Prosecution Insights
Last updated: July 17, 2026
Application No. 18/941,077

PHOTOLITHOGRAPHY RETICLE STAGE DRIVE SYSTEM

Non-Final OA
Filed
Nov 08, 2024
Priority
Nov 09, 2023 — provisional 63/597,409
Examiner
ASFAW, MESFIN T
Art Unit
2882
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Massachusetts Institute of Technology
OA Round
1 (Non-Final)
83%
Grant Probability
Favorable
1-2
OA Rounds
12m
Est. Remaining
97%
With Interview

Examiner Intelligence

Grants 83% — above average
83%
Career Allowance Rate
808 granted / 976 resolved
+14.8% vs TC avg
Moderate +14% lift
Without
With
+14.1%
Interview Lift
resolved cases with interview
Typical timeline
2y 8m
Avg Prosecution
24 currently pending
Career history
1006
Total Applications
across all art units

Statute-Specific Performance

§101
0.3%
-39.7% vs TC avg
§103
78.0%
+38.0% vs TC avg
§102
16.8%
-23.2% vs TC avg
§112
0.2%
-39.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 976 resolved cases

Prosecution Timeline

Nov 08, 2024
Application Filed
Apr 15, 2026
Non-Final Rejection mailed
Jun 16, 2026
Interview Requested
Jun 24, 2026
Applicant Interview (Telephonic)
Jun 24, 2026
Examiner Interview Summary

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12681392
CYCLIC EXPOSURE SCANNING SYSTEM HAVING DISTRIBUTED MULTI-LENS AND METHOD THEREOF
2y 3m to grant Granted Jul 14, 2026
Patent 12675050
Apparatus and method for laser interference structuring of substrates with periodic dot structures for anti-reflection properties
2y 6m to grant Granted Jul 07, 2026
Patent 12675053
STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD
2y 1m to grant Granted Jul 07, 2026
Patent 12675054
COATING AND DEVELOPING DEVICE
2y 4m to grant Granted Jul 07, 2026
Patent 12669755
IMAGING OPTICAL UNIT
2y 7m to grant Granted Jun 30, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
83%
Grant Probability
97%
With Interview (+14.1%)
2y 8m (~12m remaining)
Median Time to Grant
Low
PTA Risk
Based on 976 resolved cases by this examiner. Grant probability derived from career allowance rate.

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