DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Terminal Disclaimer
The terminal disclaimer filed on 25 August 2026 disclaiming the terminal portion of any patent granted on this application which would extend beyond the expiration date of 11,227,773 has been reviewed and is accepted. The terminal disclaimer has been recorded.
Response to Amendments and Elections/Restrictions
Claims 1-26, 36-38 and 43 were previously cancelled.
Claims 27-35, 41-42 and 44-52 remain. Claims 44-52 are new.
Applicant’s election without traverse of Species 2 (corresponding to Fig. 7 and claims 24-27, 32, 36-43) was previously acknowledged.
Claims 28-29, 30-31 and 33-35 are withdrawn from further consideration pursuant to 37 CFR 1.142(b), as being drawn to nonelected inventions, there being no allowable generic or linking claim. Applicant timely traversed the restriction (election) requirement in the aforementioned reply.
Claims 48-51 are similar to claims previously withdrawn are also withdrawn as they are readable on a non-elected species.
Rejoinder will be considered if and when appropriate.
Claim Interpretation
Claim 27, 32 and 41 “controller” has been interpreted in accordance with the specification at e.g., para. 80, which discloses a controller may be a computer having a processor, a storage, an input device, a display device, and the like.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 41-42, 44-47 and 52 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Any claim not specifically mentioned is rejected based on its dependence.
Claim 41 remains unclear. Applicant has provided a statement regarding Examiner’s assumption in order to expedite examination, but has not provided a clarifying statement, and/or a clarifying amendment, and/or a clarifying reference to the original disclosure. Thus, the claim is still vague, at best. In an effort to further address the lack of clarification, encourage to Applicant to clearly clarify the same, and expedite examination Examiner provides suggest language (or similar) as set forth below. Please note: It is Applicant’s responsibility to for any amendment. Clarification and/or correction is requested.
Examiner suggests amending the relevant clauses of claim 41 (i.e. the clause beginning at line 13 of the claim and the final clause of the claim) according to the following language, or similar:
Claim 41, clause beginning at line 13
…”applying a first voltage to the first electrode and a second voltage to the second electrode during an idle period, the first voltage applied to the first electrode during the idle period and the second voltage applied to the second electrode during the idle period having the same magnitude and different polarities from each other…”
Claim 41, final clause
“…wherein, the controller is configured to apply a first positive voltage of the positive voltages to the first electrode during the plasma generation period, a second positive voltage of the positive voltages to the second electrode during the plasma generation period, and the negative voltage to the electrode during the plasma generation period, such that a difference between the positive voltage applied to the first electrode during the plasma generation period and the negative voltage applied to the electrode during the plasma generation period is set to be equal to the magnitude of the voltage applied to the first electrode during the idle period, and such that a difference between the positive voltage applied to the second electrode during the plasma generation period and the negative voltage applied to the electrode during the plasma generation period is set to be equal to the magnitude of the voltage applied to the second electrode during the idle period.
Allowable Subject Matter
Claims 27 and 32 are allowed.
The following is an examiner’s statement of reasons for allowance: With respect to claims 27 and 32, the prior art of record fails to teach or fairly suggest overall claimed apparatus and in particular, the structural configuration of the electrostatic chuck and its constituent features, irrespective of the controller configuration, as claimed.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Rejoinder will be considered when the entire application is condition for allowance.
Claim 41 would be allowable if rewritten or amended to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action.
The following is a statement of reasons for the indication of allowable subject matter: the prior art of record fails to teach or fairly suggest overall claimed apparatus and in particular, the structural configuration attributed to the controller including dedicated programming.
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. USP Pubs. 2003/0032301 and 2003/0047282 disclose relevant features of electrostatic chucks.
Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a).
A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to KARLA MOORE whose telephone number is (571)272-1440. The examiner can normally be reached Monday-Friday, 9am-6pm EST.
Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, PARVIZ HASSANZADEH can be reached on (571) 272-1435. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
/KARLA A MOORE/Primary Examiner, Art Unit 1716
Prosecution Insights