Prosecution Insights
Last updated: April 19, 2026
Application No. 18/239,988

In-Vacuum Rotatable RF Component

Non-Final OA §102§103
Filed
Aug 30, 2023
Examiner
FORD, NATHAN K
Art Unit
1716
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Applied Materials, Inc.
OA Round
1 (Non-Final)
32%
Grant Probability
At Risk
1-2
OA Rounds
4y 7m
To Grant
68%
With Interview

Examiner Intelligence

Grants only 32% of cases
32%
Career Allow Rate
213 granted / 657 resolved
-32.6% vs TC avg
Strong +35% interview lift
Without
With
+35.4%
Interview Lift
resolved cases with interview
Typical timeline
4y 7m
Avg Prosecution
62 currently pending
Career history
719
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
52.2%
+12.2% vs TC avg
§102
16.1%
-23.9% vs TC avg
§112
28.8%
-11.2% vs TC avg
Black line = Tech Center average estimate • Based on career data from 657 resolved cases

Office Action

§102 §103
DETAILED ACTION Election Applicant’s election without traverse of Group I, claims 1-7 and 9-13, as well as Species B, in the reply filed on March 2, 2026, is acknowledged. Claims 1-8 are withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention, there being no allowable generic or linking claim. In addition, Applicant has amended claims 9 and 14, canceled claims 15-20, and added claims 21-23. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale or otherwise available to the public before the effective filing date of the claimed invention. Claims 9-11, 14, and 21-23 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Deak, IV, US 2006/0027763. Claim 9: Deak discloses an apparatus to allow rotation of a component within a chamber, comprising: A chamber wall (22c) defining the chamber (22) and having an opening ([0036]; Fig. 2); A rotatable shaft (310) having: An extended portion (~312) extending into the opening of the chamber wall; A retained portion (~311) disposed adjacent to the extended portion and outside the chamber; A component (250) disposed in a feedthrough in the rotatable shaft to extend through the opening and configured to rotate with the rotatable shaft [0012]; A first vacuum seal (320) disposed between the extended portion and the chamber wall [0055]. Apropos of the recitation of the “holder,” the examiner observes that the outstanding amendments have removed those limitations yoking the feature not just to mechanically related structures, like the rotatable shaft, but also to its functional purpose. As such, the holder may be construed broadly as nearly any feature: for instance, the holder may be taken as one of the robotic arms (44) shown by Figure 1, whereby any two portions of said arm may be taken as the “overhang” and “linear section,” with the scope of each arbitrarily circumscribed such that the diameter of the latter is greater than the retained portion and the diameter of the former is smaller than the retained portion, as claim 9 requires. Claim 10: Deak provides an interface component (110) disposed at a proximal end of the component (250) and adjacent to an outer surface of the rotatable shaft (Fig. 2). Further, a second vacuum seal (340) is disposed between an outer surface of the rotatable shaft and a back surface of the interface component [0054]. Claim 11: Deak’s second vacuum seal (340) may be taken to constitute the “EMI gasket,” as its presence will necessarily alter the distribution of an electromagnetic field. Claim 14: Deak discloses the broader structure of an ion implanter, comprising an ion source (12) and a linear accelerator, whereby the component (~24) is disposed within a cavity (22) of the linear accelerator (Fig. 1). Claim 21: Deak’s seal (320) will necessarily mitigate or alter electromagnetic fields. Claim 22: The rotatable shaft is spherical in its configuration. As such, the section immediately external to the chamber sidewall may be construed as the “retained portion,” whereby the outermost section may be taken as the “exterior portion.” Again, due to the spherical nature of the component, the exterior portion has a smaller diameter than the retained portion. Claim 23: The rejection of claim 22, above, substantially addresses this limitation. In addition, the interface component (110) is adjacent to the exterior portion. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102 of this title, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claim 12 is rejected under 35 U.S.C. 103 as being unpatentable over Deak in view of DiMarco et al., US 2014/0238159. Deak is silent regarding the claimed configuration of a coaxial connector. In supplementation, DiMarco provides a coaxial rotary shaft feedthrough, in which an interface component (100) comprises inner (5) and outer (7) connectors (Fig. 1B). The outer connector (7) couples to a rotary shaft, and the inner connector (5) couples to a component (6) in order to achieve independent rotation [0036-39]. It would have been obvious to configure Deak’s rotary mechanism as an coaxial orientation, since applying an known technique to a known device to yield predictable results is within the scope of ordinary skill. Claim 13 is rejected under 35 U.S.C. 103 as being unpatentable over Deak in view of Biloiu et al., US 2023/0124350. Deak’s component is not constituted as an antenna, but it is known to affix an antenna to a means of rotation within the context of ion implantation. Biloiu, for example, attaches an antenna (16) to a rotatable shaft (20) which inserts within a linear accelerator of an ion implantation device ([0027-30]; Fig. 1A). The antenna (16) regulates magnetic flux and, by changing its orientation via rotation and linear actuation, this act of regulation can be precisely controlled [0037]. It would have been obvious avail Deak’s rotary instruments to orient an antenna, since using a known technique to improve a similar device in the same way is within the scope of ordinary skill. Conclusion The following prior art is made of record as being pertinent to Applicant’s disclosure, yet is not formally relied upon: Nogami et al., US 5,003,183. As shown by Figure 2, Nogami discloses an ion implanter comprising a chamber wall, a rotatable shaft (124) disposed within an opening of the chamber wall, a component (~134) coupled to the rotatable shaft, and a first vacuum seal (122) disposed between the rotatable shaft and the chamber wall (4, 20ff). Any inquiry concerning this communication or earlier communications from the examiner should be directed to NATHAN K FORD whose telephone number is (571)270-1880. The examiner can normally be reached on 11-7:30 PM. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Parviz Hassanzadeh, can be reached at 571 272 1435. The fax phone number for the organization where this application or proceeding is assigned is 571 273 8300. /N. K. F./ Examiner, Art Unit 1716 /KARLA A MOORE/ Primary Examiner, Art Unit 1716
Read full office action

Prosecution Timeline

Aug 30, 2023
Application Filed
Aug 27, 2024
Response after Non-Final Action
Mar 21, 2026
Non-Final Rejection — §102, §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
32%
Grant Probability
68%
With Interview (+35.4%)
4y 7m
Median Time to Grant
Low
PTA Risk
Based on 657 resolved cases by this examiner. Grant probability derived from career allow rate.

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