Prosecution Insights
Last updated: August 18, 2026
Application No. 18/022,213

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Final Rejection §112
Filed
Feb 20, 2023
Priority
Aug 20, 2020 — JP 2020-139405 +1 more
Examiner
CHACKO DAVIS, DABORAH
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tokyo Electron Limited
OA Round
2 (Final)
72%
Grant Probability
Favorable
3-4
OA Rounds
0m
Est. Remaining
93%
With Interview

Examiner Intelligence

Grants 72% — above average
72%
Career Allowance Rate
710 granted / 988 resolved
+6.9% vs TC avg
Strong +21% interview lift
Without
With
+20.7%
Interview Lift
resolved cases with interview
Typical timeline
3y 4m
Avg Prosecution
34 currently pending
Career history
1023
Total Applications
across all art units

Statute-Specific Performance

§101
0.7%
-39.3% vs TC avg
§103
35.9%
-4.1% vs TC avg
§102
28.3%
-11.7% vs TC avg
§112
25.4%
-14.6% vs TC avg
Black line = Tech Center average estimate • Based on career data from 988 resolved cases

Office Action

§112
CTFR 18/022,213 CTFR 77255 DETAILED ACTION 07-03-aia AIA 15-10-aia The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA. Election/Restrictions Applicant’s election without traverse of Group I, claims 1-10, 12, in the reply filed on December 2, 2025, is acknowledged. Claim 13 is withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention, there being no allowable generic or linking claim. Claim Objections 07-29-01 AIA Claim s 1-2, 4-7, 9, and 12, are objected to because of the following informalities: Claim 1, at lines 15-16, and claim 9, at lines 1-2, recite applying at least one of thermal energy or energy rays, and is not clear, since thermal energy includes energy rays such as IR and is not clear as to what is encompassed by energy rays i.e., do the energy rays exclude IR or not . Appropriate correction is required. Claim Rejections - 35 USC § 112 07-30-02 AIA The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. 07-34-01 Claims 1-2, 4-7, 9, and 12, are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 1, at lines 10-11, recites, “transferring the substrate with the solid-state stiffener maintained in the solid state to a removal section” and the claim does not make clear where is the substrate retrieved from so as to be transferred to the removal section. Claim 1, at lines 10-13, recites, “transferring the substrate with the solid-state stiffener maintained in the solid state to a removal section; and after the transferring the substrate to the removal section, sublimating and removing, by the removal section ,” and is unclear. The recitation that the substrate is transferred to a “removal section” suggests the transfer of the substrate to a chamber or container or section or unit where removal occurs, however, the claim then recites that the sublimating and removing is by the removal section and renders the claim indefinite. It is not clear if the “removal section” refers to a unit or chamber or enclosure or container wherein the process of removing the solid-state stiffener material occurs or if the “removal section” itself is an etch gun or stripping mechanism or etchant. Response to Arguments Applicant’s arguments, see Amendment and Remarks, filed April 9, 2026, with respect to the rejection of claims 1-10, and 12, have been fully considered and are persuasive. The 35 U.S.C. 103 rejection of claims 1-10, and 12, has been withdrawn. However, upon further consideration, a new ground(s) of rejection is made over pending claims 1-2,4-7,9, and 12, see paragraph no. 5, above. Conclusion 07-40 AIA Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL . See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Any inquiry concerning this communication or earlier communications from the examiner should be directed to Daborah Chacko-Davis whose telephone number is (571) 272-1380. The examiner can normally be reached on 9:30AM-6:00PM EST Mon-Fri. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Sally A. Merkling can be reached on (571) 272-6297. The fax phone number for the organization where this application or proceeding is assigned is 571-272-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /DABORAH CHACKO-DAVIS/Primary Examiner, Art Unit 1737 May 29, 2026. Application/Control Number: 18/022,213 Page 2 Art Unit: 1737 Application/Control Number: 18/022,213 Page 3 Art Unit: 1737 Application/Control Number: 18/022,213 Page 4 Art Unit: 1737 Application/Control Number: 18/022,213 Page 5 Art Unit: 1737 Application/Control Number: 18/022,213 Page 6 Art Unit: 1737 Application/Control Number: 18/022,213 Page 7 Art Unit: 1737
Read full office action

Prosecution Timeline

Feb 20, 2023
Application Filed
Feb 20, 2023
Response after Non-Final Action
Jan 09, 2026
Non-Final Rejection mailed — §112
Apr 09, 2026
Response Filed
Jun 03, 2026
Final Rejection mailed — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
72%
Grant Probability
93%
With Interview (+20.7%)
3y 4m (~0m remaining)
Median Time to Grant
Moderate
PTA Risk
Based on 988 resolved cases by this examiner. Grant probability derived from career allowance rate.

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