Prosecution Insights
Last updated: October 02, 2026
Application No. 18/105,275

REACTOR COOLING SYSTEM

Non-Final OA §103
Filed
Feb 03, 2023
Priority
Feb 08, 2022 — provisional 63/307,860
Examiner
SWEELY, KURT D
Art Unit
1718
Tech Center
1700 — Chemical & Materials Engineering
Assignee
ASM IP Holding B.V.
OA Round
3 (Non-Final)
53%
Grant Probability
Moderate
3-4
OA Rounds
0m
Est. Remaining
87%
With Interview

Examiner Intelligence

Grants 53% of resolved cases
53%
Career Allowance Rate
122 granted / 231 resolved
-12.2% vs TC avg
Strong +34% interview lift
Without
With
+33.9%
Interview Lift
resolved cases with interview
Typical timeline
3y 8m
Avg Prosecution
53 currently pending
Career history
285
Total Applications
across all art units

Statute-Specific Performance

§101
0.6%
-39.4% vs TC avg
§103
58.9%
+18.9% vs TC avg
§102
14.7%
-25.3% vs TC avg
§112
24.5%
-15.5% vs TC avg
Black line = Tech Center average estimate • Based on career data from 231 resolved cases

Office Action

§103
DETAILED ACTION This action is responsive to Applicant’s reply filed 7/6/2026 and the RCE filed 7/17/2026. Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Continued Examination Under 37 CFR 1.114 A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 7/6/2026 has been entered. Claim Status Claims 1-6, 8-15, 17-19, and 21-23 are pending. Claims 7, 16, and 20 are canceled. Claims 21-23 are new. Claims 1, 5, 9-10, 12-13, and 18 are currently amended. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. This application currently names joint inventors. In considering patentability of the claims the examiner presumes that the subject matter of the various claims was commonly owned as of the effective filing date of the claimed invention(s) absent any evidence to the contrary. Applicant is advised of the obligation under 37 CFR 1.56 to point out the inventor and effective filing dates of each claim that was not commonly owned as of the effective filing date of the later invention in order for the examiner to consider the applicability of 35 U.S.C. 102(b)(2)(C) for any potential 35 U.S.C. 102(a)(2) prior art against the later invention. Claims 1-4, 6, 8, and 21-22 are rejected under 35 U.S.C. 103 as being unpatentable over Chen (US Patent 5,906,683) in view of Sajoto (US Patent 6,527,865), Umotoy (US Pub. 2002/0072164), Yang (US Pub. 2018/0122680), and Kishimoto (US Pub. 2008/0164144). Regarding claim 1, Chen teaches a cooling system for a gas phase reactor (Abstract, Figs. 2-5, elements as follows), the cooling system comprising: a first plate comprising a first surface (Figs. 1-5, base plate #10 with upper surface), a first width, a first thickness (see Figs. 1-5); and a groove formed within the first plate, wherein the groove extends to the first surface of the first plate (Fig. 2, recess #109); a second plate comprising a second surface (Figs. 1-5, annular cap #110), a second width, and a second thickness (see Figs. 1-5), wherein the first plate and the second plate are coupled together at the first surface and the second plate to form a conduit comprising the groove enclosed by a portion of the second plate (Fig. 3, coolant passage #94), wherein the first plate and the second plate each form an annular structure (see Figs. 1-5), the second plate comprising an inner diameter and an outer diameter (see Fig. 2), and wherein a cooling fluid inlet and cooling fluid outlet are disposed radially outward from the inner diameter of the second plate (Figs. 1 and 4, manifold #30 comprises inlet #32 and outlet #34 radially outward from #110). Chen does not teach wherein the first plate or second plate is formed of a first metal. However, Sajoto teaches wherein a lid and/or chamber can comprise stainless steel (Sajoto – C4, L66- C5, L1). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the plates of Chen from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Modified Chen does not teach wherein the second plate is a bi-metal plate comprising a first layer and a second layer, wherein the second layer is formed of a second metal different from the first metal. However, Umotoy teaches wherein a lid plate is a bi-metal plate comprising a second layer, wherein the second layer is formed of a second metal different from the first metal (Umotoy – [0041] and Fig. 1B, lid assembly #10 comprises plates #12, 14, 16; [0041]-[0042]: #12/14/16 can comprise the same or different materials, including aluminum, nickel, aluminum alloys, and other metals- all of which are different from the stainless steel of modified Chen). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the second plate of modified Chen to comprise the two layer bi-metal structure of Umotoy as a matter of simple substitution (a bi-layer plate instead of a single-layer plate) to obtain predictable results. See MPEP 2143. The Examiner respectfully submits that a PHOSITA in the CVD arts is a highly educated, highly trained, highly skilled engineer with a breadth of knowledge spanning multiple scientific disciplines (chemical, mechanical, electrical, material, etc.). As such, said PHOSITA could easily arrive at the claimed invention using the disclosures of Chen and Umotoy without knowledge of the instant disclosure. Modified Chen does not teach a tube, wherein the tube is disposed within the conduit; and wherein the tube comprises a cooling fluid inlet at a first end of the tube and a cooling fluid outlet at a second end of the tube. However, Yang teaches wherein cooling systems can include just channels or channels with pipes (Yang – [0036]). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the Chen apparatus to comprise tubes within the cooling conduits as a matter of simple substitution to obtain predictable results ([0036]: Yang teaches wherein either structure can be used effectively for cooling). Modified Chen does not teach wherein the tube is metal (Yang is silent as to the materials used). However, Kishimoto teaches wherein a cooling tube is metal (Kishimoto – [0083]: stainless steel). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the tube of modified Chen (Yang) from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Regarding claim 2, Chen does not teach wherein the first plate and the first layer are formed of stainless steel (Chen is silent as to the materials used). However, Sajoto teaches wherein a lid and/or chamber can comprise stainless steel (Sajoto – C4, L66- C5, L1). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the plates of Chen from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Regarding claim 3, Chen teaches teach wherein the first width is greater than the second width (see Fig. 1, #10 wider than #110). Regarding claim 4, Chen does not explicitly teach wherein the second thickness is greater than the first thickness. However, the difference between the prior art structure (Chen) and the claimed invention is merely a recitation of relative dimensions. It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to change the thickness of the plates of Chen as a matter of obvious change in size/proportion. The courts have held that such a difference does not render the claimed invention patentably distinct. See MPEP 2144.04(IV) and In Gardnerv.TEC Syst., Inc., 725 F.2d 1338, 220 USPQ 777 (Fed. Cir. 1984), cert. denied, 469 U.S. 830, 225 USPQ 232 (1984). The Examiner respectfully submits that changing the width or thickness of either plate of Chen would not cause it to perform differently with minor to moderate changes in size. Regarding claim 6, modified Chen does not teach wherein the tube is formed of stainless steel (Yang is silent as to the materials used). However, Kishimoto teaches wherein a cooling tube is stainless steel (Kishimoto – [0083]: stainless steel). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the tube of modified Chen from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Regarding claim 8, Chen teaches wherein the groove is continuous and comprises a plurality of concentric arcuate shaped sections (see Fig. 2). Regarding claim 21, Chen does not teach wherein the second metal is aluminum. However, Umotoy teaches wherein a lid plate is a bi-metal plate comprising a second layer, wherein the second layer is formed of a second metal different from the first metal (Umotoy – [0041] and Fig. 1B, lid assembly #10 comprises plates #12, 14, 16; [0041]-[0042]: #12/14/16 can comprise the same or different materials, including aluminum, nickel, aluminum alloys, and other metals- all of which are different from the stainless steel of modified Chen). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the second plate of modified Chen to comprise the two layer bi-metal structure of Umotoy as a matter of simple substitution (a bi-layer plate instead of a single-layer plate) to obtain predictable results. See MPEP 2143. Additionally, it has been held that the selection of a known material based upon its suitability for its intended use is supportive of an obviousness determination. See MPEP 2144.07. Regarding claim 22, Chen teaches wherein the groove comprises a serpentine path between the cooling fluid inlet and the cooling fluid outlet (see Fig. 4). Claim 5 is rejected under 35 U.S.C. 103 as being unpatentable over Chen (US Patent 5,906,683), Sajoto (US Patent 6,527,865), Umotoy (US Pub. 2002/0072164), Yang (US Pub. 2018/0122680), and Kishimoto (US Pub. 2008/0164144), as applied to claims 1-4, 6, 8, and 21-22 above, further in view of Demaray (US Patent 5,433,835). The limitations of claims 1-4, 6, 8, and 21-22 are set forth above. Regarding claim 5, modified Chen does not explicitly teach wherein the first plate and the second plate are brazed together at the first surface and the second surface/first layer (Chen teaches welding – C6, L4-6). However, Demaray teaches wherein welding and brazing are art-recognized equivalent techniques for joining members (Demaray – [0022]). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to utilize either brazing or soldering for joining the first and second plates of modified Chen as a matter of obvious substitution of art-recognized equivalent techniques. See MPEP 2144.06(II). Claims 9-12, 15, and 17 are rejected under 35 U.S.C. 103 as being unpatentable over Chen (US Patent 5,906,683) in view of Sajoto (US Patent 6,527,865) and Umotoy (US Pub. 2002/0072164). Regarding claim 9, Chen teaches a cooling system for a gas phase reactor (Abstract, Figs. 2-5, elements as follows), the cooling system comprising: a first plate comprising a first surface (Figs. 1-5, base plate #10 with upper surface), a first thickness, a first width (see Figs. 1-5), and a groove is formed within the first plate, wherein the groove extends to the first surface of the first plate (Fig. 2, recess #109), a second plate comprising a first layer (Figs. 1-5, annular cap #110), wherein the second plate comprises a second thickness and a second width (see Figs. 1-5), wherein the first plate and the second plate are coupled together using a weld (C6, L4-6) at the first surface and the second surface to form a conduit comprising the groove enclosed by a portion of the second surface (Fig. 3, coolant passage #94), and a cooling fluid inlet and cooling fluid outlet fluidly connected to the conduit (Figs. 1 and 4, manifold #30 comprises inlet #32 and outlet #34 radially outward from #110). Chen does not teach wherein the first plate is formed of a first metal (Chen is silent as to the materials used). However, Sajoto teaches wherein a plate is formed of a first metal (Sajoto – C4, L66- C5, L1). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the plates of Chen from metal as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Modified Chen does not teach wherein the second plate is a bi-metal plate comprising a first layer and a second layer, wherein the second layer is formed of a second metal different from the first metal. However, Umotoy teaches wherein a lid plate is a bi-metal plate comprising a second layer, wherein the second layer is formed of a second metal different from the first metal (Umotoy – [0041] and Fig. 1B, lid assembly #10 comprises plates #12, 14, 16; [0041]-[0042]: #12/14/16 can comprise the same or different materials, including aluminum, nickel, aluminum alloys, and other metals- all of which are different from the stainless steel of modified Chen). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the second plate of modified Chen to comprise the two layer bi-metal structure of Umotoy as a matter of simple substitution (a bi-layer plate instead of a single-layer plate) to obtain predictable results. See MPEP 2143. The Examiner respectfully submits that a PHOSITA in the CVD arts is a highly educated, highly trained, highly skilled engineer with a breadth of knowledge spanning multiple scientific disciplines (chemical, mechanical, electrical, material, etc.). As such, said PHOSITA could easily arrive at the claimed invention using the disclosures of Chen and Umotoy without knowledge of the instant disclosure. Regarding claim 10, Chen teaches wherein the groove comprises a serpentine path between the cooling fluid inlet and the cooling fluid outlet (see Fig. 4). Regarding claim 11, Chen does not teach the added limitations of the claim. However, Sajoto teaches wherein a first metal is stainless steel (Sajoto – C4, L66- C5, L1). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the plates of Chen from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Regarding claim 12, modified Chen does not teach the added limitations of the claim. However, Umotoy teaches wherein a lid plate is a bi-metal plate comprising a second layer, wherein the second layer is formed of a second metal different from the first metal (Umotoy – [0041] and Fig. 1B, lid assembly #10 comprises plates #12, 14, 16; [0041]-[0042]: #12/14/16 can comprise the same or different materials, including aluminum, nickel, aluminum alloys, and other metals- all of which are different from the stainless steel of modified Chen). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the second plate of modified Chen to comprise the two layer bi-metal structure of Umotoy as a matter of simple substitution (a bi-layer plate instead of a single-layer plate) to obtain predictable results. See MPEP 2143. Regarding claim 15, Chen teaches teach wherein the first width is greater than the second width (see Fig. 1, #10 wider than #110). Chen does not explicitly teach wherein the second thickness is greater than the first thickness. However, the difference between the prior art structure (Chen) and the claimed invention is merely a recitation of relative dimensions. It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to change the thickness of the plates of Chen as a matter of obvious change in size/proportion. The courts have held that such a difference does not render the claimed invention patentably distinct. See MPEP 2144.04(IV) and In Gardnerv.TEC Syst., Inc., 725 F.2d 1338, 220 USPQ 777 (Fed. Cir. 1984), cert. denied, 469 U.S. 830, 225 USPQ 232 (1984). The Examiner respectfully submits that changing the width or thickness of either plate of Chen would not cause it to perform differently with minor to moderate changes in size. Regarding claim 17, Chen teaches wherein the first plate and the second plate each form an annular structure (see Figs. 1-5), the second plate comprising an inner diameter and an outer diameter (see Fig. 2), and wherein a cooling fluid inlet and cooling fluid outlet are disposed radially outward from the inner diameter of the second plate (Figs. 1 and 4, manifold #30 comprises inlet #32 and outlet #34 radially outward from #110), wherein the groove comprises a continuous serpentine path between the inlet/outlet (see Fig. 2). Claim 13 is rejected under 35 U.S.C. 103 as being unpatentable over Chen (US Patent 5,906,683), Sajoto (US Patent 6,527,865), and Umotoy (US Pub. 2002/0072164), as applied to claims 9-12, 15, and 17 above, further in view of Batzer (US Pub. 2018/0163305). The limitations of claims 9-12, 15, and 17 are set forth above. Regarding claim 13, Chen teaches wherein the weld is directly in contact with the second plate and the first plate (C6, L4-6: e-beam welding). Modified Chen does not teach wherein a material used for the weld comprises tungsten. However, Batzer teaches wherein e-beam welding and tungsten inert gas welding are art-recognized equivalents for apparatus fabrication (Batzer – [0058]). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to utilize either e-beam or TIG welding for joining the first and second plates of modified Chen as a matter of obvious substitution of art-recognized equivalent techniques. See MPEP 2144.06(II). Claim 14 is rejected under 35 U.S.C. 103 as being unpatentable over Chen (US Patent 5,906,683), Sajoto (US Patent 6,527,865), and Umotoy (US Pub. 2002/0072164), as applied to claims 9-12, 15, and 17 above, further in view of Yang (US Pub. 2018/0122680) and Kishimoto (US Pub. 2008/0164144). The limitations of claims 9-12, 15, and 17 are set forth above. Regarding claim 14, modified Chen does not teach the added limitations of the claim. However, Yang teaches wherein cooling systems can include just channels or channels with pipes (Yang – [0036]). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to further modify the modified Chen apparatus to comprise tubes within the cooling conduits as a matter of simple substitution to obtain predictable results ([0036]: Yang teaches wherein either structure can be used effectively for cooling). Modified Chen does not teach wherein the tube is metal (Yang is silent as to the materials used). However, Kishimoto teaches wherein a cooling tube is metal (Kishimoto – [0083]: stainless steel). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the tube of modified Chen (Yang) from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Claims 18-19 are rejected under 35 U.S.C. 103 as being unpatentable over Dunn (US Pub. 2014/0000843) in view of Chiang (US Pub. 2002/0076490), Chen (US Patent 5,906,683), Sajoto (US Patent 6,527,865), Umotoy (US Pub. 2002/0072164), Yang (US Pub. 2018/0122680), and Kishimoto (US Pub. 2008/0164144). Regarding claim 18, Dunn teaches a gas phase reactor system (Fig. 1, entirety), comprising: a reaction chamber (Fig. 1, chamber #10) comprising an upper region (Fig. 1, above susceptor #18), a lower region (Fig. 1, below susceptor #18), a bottom plate defining a bottom of the reaction chamber (Fig. 1, bottom wall #62), a susceptor disposed above the bottom plate (Fig. 1, susceptor #18); and a showerhead disposed within the upper region (Fig. 1, showerhead #12). Dunn does not teach a first cooling system disposed below the lower region and coupled to the bottom plate, and a second cooling system disposed above the showerhead. However, Chiang teaches this limitation (Chiang – [0109] and Fig. 13, cooling plate #110 and adjacent components form first system; [0104] and Fig. 13, cooling channels #146 above showerhead form second system). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the Dunn apparatus to comprise the first/second cooling systems of Chiang in order to control lid temperatures (Chiang – [0104]) and support temperatures (Chiang – [0163]) during processing (Chiang – [0009], [0019], [0025]) Modified Dunn does not teach wherein the first cooling system comprises: a first plate comprising a first surface and a first groove formed within the first plate, wherein the first groove extends to the first surface of the first plate, wherein the first plate is formed of a first metal; a second plate comprising a second surface, wherein the first plate and the second plate are coupled together at the first surface and the second surface to form a first conduit comprising the first groove enclosed by a portion of the second surface, nor the similar limitations of the second cooling system. However, Chen teaches wherein a cooling system comprises: a first plate comprising a first surface (Figs. 1-5, base plate #10 with upper surface), a first width, a first thickness (see Figs. 1-5); and a groove formed within the first plate, wherein the groove extends to the first surface of the first plate (Fig. 2, recess #109); a second plate comprising a second surface (Figs. 1-5, annular cap #110), a second width, and a second thickness (see Figs. 1-5), wherein the first plate and the second plate are coupled together at the first surface and the second plate to form a conduit comprising the groove enclosed by a portion of the second plate (Fig. 3, coolant passage #94), wherein the first plate and the second plate each form an annular structure (see Figs. 1-5), the second plate comprising an inner diameter and an outer diameter (see Fig. 2), and wherein a cooling fluid inlet and cooling fluid outlet are disposed radially outward from the inner diameter of the second plate (Figs. 1 and 4, manifold #30 comprises inlet #32 and outlet #34 radially outward from #110). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify each cooling system of modified Dunn to comprise the plate structure of Chen in order to allow temperature control, minimize leakage of fluids, facilitate cleaning, ease assembly/disassembly (Chen – C2, L12-36). Modified Dunn does not teach wherein the first plate or second plate is formed of a first metal. However, Sajoto teaches wherein a lid and/or chamber can comprise stainless steel (Sajoto – C4, L66- C5, L1). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the plates of modified Dunn from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Modified Dunn does not teach wherein the second plate is a bi-metal plate comprising a first layer and a second layer, wherein the second layer is formed of a second metal different from the first metal. However, Umotoy teaches wherein a lid plate is a bi-metal plate comprising a second layer, wherein the second layer is formed of a second metal different from the first metal (Umotoy – [0041] and Fig. 1B, lid assembly #10 comprises plates #12, 14, 16; [0041]-[0042]: #12/14/16 can comprise the same or different materials, including aluminum, nickel, aluminum alloys, and other metals- all of which are different from the stainless steel of modified Chen). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify the second plate of modified Dunn to comprise the two layer bi-metal structure of Umotoy as a matter of simple substitution (a bi-layer plate instead of a single-layer plate) to obtain predictable results. See MPEP 2143. The Examiner respectfully submits that a PHOSITA in the CVD arts is a highly educated, highly trained, highly skilled engineer with a breadth of knowledge spanning multiple scientific disciplines (chemical, mechanical, electrical, material, etc.). As such, said PHOSITA could easily arrive at the claimed invention using the disclosures of Chen and Umotoy without knowledge of the instant disclosure. Modified Dunn does not teach a first tube, wherein the tube is disposed within the conduit; and wherein the first tube comprises a first cooling fluid inlet at a first end of the first tube and a first cooling fluid outlet at a second end of the first tube, and a second tube disposed within the conduit, and wherein the second tube comprises a second cooling fluid inlet at a first end of the second tube and a second cooling fluid outlet at a second end of the second tube. However, Yang teaches wherein cooling systems can include just channels or channels with pipes (Yang – [0036]). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to further modify each cooling system of the modified Dunn apparatus to comprise tubes within the cooling conduits as a matter of simple substitution to obtain predictable results ([0036]: Yang teaches wherein either structure can be used effectively for cooling). Modified Dunn does not teach wherein the tube(s) is/are metal. However, Kishimoto teaches wherein a cooling tube is metal (Kishimoto – [0083]: stainless steel). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to fabricate the tube of modified Chen (Yang) from stainless steel as a matter of obvious material selection suitable for its intended purpose. See MPEP 2144.07 and In re Leshin, 277 F.2d 197, 125 USPQ 416 (CCPA 1960). Regarding claims 19 and 23, Dunn modified by Chiang does not teach the added limitations of the claim. However, Chen teaches wherein the first cooling system further comprises a first coupling assembly for connecting the first cooling fluid inlet and the first cooling fluid outlet to a cooling fluid source (Chen – Fig. 1, inlet/outlet #32/34 for connection to a fluid source). It would be obvious to one of ordinary skill in the art, before the effective filing date of the instant application, to modify each cooling system of modified Dunn to comprise the plate structure of Chen in order to allow temperature control, minimize leakage of fluids, facilitate cleaning, ease assembly/disassembly (Chen – C2, L12-36). Response to Arguments The status identifier of claim 13 is correct, thus the previous objection is withdrawn. Claims 13 and 18-19 have been suitably corrected to eliminate indefinite claim language, thus the previous §112(b) rejections are withdrawn. The arguments concerning the §103 rejections have been carefully considered but are moot in light of the new grounds of rejection as presented herein. The Examiner respectfully submits that Umotoy remedies any alleged deficiencies of the other prior art of record. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to Kurt Sweely whose telephone number is (571)272-8482. The examiner can normally be reached Monday - Friday, 9:00am - 5:00pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Gordon Baldwin can be reached at (571)-272-5166. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /Kurt Sweely/Primary Examiner, Art Unit 1718
Read full office action

Prosecution Timeline

Show 1 earlier event
Nov 18, 2025
Examiner Interview (Telephonic)
Dec 18, 2025
Non-Final Rejection mailed — §103
Mar 11, 2026
Response Filed
May 13, 2026
Final Rejection mailed — §103
Jul 06, 2026
Response after Non-Final Action
Jul 17, 2026
Request for Continued Examination
Jul 20, 2026
Response after Non-Final Action
Jul 31, 2026
Non-Final Rejection mailed — §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12744182
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA GENERATING APPARATUS
3y 7m to grant Granted Sep 22, 2026
Patent 12723311
DUAL AMPOULE SEPARATOR PLATE AND METHOD
4y 6m to grant Granted Sep 01, 2026
Patent 12716130
PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
4y 8m to grant Granted Aug 25, 2026
Patent 12692601
APPARATUS AND SYSTEM FOR DELIVERING GAS TO A PROCESS CHAMBER
4y 9m to grant Granted Jul 28, 2026
Patent 12695068
FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
4y 1m to grant Granted Jul 28, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

3-4
Expected OA Rounds
53%
Grant Probability
87%
With Interview (+33.9%)
3y 8m (~0m remaining)
Median Time to Grant
High
PTA Risk
Based on 231 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month