Prosecution Insights
Last updated: May 29, 2026
Application No. 18/144,952

METHOD FOR PREPARING SEMICONDUCTOR DEVICE WITH AIR SPACER

Non-Final OA §112
Filed
May 09, 2023
Priority
Aug 21, 2019 — divisional of 11/121,029 +1 more
Examiner
PARKER, JOHN M
Art Unit
2899
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Nanya Technology Corporation
OA Round
1 (Non-Final)
92%
Grant Probability
Favorable
1-2
OA Rounds
0m
Est. Remaining
93%
With Interview

Examiner Intelligence

Grants 92% — above average
92%
Career Allowance Rate
775 granted / 843 resolved
+23.9% vs TC avg
Minimal +1% lift
Without
With
+0.9%
Interview Lift
resolved cases with interview
Typical timeline
2y 2m
Avg Prosecution
12 currently pending
Career history
859
Total Applications
across all art units

Statute-Specific Performance

§101
0.4%
-39.6% vs TC avg
§103
74.1%
+34.1% vs TC avg
§102
10.6%
-29.4% vs TC avg
§112
3.6%
-36.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 843 resolved cases

Office Action

§112
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of claims 1-14 in the reply filed on 19 March 2026 is acknowledged. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claim 9 is rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 9 recites the limitation "the other side" in line 6. There is insufficient antecedent basis for this limitation in the claim. Double Patenting The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969). A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b). The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13. The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer. Claims 1-14 are provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1-10 of copending Application No. 18/232,833 (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because both applications claim the “same invention”. Specifically, at least claim 1 of this application is a generic claim of a allowable species claim 1 of Application No. 18/232,833. A species (narrow) claim is said to anticipate a generic (broad) claim thus double patenting exists. Regarding claim 1, Claim 1 of ‘833 anticipates every limitation of this claim. Regarding claim 2, Claim 2 of ‘833 anticipates every limitation of this claim. Regarding claim 3 Claim 1 of ‘833 anticipates every limitation of this claim. Regarding claim 4, Claim 3 of ‘833 anticipates every limitation of this claim. Regarding claim 5, Claim 1 of ‘833 anticipates every limitation of this claim. Regarding claim 6, Claim 4 of ‘833 anticipates every limitation of this claim. Regarding claim 7, Claim 5 of ‘833 anticipates every limitation of this claim. Regarding claim 8, Claim 6 of ‘833 anticipates every limitation of this claim. Regarding claim 9, Claim 7 of ‘833 anticipates every limitation of this claim. Regarding claim 10, Claim 7 of ‘833 anticipates every limitation of this claim. Regarding claim 11, Claim 7 of ‘833 anticipates every limitation of this claim. Regarding claim 12, Claim 8 of ‘833 anticipates every limitation of this claim. Regarding claim 13, Claim 9 of ‘833 anticipates every limitation of this claim. Regarding claim 14, Claim 10 of ‘833 anticipates every limitation of this claim. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. Allowable Subject Matter Claims 1-14 are rejected under double patenting above but are believed to be allowable if the double patenting rejection is overcome. Claim 9 is also rejected under 35 USC 112 above but is believed to be allowable if the antecedent basis problem (and double patenting) is overcome. The following is a statement of reasons for the indication of allowable subject matter: Regarding claim 1, the prior art fails to disclose or suggest the device as claimed. Specifically, the prior art fails to teach a dielectric isolation structure between adjacent two of the plurality of composite pillars, wherein the dielectric isolation structure comprises an air gap and a liner layer enclosing the air gap. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN M PARKER whose telephone number is (571)272-8794. The examiner can normally be reached M-F 7:30am - 3:30pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Zandra Smith can be reached at 571-272-2429. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /JOHN M PARKER/Examiner, Art Unit 2899
Read full office action

Prosecution Timeline

May 09, 2023
Application Filed
Apr 21, 2026
Non-Final Rejection mailed — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12581943
THREE-DIMENSIONAL (3D) METAL-INSULATOR-METAL CAPACITOR (MIMCAP) INCLUDING STACKED VERTICAL METAL STUDS FOR INCREASED CAPACITANCE DENSITY AND RELATED FABRICATION METHODS
4y 5m to grant Granted Mar 17, 2026
Patent 12568837
SEMICONDUCTOR CHIP, SEMICONDUCTOR PACKAGE INCLUDING THE SAME, AND METHOD OF FABRICATING THE SAME
2y 11m to grant Granted Mar 03, 2026
Patent 12564043
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
3y 1m to grant Granted Feb 24, 2026
Patent 12550721
INTER-WIRE CAVITY FOR LOW CAPACITANCE
3y 6m to grant Granted Feb 10, 2026
Patent 12543556
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
2y 11m to grant Granted Feb 03, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
92%
Grant Probability
93%
With Interview (+0.9%)
2y 2m (~0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 843 resolved cases by this examiner. Grant probability derived from career allowance rate.

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