3 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18631119 | INVERTED PLASMA SOURCE | SATHIRAJU, SRINIVAS | 2844 | Non-Final OA | Apr 10, 2024 |
| 18095881 | Robust Ion Source | ENGLISH, PETER C | 3993 | Non-Final OA | Jan 11, 2023 |
| 17830232 | Light-Enhanced Ozone Wafer Processing System and Method of Use | CHAUDHRI, OMAIR | 1711 | Non-Final OA | Jun 01, 2022 |
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