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+63.7% interview lift. Interview already conducted in this application's prosecution history. This examiner has a 52% grant rate with +63.7% interview lift. Since an interview has already been tried, recommend written response with narrowed claims based on precedent claim evolution patterns.
APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE HAVING UPPER AND LOWER INLETS FOR SUPPLYING SUPERCRITICAL FLUIDS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME