Prosecution Insights
Last updated: August 17, 2026
Application No. 17/664,607

Apparatus for Plasma Processing

Final Rejection §112
Filed
May 23, 2022
Priority
Aug 20, 2021 — provisional 63/235,418 +2 more
Examiner
LEE, AIDEN Y
Art Unit
1718
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tokyo Electron Limited
OA Round
3 (Final)
47%
Grant Probability
Moderate
4-5
OA Rounds
0m
Est. Remaining
73%
With Interview

Examiner Intelligence

Grants 47% of resolved cases
47%
Career Allowance Rate
229 granted / 485 resolved
-17.8% vs TC avg
Strong +26% interview lift
Without
With
+25.9%
Interview Lift
resolved cases with interview
Typical timeline
3y 6m
Avg Prosecution
31 currently pending
Career history
520
Total Applications
across all art units

Statute-Specific Performance

§101
0.4%
-39.6% vs TC avg
§103
50.3%
+10.3% vs TC avg
§102
12.4%
-27.6% vs TC avg
§112
33.6%
-6.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 485 resolved cases

Office Action

§112
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . DETAILED ACTION Response to Amendment Applicants’ submission of replacement drawing and amendment to the specification filed on 05/27/2026, is acknowledged. Applicants' amendment of the claims, filed on 05/27/2026, in response to the rejection of claims 1, 3-6, 8-20 from the non-final office action, mailed on 03/10/2026, by amending claims 1, 6, 8-9, 11, 15, 17-19; canceling claims 3, 13; and adding new claims 21-22; is acknowledged and will be addressed below. Claim Rejections - 35 USC § 112 The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action. Claims 15-20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor, or for pre-AIA the applicant regards as the invention. (1) The “a second end of a corresponding conductive offset” of Claim 15 is not clear. is it one of the plural conductive offsets, which are a prior cited limitation or additional offset? For the purpose of examination, it will be examined inclusive of: “the second end of each corresponding conductive offset” OR “a second end of a corresponding conductive offset of the plurality of conductive offsets”. (2) The “wherein the plate and the conductive ring structure form a pair of capacitors, the pair of capacitors comprising the first capacitor” of Claim 17 is still not clear. The claim 17 is dependent from the claim 15. Is the first capacitor a part of the pair of capacitors OR the first capacitor has a pair of capacitors? If the first capacitor is a part of the pair of capacitors, why the feature is recited in the dependent claim? in other words, the amendment of the claim 17 is constructed such that it broadens the claim 15. For the purpose of examination, it will be examined inclusive of: “wherein the first capacitor further comprise a pair of capacitors”. The following is a quotation of 35 U.S.C. 112(d): (d) REFERENCE IN DEPENDENT FORMS.—Subject to subsection (e), a claim in dependent form shall contain a reference to a claim previously set forth and then specify a further limitation of the subject matter claimed. A claim in dependent form shall be construed to incorporate by reference all the limitations of the claim to which it refers. The following is a quotation of pre-AIA 35 U.S.C. 112, fourth paragraph: Subject to the following paragraph [i.e., the fifth paragraph of pre-AIA 35 U.S.C. 112], a claim in dependent form shall contain a reference to a claim previously set forth and then specify a further limitation of the subject matter claimed. A claim in dependent form shall be construed to incorporate by reference all the limitations of the claim to which it refers. Claim 17 is rejected under 35 U.S.C. 112(d) or pre-AIA 35 U.S.C. 112, 4th paragraph, as being of improper dependent form for failing to further limit the subject matter of the claim upon which it depends, or for failing to include all the limitations of the claim upon which it depends. (1) as succussed in the 112 2nd paragraph above, The amendment of the claim 17 is constructed such that it broadens the claim 15, thus it fails to further limit the claim 15. Applicant may cancel the claim(s), amend the claim(s) to place the claim(s) in proper dependent form, rewrite the claim(s) in independent form, or present a sufficient showing that the dependent claim(s) complies with the statutory requirements. Allowable Subject Matter Claims 1-2, 4-12, 14 and 21-22 are allowable. Claims 2 and 7, previously withdrawn from consideration as a result of a restriction requirement, requires all the limitations of an allowable claim. Pursuant to the procedures set forth in MPEP § 821.04(a), the restriction requirement among inventions, as set forth in the Office action mailed on 05/08/2025, is hereby withdrawn and claims 2 and 7 hereby rejoined and fully examined for patentability under 37 CFR 1.104. In view of the withdrawal of the restriction requirement, applicant(s) are advised that if any claim presented in a continuation or divisional application is anticipated by, or includes all the limitations of, a claim that is allowable in the present application, such claim may be subject to provisional statutory and/or nonstatutory double patenting rejections over the claims of the instant application. Once the restriction requirement is withdrawn, the provisions of 35 U.S.C. 121 are no longer applicable. See In re Ziegler, 443 F.2d 1211, 1215, 170 USPQ 129, 131-32 (CCPA 1971). See also MPEP § 804.01. Response to Arguments Applicants’ arguments filed on 05/27/2026 have been fully considered but they are not convincing in light of the new ground of rejection above. Conclusion Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Any inquiry concerning this communication or earlier communications from the examiner should be directed to AIDEN Y LEE whose telephone number is (571)270-1440. The examiner can normally be reached on M-F: 9am-5pm PT. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Gordon Baldwin can be reached on 571-272-5166. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://pair-direct.uspto.gov. Should you have questions on access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative or access to the automated information system, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /AIDEN LEE/ Primary Examiner, Art Unit 1718
Read full office action

Prosecution Timeline

May 23, 2022
Application Filed
Sep 10, 2025
Non-Final Rejection mailed — §112
Nov 19, 2025
Response Filed
Mar 10, 2026
Non-Final Rejection mailed — §112
May 27, 2026
Response Filed
Jul 15, 2026
Final Rejection mailed — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12698570
HIGHLY REFLECTIVE METALLIC ALLOYS FOR COMPONENTS OF SEMICONDUCTOR PROCESSING EQUIPMENT, AND RELATED METHODS
3y 5m to grant Granted Aug 04, 2026
Patent 12696700
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
4y 3m to grant Granted Jul 28, 2026
Patent 12679772
CERAMIC COMPONENT AND METHOD OF MANUFACTURING CERAMIC COMPONENT
3y 11m to grant Granted Jul 14, 2026
Patent 12680157
FILM FORMATION CONTROL DEVICE, FILM FORMATION DEVICE AND FILM FORMATION METHOD
3y 2m to grant Granted Jul 14, 2026
Patent 12662728
MASK ASSEMBLY AND DEPOSITION APPARATUS INCLUDING THE SAME
3y 8m to grant Granted Jun 23, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

4-5
Expected OA Rounds
47%
Grant Probability
73%
With Interview (+25.9%)
3y 6m (~0m remaining)
Median Time to Grant
High
PTA Risk
Based on 485 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month