2 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18741659 | Determination of Imaging Transfer Function of a Charged-Particle Exposure Apparatus Using Isofocal Dose Measurements | ASFAW, MESFIN T | 2882 | Non-Final OA | Jun 12, 2024 |
| 18572776 | ELECTRON BEAM LITHOGRAPHY APPARATUS, ELECTRON BEAM LITHOGRAPHY METHOD, AND RECORDING MEDIUM | CHANG, HANWAY | 2878 | Non-Final OA | Dec 20, 2023 |
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