Prosecution Insights
Last updated: August 18, 2026
Application No. 18/095,235

RESIST COMPOSITION AND PATTERN FORMING PROCESS

Non-Final OA §102§103
Filed
Jan 10, 2023
Priority
Jan 27, 2022 — JP 2022-010596
Examiner
CHU, JOHN S Y
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Shin-Etsu Chemical Co., Ltd.
OA Round
3 (Non-Final)
77%
Grant Probability
Favorable
3-4
OA Rounds
0m
Est. Remaining
83%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allowance Rate
750 granted / 973 resolved
+12.1% vs TC avg
Moderate +6% lift
Without
With
+5.7%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
50 currently pending
Career history
1036
Total Applications
across all art units

Statute-Specific Performance

§101
0.9%
-39.1% vs TC avg
§103
55.1%
+15.1% vs TC avg
§102
20.9%
-19.1% vs TC avg
§112
14.1%
-25.9% vs TC avg
Black line = Tech Center average estimate • Based on career data from 973 resolved cases

Office Action

§102 §103
DETAILED CORRESPONDENCE This Office action is in response to the RCE received May 26, 2026. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale or otherwise available to the public before the effective filing date of the claimed invention. (a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. The factual inquiries set forth in Graham v. John Deere Co., 383 U.S. 1, 148 USPQ 459 (1966), that are applied for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows: 1. Determining the scope and contents of the prior art. 2. Ascertaining the differences between the prior art and the claims at issue. 3. Resolving the level of ordinary skill in the pertinent art. 4. Considering objective evidence present in the application indicating obviousness or nonobviousness. Claims 1-15 are rejected under 35 U.S.C. 103 as being unpatentable over HATAKEYAMA et al (2020/0393760) in view of AQAD et al (12,140,866) and/or LABEAUME et al (2015/00093709). The claimed invention continues to now recite the following: PNG media_image1.png 716 686 media_image1.png Greyscale PNG media_image2.png 788 692 media_image2.png Greyscale PNG media_image3.png 866 712 media_image3.png Greyscale HATAKEYAMA et al discloses photoresist composition comprising the use of acid generating units in the base polymer used in photoresist compositions, see Polymer 2 on page 120 below: PNG media_image4.png 684 348 media_image4.png Greyscale HATAKEYAMA et al lack a working example using the claimed photoacids of formula (1). AQAD et al discloses a similar compound at column 70, lines 45-63 shown here lacking the tertiary carbon bonded to the iodine-substitute phenyl group shown below: PNG media_image5.png 244 554 media_image5.png Greyscale Example 28 and 33 in Tables 2 and 3, respectively is shown in a working example the claimed resist composition comprising a base resin and a solvent, see below: PNG media_image6.png 356 470 media_image6.png Greyscale PNG media_image7.png 282 472 media_image7.png Greyscale Claims 2 and 3 are met by the compound above. Claim 4 and 5 are met by Example 28 and 33 above. Claim 6 and 7 are is met by P1 and the Examples 28 and 33: PNG media_image8.png 210 352 media_image8.png Greyscale No claims above are allowed. Claims 10 and 11 are met by the disclosure in column 79, line 60- column 82, line 82, line 50. LABEAUME et al report acid generators of the following formula meeting the claimed structure of Formula (1), meeting claims 1, 2, 4-7 as seen on page 6,8 and 16 respectively. PNG media_image9.png 180 278 media_image9.png Greyscale PNG media_image10.png 204 318 media_image10.png Greyscale PNG media_image11.png 294 364 media_image11.png Greyscale The closest working example in LABEAUME is found in Example 7 on page 21, para. [0140] having a tertiary bond connected to the aromatic ring, see below: PNG media_image12.png 304 422 media_image12.png Greyscale Claims 4-8 are met by the resin in HATAKEYAMA et al Claim 9 to a surfactant is met by page 18, para. [0116] in LABEAUME as suitable additives in the composition. Claims 10 and 11 to the method are met by in LABEAUME in Example 13, page 22, para. [0149], below: It would have been prima facie obvious to one of ordinary skill in the art of photosensitive composition to use any of the disclose photoacids of AQAD such as PAG A7 wherein LABEAUME also show that tertiary carbon groups may be bonded to the Ar ring in place of the secondary carbon atom in PAG A7 with the reasonable expectation of same or similar results for high sensitivity, resolution and improved CDU in a photoresist composition. The rejection is repeated wherein the evidence submitted under Rule 132 has been considered, however the evidence not of proper scope, weight and character wherein the closest prior art compounds not compared would be the sulfonium cation of PAG-A7 from AQAD et al having an iodine substituted phenyl group on the end bonded to a secondary carbon atom shown below which is very close to the claimed tertiary carbon at the same location: PNG media_image13.png 246 566 media_image13.png Greyscale Claims 12-15 are met by the disclosure in para. [0100] of HATAKEYAMA et al wherein the anions disclosed meet the compounds recited in claim 13 and would be seen as conventional anion groups that can be paired with the cations of those known in AQAD with a tertiary carbon atom. Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN S. CHU whose telephone number is (571)272-1329. The examiner can normally be reached on M-F, IFP-Flex. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Keith Hendricks, can be reached at telephone number 571-272-1401. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from Patent Center. Status information for published applications may be obtained from Patent Center. Status information for unpublished applications is available through Patent Center to authorized users only. Should you have questions about access to the USPTO patent electronic filing system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). Examiner interviews are available via a variety of formats. See MPEP § 713.01. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) Form at https://www.uspto.gov/InterviewPractice. /John S. Chu/ Primary Examiner, Art Unit 1737 J. Chu June 13, 2026
Read full office action

Prosecution Timeline

Show 1 earlier event
Jul 15, 2025
Non-Final Rejection mailed — §102, §103
Nov 13, 2025
Response after Non-Final Action
Nov 13, 2025
Response Filed
Dec 04, 2025
Final Rejection mailed — §102, §103
Apr 30, 2026
Response after Non-Final Action
May 26, 2026
Request for Continued Examination
May 28, 2026
Response after Non-Final Action
Jun 17, 2026
Non-Final Rejection mailed — §102, §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12704781
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
3y 1m to grant Granted Aug 11, 2026
Patent 12699320
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
2y 12m to grant Granted Aug 04, 2026
Patent 12692218
RESIST MATERIAL AND PATTERN FORMING METHOD
1y 10m to grant Granted Jul 28, 2026
Patent 12681385
PHOTOSENSITIVE RESIN COMPOSITION AND MANUFACTURING METHOD OF DISPLAY DEVICE USING THE SAME
3y 12m to grant Granted Jul 14, 2026
Patent 12663714
RESIST COMPOSITION AND PATTERN FORMING PROCESS
2y 11m to grant Granted Jun 23, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
77%
Grant Probability
83%
With Interview (+5.7%)
2y 11m (~0m remaining)
Median Time to Grant
High
PTA Risk
Based on 973 resolved cases by this examiner. Grant probability derived from career allowance rate.

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