Prosecution Insights
Last updated: October 02, 2026
Application No. 17/692,688

SUBSTRATE COOLING UNIT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

Final Rejection §112
Filed
Mar 11, 2022
Priority
Sep 17, 2019 — JP 2019-167921 +1 more
Examiner
FORD, NATHAN K
Art Unit
1716
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Kokusai Electric Corporation
OA Round
4 (Final)
33%
Grant Probability
At Risk
5-6
OA Rounds
0m
Est. Remaining
68%
With Interview

Examiner Intelligence

Grants only 33% of cases
33%
Career Allowance Rate
221 granted / 674 resolved
-32.2% vs TC avg
Strong +35% interview lift
Without
With
+35.4%
Interview Lift
resolved cases with interview
Typical timeline
4y 4m
Avg Prosecution
40 currently pending
Career history
726
Total Applications
across all art units

Statute-Specific Performance

§101
0.3%
-39.7% vs TC avg
§103
58.1%
+18.1% vs TC avg
§102
15.4%
-24.6% vs TC avg
§112
24.2%
-15.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 674 resolved cases

Office Action

§112
DETAILED ACTION Applicant’s Response Acknowledged is the applicant’s request for reconsideration filed on May 20, 2026. Claims 1-2, 4-16, 18, and 20-21 are amended; claim 22 is new. The changes are sufficient to overcome the prior art rejections, but 112 rejections remain. Claim Interpretation The following is a quotation of 35 U.S.C. 112(f): (f) Element in Claim for a Combination. – An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof. This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) because the claim limitations use generic placeholders – “device” and “mechanism,” in this case – that are coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitations are: The “substrate holding mechanism” of claims 1-2, 5, 8-9, 12-13, and 15; The “substrate transfer device” of claim 14. Because these claim limitation(s) are being interpreted under 35 U.S.C. 112(f), they are being interpreted to cover the corresponding structure described in the specification as performing the claimed function, and equivalents thereof. The substrate holding mechanism (103) will be interpreted as a holder in accordance with paragraph [0032] of Applicant’s specification; The substrate transfer device (36) will be interpreted as a robot with an arm (42) in accordance with paragraph [0022]. If applicant does not intend to have these limitation(s) interpreted under 35 U.S.C. 112(f), applicant may: (1) amend the claim limitation(s) to avoid them being interpreted under 35 U.S.C. 112(f) (e.g., by reciting sufficient structure to perform the claimed function); or (2) present a sufficient showing that the claim limitation(s) recite(s) sufficient structure to perform the claimed function so as to avoid them being interpreted under 35 U.S.C. 112(f). Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. Claim 1 and its dependents are rejected under 35 U.S.C. 112(b) as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor regards as the invention. The fourth paragraph of claim 1 clarifies that the cooling plates face “respective surfaces of the first and second substrates,” while the final paragraph stipulates that these same cooling plates are “configured to cool the front or rear surface [sic] the respective first and second substrates.” Firstly, a preposition, like of, is missing from the last sentence. Secondly, it is unclear how the claimed “respective surfaces” of the fourth paragraph relate to the front and rear surfaces of the final paragraph. For purposes of consistency, the examiner suggests amending the fourth paragraph to clearly state that the first and second cooling plates face the front and rear surfaces of the first and second substrates, respectively. Thirdly, the final paragraph uses the conjunction “or” – “configured to cool the front or rear surface” – rather than the conjunction and. Because both the front surface of the first substrate and the rear surface of the second surface are cooled by the first and second cooling plates, respectively, the examiner believes the appropriate conjunction is and. THIS ACTION IS MADE FINAL. Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any extension fee pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Any inquiry concerning this communication or earlier communications from the examiner should be directed to NATHAN K FORD whose telephone number is (571)270-1880. The examiner can normally be reached on 11-7:30 PM. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Parviz Hassanzadeh, can be reached at 571 272 1435. The fax phone number for the organization where this application or proceeding is assigned is 571 273 8300. /N. K. F./ Examiner, Art Unit 1716 /KARLA A MOORE/ Primary Examiner, Art Unit 1716
Read full office action

Prosecution Timeline

Show 1 earlier event
Jun 18, 2025
Non-Final Rejection mailed — §112
Sep 18, 2025
Response Filed
Oct 02, 2025
Final Rejection mailed — §112
Feb 02, 2026
Request for Continued Examination
Feb 04, 2026
Response after Non-Final Action
Feb 25, 2026
Non-Final Rejection mailed — §112
May 20, 2026
Response Filed
Aug 17, 2026
Final Rejection mailed — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

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4y 4m to grant Granted Sep 22, 2026
Patent 12744190
PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD
3y 9m to grant Granted Sep 22, 2026
Patent 12721087
HEATED LID FOR A PROCESS CHAMBER
4y 11m to grant Granted Aug 25, 2026
Patent 12703909
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
3y 2m to grant Granted Aug 11, 2026
Patent 12660553
HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS
6y 0m to grant Granted Jun 16, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

5-6
Expected OA Rounds
33%
Grant Probability
68%
With Interview (+35.4%)
4y 4m (~0m remaining)
Median Time to Grant
High
PTA Risk
Based on 674 resolved cases by this examiner. Grant probability derived from career allowance rate.

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