Prosecution Insights
Last updated: August 17, 2026
Application No. 18/970,542

REDUCED FLUCTUATIONS AND INCREASED BRIGHTNESS UNIFORMITY OF LASER SUSTAINED PLASMA SOURCES

Non-Final OA §103
Filed
Dec 05, 2024
Priority
Feb 07, 2024 — provisional 63/550,610
Examiner
LUU, THANH X
Art Unit
2878
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
KLA Corporation
OA Round
1 (Non-Final)
78%
Grant Probability
Favorable
1-2
OA Rounds
9m
Est. Remaining
88%
With Interview

Examiner Intelligence

Grants 78% — above average
78%
Career Allowance Rate
1069 granted / 1369 resolved
+10.1% vs TC avg
Moderate +10% lift
Without
With
+10.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
24 currently pending
Career history
1393
Total Applications
across all art units

Statute-Specific Performance

§101
0.9%
-39.1% vs TC avg
§103
42.1%
+2.1% vs TC avg
§102
27.0%
-13.0% vs TC avg
§112
19.3%
-20.7% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1369 resolved cases

Office Action

§103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election of Species I, claims 1-13, 20 and 23 in the reply filed on July 10, 2026 is acknowledged. Because applicant did not distinctly and specifically point out the supposed errors in the restriction requirement, the election has been treated as an election without traverse (MPEP § 818.01(a)). Claims 14-19, 21, 22, 24 and 25 are withdrawn. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claim(s) 1, 20, 23 is/are rejected under 35 U.S.C. 103 as being unpatentable over Holt et al. (U.S. PGPUB 2022/0022295) in view of Brown et al. (U.S. PGPUB 2006/0087634). Regarding claims 1, 20, 23, Holt et al. disclose (Fig. 1) a method, a system and an illumination source comprising: a laser sustained plasma light source (102; [0034]) configured to generate a broadband light beam; a detector (122); a set of optics comprising an adjustable reflector (112), wherein the adjustable reflector is configured to receive and reflect the broadband light beam emitted from the laser sustained plasma light source. Holt et al. do not specifically disclose wherein the detector is configured to detect a brightness distribution of the broadband light beam emitted by the laser sustained plasma light source along one or more directions and one or more controllers communicatively coupled to the detector and the adjustable reflector and configured to: acquire, via the detector, and direct one or more feedback adjustments of the adjustable reflector based on the one or more signals. Brown et al. teach (Fig. 1) a detector (120) is configured to detect a brightness distribution of a beam emitted by a light source along one or more directions and one or more controllers (inherent in feedback loop) communicatively coupled to the detector and an adjustable reflector (124) and configured to: acquire, via the detector, and direct one or more feedback adjustments ([0033]) of the adjustable reflector based on the one or more signals. Thus, it would have been obvious to a person of ordinary skill in the art before the time of the effective filing of the invention to provide such a feedback system in the apparatus of Holt et al. in view of Brown et al. to improve the uniformity as taught, known and predictable. Claim(s) 1, 3, 9-12, 20, 23 is/are rejected under 35 U.S.C. 103 as being unpatentable over Sakai et al. (U.S. PGPUB 2017/0363876) in view of Bezel et al. (U.S. PGPUB 2021/0092826). Regarding claims 1, 3, 9-11, 20, 23, Sakai et al. disclose (Fig. 1) a method, a system and an illumination source comprising: a light source (10) configured to generate a light beam; a detector (50) is configured to detect a brightness distribution (light intensity distribution) of the light emitted by the light source along one or more directions; a set of optics comprising an adjustable reflector (20; [0036] reflection type), wherein the adjustable reflector is configured to receive and reflect the light beam emitted from the light source; and one or more controllers (60) coupled to the detector and the adjustable reflector and configured to acquire signals via the detector and direct one or more feedback adjustments of the adjustable reflector based on the one or more signals. Saikai et al. also disclose collection optical elements (12), a diode array detector ([0039]) detecting two or more directions and wherein four photodiodes would constitute a quad diode detector as claimed. Sakai et al. do not specifically disclose the light source being a laser sustained plasma light source emitting broadband light. Bezel et al. teach (Fig. 1) a laser sustained plasma light source (100) emitting broadband light. Thus, it would have been obvious to a person of ordinary skill in the art before the time of the effective filing of the invention to provide such a laser sustained plasma light source in the apparatus and method of Sakai et al. in view of Bezel et al. to provide more robust illumination as known and predictable. Regarding claim 12, Sakai et al. in view of Bezel et al. disclose the claimed invention a set forth above. Sakai et al. and Bezel et a. do not disclose a PID controller. However, PID controllers are well known in the art. It would have been obvious to a person of ordinary skill in the art before the time of the effective filing of the invention to use PID controllers in the apparatus of Sakai et al. in view of Bezel et al. to cost-effectively and simply implement a feedback control with PID controllers as known and predictable. Claim(s) 6-8 is/are rejected under 35 U.S.C. 103 as being unpatentable over Sakai et al. in view of Bezel et al., further in view of Murakami et al. (U.S. PGPUB 2023/0367230). Regarding claims 6-8, Sakai et al. view of Bezel et al. disclose the claimed invention as set forth above. Sakai et al. and Bezel et al. disclose a spatial light modulator and do not disclose an aimable reflector, deformable mirror reflector or DMD as claimed. Murakami et al. teach ([0148]) a spatial light modulator may be replaced with a DMD. The DMD being an aimable reflector or deformable mirror reflector as claimed. Thus, it would have been obvious to a person of ordinary skill in the art before the time of the effective filing of the invention to provide a DMD in the apparatus of Sakai et al. in view of Bezel et al. and Murakami et al. to substitute a reflective equivalent for a desired reflective configuration as known and predictable. Allowable Subject Matter Claims 2, 4, 5, 13 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to THANH LUU whose telephone number is (571)272-2441. The examiner can normally be reached 9AM-5:30PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Georgia Epps can be reached at 571-272-2328. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /THANH LUU/Primary Examiner, Art Unit 2878
Read full office action

Prosecution Timeline

Dec 05, 2024
Application Filed
Jul 29, 2026
Non-Final Rejection mailed — §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12704605
LIDAR AND AUTONOMOUS DRIVING VEHICLE
3y 9m to grant Granted Aug 11, 2026
Patent 12704500
PARALLELIZED PROBING OF A PLURALITY OF SAMPLES IN A SELF-ORGANIZED STRUCTURE
2y 9m to grant Granted Aug 11, 2026
Patent 12704435
OPTICAL TEST DEVICE AND CONNECTOR ADAPTER
2y 3m to grant Granted Aug 11, 2026
Patent 12700209
APPARATUS AND METHOD FOR A VEHICLE RECOGNIZING AN OBJECT USING PATTERN RECOGNITION
3y 1m to grant Granted Aug 04, 2026
Patent 12701343
PIXEL READOUT CIRCUIT
2y 2m to grant Granted Aug 04, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2
Expected OA Rounds
78%
Grant Probability
88%
With Interview (+10.2%)
2y 6m (~9m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1369 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month