims in this application are given their broadest reasonable interpretation using the plain meaning of the claim language in light of the specification as it would be understood by one of ordinary skill in the art. The broadest reasonable interpretation of a claim element (also commonly referred to as a claim limitation) is limited by the description in the specification when 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is invoked. As explained in MPEP § 2181, subsection I, claim limitations that meet the following three-prong test will be interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph: (A) the claim limitation uses the term “means” or “step” or a term used as a substitute for “means” that is a generic placeholder (also called a nonce term or a non-structural term having no specific structural meaning) for performing the claimed function; (B) the term “means” or “step” or the generic placeholder is modified by functional language, typically, but not always linked by the transition word “for” (e.g., “means for”) or another linking word or phrase, such as “configured to” or “so that”; and (C) the term “means” or “step” or the generic placeholder is not modified by sufficient structure, material, or acts for performing the claimed function. Use of the word “means” (or “step”) in a claim with functional language creates a rebuttable presumption that the claim limitation is to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites sufficient structure, material, or acts to entirely perform the recited function. Absence of the word “means” (or “step”) in a claim creates a rebuttable presumption that the claim limitation is not to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is not interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites function without reciting sufficient structure, material or acts to entirely perform the recited function. Claim limitations in this application that use the word “means” (or “step”) are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. Conversely, claim limitations in this application that do not use the word “means” (or “step”) are not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, because the claim limitation(s) uses a generic placeholder that is coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitation(s) is/are: self-cleaning member in claim 1, a substrate cleaning member in claim 1, and measurement module in claim 1. Because this/these claim limitation(s) is/are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, it/they is/are being interpreted to cover the corresponding structure described in the specification as performing the claimed function, and equivalents thereof. Based on a review of the specification, a self-cleaning member is interpreted to include a plate and nozzle, or equivalents thereof; a substrate cleaning member is interpreted to include a sponge roller, or equivalents thereof; and a measurement module is interpreted to include a sensor, or equivalents thereof. If applicant does not intend to have this/these limitation(s) interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, applicant may: (1) amend the claim limitation(s) to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph (e.g., by reciting sufficient structure to perform the claimed function); or (2) present a sufficient showing that the claim limitation(s) recite(s) sufficient structure to perform the claimed function so as to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. Claim Rejections - 35 USC § 102 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim 1 is rejected under 35 U.S.C. 102(a)(1) as being anticipated by JP 2020522126 (JP ‘126, and note the attached translation). Regarding claim 1, JP ‘126 teaches a break-in device (para [0009], [0016], [0041], [0046], [0047], [0053], [0060], [0065], Figs. 3-5, translation, abstract, page 2, para beginning “In the semiconductor” through para beginning “As more fully shown”) comprising: a self-cleaning member (ref. 310) configured to come into sliding contact with a substrate cleaning member (ref. 320) before substrate cleaning, and perform break-in processing on the substrate cleaning member using a cleaning liquid supplied from a nozzle (translation, page 7, para beginning “FIG. 3 illustrates”); a measurement module (ref. 442, ref. 444 and ref. 446) configured to measure a physical property value of a waste liquid of the cleaning liquid used for the break-in processing (translation, page 10, para beginning “FIG. 4B illustrates”); and a controller (ref. 440 and ref. 160) configured to determine whether the break-in processing is appropriate based on the physical property value of the waste liquid (translation, page 10, para beginning “FIG. 4B illustrates”, page 11, para beginning “In various embodiments” through page 12, para beginning “The method and system may be implemented”). It is noted that the recited substrate cleaning member, cleaning liquid, nozzle, and waste liquid are not positively claimed and are not interpreted to be required structural features of the claimed device. Conclusion The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US 2021/0039142 to Takatoh et al. teaches substrate cleaning apparatus. Any inquiry concerning this communication or earlier communications from the examiner should be directed to ERIC GOLIGHTLY whose telephone number is (571)270-3715. The examiner can normally be reached M-F: 10 am - 7 pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Kaj Olsen can be reached at (571) 272-1344. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /ERIC W GOLIGHTLY/Primary Examiner, Art Unit 1714
Read full office action

Prosecution Timeline

Sep 12, 2024
Application Filed
Sep 10, 2026
Non-Final Rejection mailed — §102 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12741299
APPARATUS AND METHODS FOR EXHAUST CLEANING
2y 5m to grant Granted Sep 22, 2026
Patent 12736047
STUCK-PUMP PREVENTION DEVICE
1y 9m to grant Granted Sep 15, 2026
Patent 12722189
AIR-BLOWING ROLLER, DUST REMOVAL APPARATUS AND METHOD
2y 3m to grant Granted Sep 01, 2026
Patent 12721079
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
2y 1m to grant Granted Aug 25, 2026
Patent 12709963
Cleaning Tool and Method
3y 11m to grant Granted Aug 18, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
78%
Grant Probability
99%
With Interview (+25.5%)
2y 11m (~11m remaining)
Median Time to Grant
Low
PTA Risk
Based on 876 resolved cases by this examiner. Grant probability derived from career allowance rate.

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