DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Election/Restrictions
Applicant’s election without traverse of Invention I (claims 1-17) in the reply filed on 04/16/2026 is acknowledged.
Claims 18-20 are withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected Invention II (processing method), there being no allowable generic or linking claim. Election was made without traverse in the reply filed on 04/16/2026.
Drawings
The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the flexible member must be shown or the feature(s) canceled from the claim(s). No new matter should be entered.
Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
Claim Interpretation
The following is a quotation of 35 U.S.C. 112(f):
(f) Element in Claim for a Combination. – An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof.
The following is a quotation of pre-AIA 35 U.S.C. 112, sixth paragraph:
An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof.
The claims in this application are given their broadest reasonable interpretation using the plain meaning of the claim language in light of the specification as it would be understood by one of ordinary skill in the art. The broadest reasonable interpretation of a claim element (also commonly referred to as a claim limitation) is limited by the description in the specification when 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is invoked.
As explained in MPEP § 2181, subsection I, claim limitations that meet the following three-prong test will be interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph:
(A) the claim limitation uses the term “means” or “step” or a term used as a substitute for “means” that is a generic placeholder (also called a nonce term or a non-structural term having no specific structural meaning) for performing the claimed function;
(B) the term “means” or “step” or the generic placeholder is modified by functional language, typically, but not always linked by the transition word “for” (e.g., “means for”) or another linking word or phrase, such as “configured to” or “so that”; and
(C) the term “means” or “step” or the generic placeholder is not modified by sufficient structure, material, or acts for performing the claimed function.
Use of the word “means” (or “step”) in a claim with functional language creates a rebuttable presumption that the claim limitation is to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites sufficient structure, material, or acts to entirely perform the recited function.
Absence of the word “means” (or “step”) in a claim creates a rebuttable presumption that the claim limitation is not to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is not interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites function without reciting sufficient structure, material or acts to entirely perform the recited function.
Claim limitations in this application that use the word “means” (or “step”) are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. Conversely, claim limitations in this application that do not use the word “means” (or “step”) are not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action.
This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, because the claim limitation(s) uses a generic placeholder that is coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitation(s) is/are:
Quick disconnect members (male/guide pins, female/receptacles/spring loaded ball-catch, para. [0074]) in at least claims 1-17.
Because this/these claim limitation(s) is/are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, it/they is/are being interpreted to cover the corresponding structure described in the specification as performing the claimed function, and equivalents thereof.
If applicant does not intend to have this/these limitation(s) interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, applicant may: (1) amend the claim limitation(s) to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph (e.g., by reciting sufficient structure to perform the claimed function); or (2) present a sufficient showing that the claim limitation(s) recite(s) sufficient structure to perform the claimed function so as to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph.
This application includes one or more claim limitations that use the word “means” or “step” but are nonetheless not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph because the claim limitation(s) recite(s) sufficient structure, materials, or acts to entirely perform the recited function. Such claim limitation(s) is/are:
Flexible member (metallic strap or flexible bellow, para. [0083]) in at least claims 1, 7, 10, 15.
Linear actuator (pneumatic lift, para. [0084]) in at least claims 9, 17.
Because this/these claim limitation(s) is/are not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, it/they is/are not being interpreted to cover only the corresponding structure, material, or acts described in the specification as performing the claimed function, and equivalents thereof.
If applicant intends to have this/these limitation(s) interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, applicant may: (1) amend the claim limitation(s) to remove the structure, materials, or acts that performs the claimed function; or (2) present a sufficient showing that the claim limitation(s) does/do not recite sufficient structure, materials, or acts to perform the claimed function.
Claim Rejections - 35 USC § 103
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows:
1. Determining the scope and contents of the prior art.
2. Ascertaining the differences between the prior art and the claims at issue.
3. Resolving the level of ordinary skill in the pertinent art.
4. Considering objective evidence present in the application indicating obviousness or nonobviousness.
Claim(s) 1-5, 7-8 is/are rejected under 35 U.S.C. 103 as being unpatentable over US 20190360100 to Nguyen in view of US 20130118686 to Carducci and further in view of US 20200361017 to Solis.
Claim 1: Nguyen discloses a substrate processing system, comprising: a chamber body (102 [chamber body], Fig. 1A-1B) that defines a processing region (106 [processing volume]); a component (114) positioned within the chamber body (102), a faceplate (130 [faceplate]) that is positioned atop the component (114); a substrate support (138 [pedestal]) disposed within the chamber body (102), the substrate support (138) comprising:
a support plate (top portion of 138) comprising a heater (not shown but disclosed, para. [0018]); a shaft (142 [stem]) that is coupled with a bottom of the support plate (138); a dynamic plate (200 [ground path system]) disposed about the shaft (142) and spaced a distance below the support plate (138, via 210); and at least one flexible member (212 [bellows]) that couples a bottom of the support plate (bottom of 138) with the dynamic plate (204 of 200), wherein: the substrate support (138) can be in a process position (Fig. 1A); a top surface of the dynamic plate (top surface of 200) contacts a bottom surface of 114 (Fig. 1A-1B).
However Nguyen does not disclose the component is a liner atop the chamber body; wherein a bottom surface of the component comprises a first plurality of quick disconnect members; a top surface of the dynamic plate comprises a second plurality of quick disconnect members; and each of the second plurality of quick disconnect members is engageable with a respective one of the first plurality of quick disconnect members when the substrate support is in a process position.
Carducci discloses the component (146 of 156, Fig. 1, 2) is a liner (146 [flange] of 156 [liner body]) atop the chamber body (104 of 102 [chamber body]), for the purpose of as acting as a heat sink for the liner body as the heat transfer between the chamber liner and the chamber body predominately occurs between the ledge and the flange (para. [0024]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the limitations above as taught by Carducci with motivation to act as a heat sink for the liner body as the heat transfer between the chamber liner and the chamber body predominately occurs between the ledge and the flange.
Regarding quick disconnect members, Solis discloses a first plurality of quick disconnect members (31 [female connection] of 30 [quick disconnect], Fig. 5, 6A, 6B); a second plurality of quick disconnect members (32 [male connection] of 30); and each of the second plurality of quick disconnect members (32) is engageable with a respective one of the first plurality of quick disconnect members (31), for the purpose of allowing conduction of electric current and/or disconnection from the respective components in a quick and repeatable fashion (para. [0026]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the quick disconnect members and configuration as taught by Solis with motivation to allow conduction of electric current and/or disconnection from the respective components in a quick and repeatable fashion.
Claim 2: Regarding the limitations, “wherein: each of the second plurality of quick disconnect members is disengaged from the respective one of the first plurality of quick disconnect members when the substrate support is in a transfer position,” it is noted that the limitation is drawn to intended use of the apparatus of Nguyen in view of Carducci, Solis, as Solis teaches engaging and disengaging the quick disconnect members (Fig. 6a-6b, para. [0026]) and Nguyen teaches raising and lowering the substrate support from a transfer position and processing position (Fig. 1A-1B, para. [0021]).
The courts have held that a claim containing a “recitation with respect to the manner in which a claimed apparatus is intended to be employed does not differentiate the claimed apparatus from a prior art apparatus” if the prior art apparatus teaches all the structural limitations of the claim. MPEP 2114 II.
Claims 3, 5: The apparatus of Nguyen in view of Carducci, Solis does not disclose (claim 3) further comprising: one or more springs that extend between and couple a bottom surface of the dynamic plate and a top surface of a bottom of the chamber body; (claim 5) wherein: each of the one or more springs comprises a compression spring.
However Solis teaches (claim 3) compressible contact member(s) (not shown but disclosed, para. [0026]) which is interpreted as spring(s) seated between the two quick disconnect members; (claim 5) wherein: each of the one or more springs comprises a compression spring (para. [0026]); for the purpose of allowing a member component to move in an axial direction along a central axis while maintaining electrical conduction between the two members.
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the spring as taught by Solis to be placed between the bottom surface of the dynamic plate and a top surface of a bottom of the chamber body, with motivation to allow a member component to move in an axial direction along a central axis while maintaining electrical conduction between the two members.
Claim 4: The apparatus of Nguyen in view of Carducci, Solis discloses wherein: each of the one or more springs (not shown but disclosed, Fig. 6a/6b, Solis) is positioned about a guide pin (pin portion of 32 which fits into 31, para. [0026]).
Claim 7: The apparatus of Nguyen in view of Carducci, Solis discloses wherein: each of the at least one flexible member (212, Fig. 1A, Nguyen) comprises one or both of a flexible bellow (212) and a metallic strap.
Claim 8: The apparatus of Nguyen in view of Carducci, Solis discloses further comprising: a linear actuator (para. [0021], Nguyen) that raises and lowers the dynamic plate (200, Fig. 1A-1B) between a process position (Fig. 1A) and a transfer position (Fig. 1B, para. [0021]).
Claim(s) 6 is/are rejected under 35 U.S.C. 103 as being unpatentable over Nguyen in view of Carducci, Solis as applied to claims 1-5, 7-8 above, and further in view of US 20110197814 to Baek.
Claim 6: The apparatus of Nguyen in view of Carducci, Solis does not disclose further comprising: one or more isolators that isolate the one or more springs from RF current flowing through the dynamic plate.
However Baek discloses further comprising: one or more isolators (360 [electrical isolator], Fig. 3) that isolate the one or more components (380) from RF current flowing through the other component (114) for the purpose of greatly reducing the potential for arcing due to decreased RF voltage as a result of the electrical isolator (para. [0044]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the isolator between the spring and plate as taught by Baek with motivation to greatly reduce the potential for arcing due to decreased RF voltage as a result of the electrical isolator.
Claim(s) 9 is/are rejected under 35 U.S.C. 103 as being unpatentable over Nguyen in view of Carducci, Solis as applied to claims 1-5, 7-8 above, and further in view of US 20020047004 to Johnsgard.
Claim 9: The apparatus of Nguyen in view of Carducci, Solis does not disclose wherein: the linear actuator comprises one or both of a pneumatic lift and an electromechanical lift.
Johnsgard discloses wherein: the linear actuator (514 [elevational mechanism], Fig. 1) comprises one or both of a pneumatic lift and an electromechanical lift (either is disclosed, para. [0033]) for the purpose of raising and lowering a component with a vacuum sealed bellows (para. [0033]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the kind of lift as taught by Johnsgard with motivation to raise and lower a component with a vacuum sealed bellows.
Claim(s) 10, 15, 16, 17 is/are rejected under 35 U.S.C. 103 as being unpatentable over US 20190360100 to Nguyen in view of US 20130118686 to Carducci and further in view of US 20200361017 to Solis, US 20190108983 to Noorbakhsh.
Claim 10: Nguyen discloses a substrate processing system, comprising: a chamber body (102 [chamber body], Fig. 1A-1B) that defines a processing region (106 [processing volume]); a component (114) positioned within the chamber body (102), a faceplate (130 [faceplate]) that is positioned atop the component (114); a substrate support (138 [pedestal]) disposed within the chamber body (102), the substrate support (138) comprising:
a support plate (top portion of 138) comprising a heater (not shown but disclosed, para. [0018]); a shaft (142 [stem]) that is coupled with a bottom of the support plate (138); a dynamic plate (200 [ground path system]) disposed about the shaft (142) and spaced a distance below the support plate (138, via 210); and at least one flexible member (212 [bellows]) that couples a bottom of the support plate (bottom of 138) with the dynamic plate (204 of 200), wherein: the substrate support (138) can be in a process position (Fig. 1A); a top surface of the dynamic plate (top surface of 200) contacts a bottom surface of 114 (Fig. 1A-1B).
However Nguyen does not disclose the component is a liner atop the chamber body; wherein a bottom surface of the component comprises a first plurality of quick disconnect members; a top surface of the dynamic plate comprises a second plurality of quick disconnect members; and each of the second plurality of quick disconnect members is engageable with a respective one of the first plurality of quick disconnect members when the substrate support is in a process position.
Carducci discloses the component (146 of 156, Fig. 1, 2) is a liner (146 [flange] of 156 [liner body]) atop the chamber body (104 of 102 [chamber body]), for the purpose of as acting as a heat sink for the liner body as the heat transfer between the chamber liner and the chamber body predominately occurs between the ledge and the flange (para. [0024]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the limitations above as taught by Carducci with motivation to act as a heat sink for the liner body as the heat transfer between the chamber liner and the chamber body predominately occurs between the ledge and the flange.
Regarding quick disconnect members, Solis discloses a first plurality of quick disconnect members (31 [female connection] of 30 [quick disconnect], Fig. 5, 6A, 6B); a second plurality of quick disconnect members (32 [male connection] of 30); and each of the second plurality of quick disconnect members (32) is engageable with a respective one of the first plurality of quick disconnect members (31), for the purpose of allowing conduction of electric current and/or disconnection from the respective components in a quick and repeatable fashion (para. [0026]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the quick disconnect members and configuration as taught by Solis with motivation to allow conduction of electric current and/or disconnection from the respective components in a quick and repeatable fashion.
The apparatus of Nguyen in view of Carducci, Solis does not disclose wherein the dynamic plate comprises an RF gasket that is engageable with the liner when the substrate support is in a process position;
Noorbakhsh discloses wherein the dynamic component (210 [door portion], Fig. 3-4) comprises an RF gasket (310 [RF gasket]) that is engageable with the liner (144 [upper liner assembly) when the substrate support is in a process position (door is closed, para. [0034]), for the purpose of providing a continuous RF ground with the outer wall of the upper liner assembly (para. [0034]).
It would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to incorporate the RF gasket as taught by Noorbakhsh with motivation to provide a continuous RF ground with the outer wall of the upper liner assembly.
Claim 15: The apparatus of Nguyen in view of Carducci, Solis, Noorbakhsh discloses wherein: each of the at least one flexible member (212, Fig. 1A, Nguyen) comprises one or both of a flexible bellow (212) and a metallic strap.
Claim 16: The apparatus of Nguyen in view of Carducci, Solis, Noorbakhsh discloses further comprising: a radio frequency source (156 [RF source], Fig. 1A, Nguyen) coupled with the substrate support (138), wherein in the process position (Fig. 1A), a closed radio frequency circuit is formed between the radio frequency source (156), the substrate support (138), the flexible member (212), the liner (114 or 146 of 156, Carducci), and the faceplate (130 of 116, para. [0019-0020]).
Claim 17: The apparatus of Nguyen in view of Carducci, Solis, Noorbakhsh discloses further comprising: a linear actuator (para. [0021], Nguyen) that raises and lowers the dynamic plate (200, Fig. 1A-1B) between a process position (Fig. 1A) and a transfer position (Fig. 1B, para. [0021]).
Claim 18: (Withdrawn).
Allowable Subject Matter
Claims 11-14 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten into the independent including all of the limitations of the independent claim and any intervening claims.
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US 20100322604 discloses a quick connection assembly (102, Fig. 7, 21-22) to preferably facilitates quicker and easier loading, aligning, and connection of the precursor source vessel 100 to the gas interface assembly (180, para. [0123]). US 20070116872 discloses a seal configuration for producing a seal between the flange (302) of the substrate stage (120) and the extension (304) from the upper chamber assembly (130, para. [0072-0073]).
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Charlee J. C. Bennett whose telephone number is (571)270-7972. The examiner can normally be reached M-Th 10am-6pm.
Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Gordon Baldwin can be reached at 5712725166. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
/Charlee J. C. Bennett/Primary Examiner, Art Unit 1718
Prosecution Insights