DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1, 5-9, 13, 15-17 and 21 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Re claim 1, the phrase “maintaining current values of usage conditions in the substrate processing apparatus, the usage conditions including: usage counts of processes performed since a last maintenance process or of a number of times a component of the substrate processing apparatus has been used; usages times since a last maintenance process or of a component; and at least one observed accumulative film thickness within the substrate processing apparatus” is unclear and indefinite and it does not positively recite the active processing steps. For example, Re the phrase “current values” what is the current value(s)? And/or what are the processes? Re the phrase “usage counts of processes performed since a last maintenance process” how? and/or what are the active processing steps and/or what’s last maintenance process? And/or Re the phrase “of a number of times a component of the substrate processing apparatus has been used” is unclear and indefinite (how many time and/or upper limit? And/or what is the component? And/or what is the active processing step?). Re the phrase “of a component” what is the component? And/or what is the active processing steps for the accumulative film thickness etc.
Re claim 1, line 12, the phrase “selected ones of components” is unclear and indefinite (i.e., which one? And/or what are the components?).
Re claim 1, the phrase “determining whether any of the current values of the usage conditions has reached a corresponding threshold value” is unclear and indefinite (i.e., how? What’s the active processing steps? And/or what the threshold value?).
Re claim 1, the phrase “in response to a current value of a usage condition reaching its threshold value, determining that a maintenance process is required for any of the components of the substrate processing apparatus associated with the usage condition” is unclear and indefinite (i.e., is it the same one recited in line 5? And/or what is the current value and/or usage condition? And/or how and what are the active steps for determining? And/or what are the components and/or Which usage condition?).
Re claim 1, the phrase “executing the maintenance process for the any of the components of the substrate processing apparatus associated with the usage condition, wherein the maintenance process includes at least one of a purge process, a warm-up process, or a cleaning process” is unclear and indefinite (i.e., what are components? And/or which usage condition etc?).
Response to Arguments
Applicant's arguments filed 11/27/2024 have been fully considered but they are not persuasive for reasons herein above.
Conclusion
Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a).
A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to JACK CHEN whose telephone number is (571)272-1689. The examiner can normally be reached Monday to Friday, 8am to 4pm.
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Yara J. Green can be reached at (571)270-3035. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/JACK S CHEN/ Primary Examiner, Art Unit 2893
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