Prosecution Insights
Last updated: April 19, 2026
Application No. 18/349,825

NEGATIVE PHOTOSENSITIVE COMPOSITION AND PATTERN FORMATION METHOD

Non-Final OA §102§103
Filed
Jul 10, 2023
Examiner
ANGEBRANNDT, MARTIN J
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tokyo Ohka Kogyo Co., Ltd.
OA Round
1 (Non-Final)
55%
Grant Probability
Moderate
1-2
OA Rounds
3y 3m
To Grant
90%
With Interview

Examiner Intelligence

Grants 55% of resolved cases
55%
Career Allow Rate
745 granted / 1351 resolved
-9.9% vs TC avg
Strong +34% interview lift
Without
With
+34.5%
Interview Lift
resolved cases with interview
Typical timeline
3y 3m
Avg Prosecution
86 currently pending
Career history
1437
Total Applications
across all art units

Statute-Specific Performance

§101
0.1%
-39.9% vs TC avg
§103
59.6%
+19.6% vs TC avg
§102
4.2%
-35.8% vs TC avg
§112
2.1%
-37.9% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1351 resolved cases

Office Action

§102 §103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. (a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention. The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claims 1,2,4-6,8,9 and 11 are rejected under 35 U.S.C. 102(a)(1)as being fully anticipated by Nakao et al. JP 2022051490. Nakao et al. JP 2022051490 (machine translation attached) exemplifies the following photoacid generators on pages 35-36. PNG media_image1.png 89 276 media_image1.png Greyscale PNG media_image2.png 100 274 media_image2.png Greyscale PNG media_image3.png 97 277 media_image3.png Greyscale Composition 23 includes 50 parts celoxide 2021P (3,4-epoxycyclohexylmethyl (3,4-epoxy) cyclohexanecarboxylate), 50 parts TEPIC-VL (triglycidyl isocyanurate), 0.5 parts sulfonium salt AG-7 (see above), 0.5 parts BYK-UV3510 (antioxidant), 0.5 parts irganox 1010 (Irganox 1010: (Pentaerythritol Tetrakis [3- (3,5-di-t-butyl-4-hydroxyphenyl) propionate], manufactured by BASF, Inc) (see table 2 and associated text). Example 30 and 38 are similar. Example 45 includes 6 parts Celoxide 2021P, 6 parts JER157S70 (Novolak type solid epoxy resin), 24 parts Techmore VG3101L (2- [4- (2,3-epoxypropoxy) phenyl] -2- [4- [1,1-bis [4- [2,3-epoxypropoxy] phenyl] ethyl] phenyl] propane), 2 parts Epogoose PT (Polytetramethylene glycol diglycidyl ether), 5 parts OXT-101 (3-ethyl-3-hydroxymethyloxetane) 12 parts OXT221 (3-ethyl-3 {[(3-ethyloxetane-3-yl) methoxy] methyl} oxetane), 20 parts Dipentaerythritol polyacrylate, 16 parts Polypropylene glycol monoacrylate, 1.0 parts AG-8, 0.3 parts irgacure 184 (see table 3), Example 52 is similar (see table 3 and associated text) [0262-0264]. The composition was coated on a silicon wafer, exposed using UV, post exposure baked and developed in gamma-butyrolactone and washed with water [0265-0269]. Useful substrates include silicon wafers, metal substrates, polymer films, and glass substrates. Examples of the metal substrate include a stainless steel plate such as SUS. Specific examples of the polymer film include polyethylene terephthalate (PET) film, polyethylene naphthalate film, and polyimide film. The thickness is usually set within the range of 10 μm to 3 mm [0150]. The addition of a silane coupling agent is disclosed [0183-0187]. The sulfonium salts are embraced by the formula 1, PNG media_image4.png 95 204 media_image4.png Greyscale R .sup.1 and R .sup.2 independently represent an aryl group having 10 to 14 carbon atoms or a heterocyclic hydrocarbon group having 6 to 14 carbon atoms. Examples of the aryl group having 10 to 14 carbon atoms in R .sup.1 and R .sup.2 include biphenylyl, fluorenyl, benzophenonyl, fluorenonyl, naphthyl, anthracenyl, anthracynyl and the like. Examples of the heterocyclic hydrocarbon group having 6 to 14 carbon atoms in R .sup.1 and R .sup.2 include benzofuranyl, isobenzofuranyl, benzothienyl, isobenzothienyl, xanthenyl, thiantrenyl, phenoxadinyl, phenoxatinyl, chromanyl and isochromanyl. Examples thereof include coumarinyl, dibenzothienyl, xanthonyl, thioxanthonyl, dibenzofuranyl and the like. A part of the hydrogen atom of the aryl group of R .sup.1 and R .sup.2 may be substituted with a substituent (t), and the substituent (t) may be an alkyl group having 1 to 8 carbon atoms or 6 to 6 carbon atoms. It is an aryl group of 10.Among the substituents (t), the alkyl group having 1 to 8 carbon atoms includes a linear alkyl group (methyl, ethyl, n-propyl, n-butyl, n-pentyl, n-octyl, etc.) and a branched alkyl group (n-octyl, etc.). Examples thereof include isopropyl, isobutyl, sec-butyl, tert-butyl, isopentyl, neopentyl, tert-pentyl, isohexyl and isooctadecyl, etc.), cycloalkyl groups (cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, etc.) and the like. Among the substituents (t), examples of the aryl group having 6 to 10 carbon atoms include phenyl, trill, dimethylphenyl and naphthyl. R .sup.1 and R .sup.2 may be the same or different, but they are preferably the same. In the formula (1), R .sup.3 and R .sup.4 independently represent an alkyl group having 1 to 8 carbon atoms, and the definition thereof is synonymous with the alkyl group having 1 to 8 carbon atoms in the substituent (t). R .sup.3 and R .sup.4 may be the same or different, or may be partially different. m1 represents the number of R3 and is an integer of 0 to .sup.4 , preferably 0 to 2. m2 represents the number of .sup.R4 and is an integer of 0 to 5, preferably 0 to 2. When m1 or m2 is an integer of .sup.2 or more, the corresponding plurality of R3 or .sup.R4 may be the same or different. L represents a sulfur atom, that is, a group represented by —S—. X .sup.- is not limited as long as it is a monovalent polyatomic anion, and corresponds to an acid (HX) generated by irradiating a sulfonium salt with active energy rays (visible light, ultraviolet rays, electron beams, X-rays, etc.). Although it is an anion, MY .sub.a- .sup., (Rf) .sub.b PF .sub.6-b- .sup., R .sup.5 .sub.c BY .sub.4-c- .sup., R .sup.5 .sub.c GaY .sub.4-c- .sup., R .sup.6 SO .sub.3- .sup., (R .sup.6 SO .sub.2 ) .sub.3 Anions represented by C- .sup.or .sup.( R .sup.6 SO .sub.2 ) .sub.2 N- are preferred. M represents a phosphorus atom, a boron atom or an antimony atom. Y represents a halogen atom (preferably a fluorine atom). Rf represents an alkyl group in which 80 mol% or more of a hydrogen atom is substituted with a fluorine atom (an alkyl group having 1 to 8 carbon atoms is preferable). Alkyl groups to be Rf by fluorine substitution include linear alkyl groups (methyl, ethyl, propyl, butyl, pentyl, octyl, etc.), branched chain alkyl groups (isopropyl, isobutyl, sec-butyl, tert-butyl, etc.) and cyclo. Examples thereof include alkyl groups (cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, etc.). The ratio of hydrogen atoms of these alkyl groups substituted with fluorine atoms in Rf is preferably 80 mol% or more, more preferably 90, based on the number of moles of hydrogen atoms possessed by the original alkyl group. % Or more, particularly preferably 100%. When the substitution ratio by the fluorine atom is in these preferable ranges, the photosensitivity of the sulfonium salt is further improved. Particularly preferred Rf are CF .sub.3- , CF .sub.3 CF .sub.2- , (CF .sub.3 ) .sub.2 CF-, CF .sub.3 CF .sub.2 CF .sub.2- , CF .sub.3 CF .sub.2 CF .sub.2 CF .sub.2- , (CF .sub.3 ) .sub.2 CFCF .sub.2- , CF .sub.3 CF .sub.2 (CF .sub.3 ) CF- and (CF .sub.3 ) .sub.3 C-. The b Rfs are independent of each other and therefore may be the same or different from each other [0008-0038]. Examples of the aromatic epoxide include polyglycidyl ether and polyglycidyl ester of polyhydric phenol or an alkylene oxide adduct thereof. Specific examples thereof include bisphenol A, bisphenol E, bisphenol F, bisphenol AD, and bisphenol. Z or glycidyl ether, phenylglycidyl ether, tert-butylphenyl glycidyl ether, resorcinol diglycidyl ether, tetraphenol ethane tetraglycidyl ether, triphenol methane, which are compounds in which alkylene oxides such as ethylene oxide and propylene oxide are further added. Triglycidyl ether, glycidylated product of condensate of phenols or naphthols and aldehydes (eg phenol resin or novolak resin), glycidylated product of condensate of phenols and isopropenyl acetophenone, reaction of phenols with dicyclopentadiene Examples thereof include a noglycidyl compound, a diglycidyl ester of terephthalic acid, a diglycidyl ester of isophthalic acid, and a diglycidyl ester of o-phthalic acid [0068]. Typical compounds include, for example, butyl glycidyl ether, 2-ethylhexyl glycidyl ether, higher alcohol glycidyl ether, alkylenediol diglycidyl ether (eg, 1,4-butanediol diglycidyl ether, 1,6-hexane). Diglycidyl ether of diol, diglycidyl ether of neopentyl glycol, etc.), triglycidyl ether of glycerin, diglycidyl ether of trimethylolpropane, triglycidyl ether of trimethylolpropane, tetraglycidyl ether of sorbitol, hexaglycidyl of dipentaerythritol Examples thereof include glycidyl ethers of polyhydric alcohols such as ethers, diglycidyl ethers of polyethylene glycol, diglycidyl ethers of polypropylene glycol, and diglycidyl ethers of polytetramethylene glycol [0070] Examples 45 and 52 and the processes of using them disclosed anticipate the claims rejected under this heading. Claims 1-9 and 11 are rejected under 35 U.S.C. 103 as being unpatentable over Nakao et al. JP 2022051490 Nakao et al. JP 2022051490 does not exemplify composition meeting the claims which include a borate anion as part of the sulfonium salt, use the full range of benzoyl phenyl sulfonium salts bounded by formula (1), the full range of novolak resins disclosed, use the full range of the triepoxy compound/monomers disclosed or which use a silane coupling agent. With respect to claims 1,2,4-6,8,9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by replacing at least a portion of the Techmore VG3101L (2- [4- (2,3-epoxypropoxy) phenyl] -2- [4- [1,1-bis [4- [2,3-epoxypropoxy] phenyl] ethyl] phenyl] propane) with other disclosed triglycidyl compounds such as those disclosed at [0070] with a reasonable expectation of forming a useful negative acting curable composition. With respect to claims 1,2,4-6,8,9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by replacing at least a portion of photoacid generator AG-7 with other benzoyl containing sulfonium salts bounded by formula (1) at [0008-0038] or exemplified on pages 35-36 with a reasonable expectation of forming a useful negative acting curable composition. With respect to claims 1,2,4-6,8,9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by replacing at least a portion of the JER157S70 with other novolak epoxy resins such as those disclosed at [0068] with a reasonable expectation of forming a useful negative acting curable composition. With respect to claims 1-6,8,9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by replacing at least a portion of photoacid generator AG-7 with the same sulfonium cation and a different borate anion/counterion based upon the equivalence established at [0036] with a reasonable expectation of forming a useful negative acting curable composition. With respect to claims 1,2,4-6,8,9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by replacing at least a portion of photoacid generator AG-7 with other benzoyl containing sulfonium salts bounded by formula (1) at [0008-0038] or exemplified on pages 35-36, and having a borate anion/counterion based upon the equivalence established at [0036] with a reasonable expectation of forming a useful negative acting curable composition. With respect to claims 1,2,4-9 and 11, it would have been obvious to one skilled in the art to modify the compositions of examples 45 or 52 by adding a silane coupling agents to improve adhesion as taught at [0183-0187] with a reasonable expectation of forming a useful negative acting curable composition. The combination of these bases is also considered obvious Claims 1-11 are rejected under 35 U.S.C. 103 as being unpatentable over Nakao et al. JP 2022051490, in view of Iwashita et al. JP 2020042223. Iwashita et al. JP 2020042223 (machine translation attached) exemplifies in example 6, 10 and 11, 100 parts of a cresol novolak TR4020G), 70 parts trimethylolpropane triglycidyl ether (EX-321L, B-1), a polyfunctional bisphenol A novolak resin (JER157S70, B-2), a sulfonium salt (triarylsulfonium tetrakis (pentafluorophenyl)borate, C-2; sulfonium gallates (C-3, C-4), methyl ethyl ketone (solvent) and 3-glycidoxypropyltrimethoxysilane (silane coupling agent) [0123-0125]. The compositions are coasted on a PET support and dried, the photosensitive layer was then laminated onto a silicon wafer, the PET layer peeled, the composition exposed, post exposure baked and developed in PGMEA [0126-0133]. A protective layer for covering the photosensitive layer may be further provided on the photosensitive layer [0093-0095]. Nakao et al. JP 2022051490 does not teach the application of a protective layer to the photosensitive film. It would have been obvious to one skilled int her art to modify the process of Nakao et al. JP 2022051490 by initially coating the composition on a polymeric PET substrate as taught at [0150] of Nakao et al. JP 2022051490 and [0126-0133] of Iwashita et al. JP 2020042223 and providing a protective cover layer over the photosensitive layer to protect it as taught at [0093-0095] of Iwashita et al. JP 2020042223 with a reasonable expectation of forming a useful photosensitive laminate, which can be stored and later laminated onto the final substrate to be patterned. Any inquiry concerning this communication or earlier communications from the examiner should be directed to Martin J Angebranndt whose telephone number is (571)272-1378. The examiner can normally be reached 7-3:30 pm EST. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Mark F Huff can be reached at 571-272-1385. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. MARTIN J. ANGEBRANNDT Primary Examiner Art Unit 1737 /MARTIN J ANGEBRANNDT/Primary Examiner, Art Unit 1737 January 21, 2026
Read full office action

Prosecution Timeline

Jul 10, 2023
Application Filed
May 21, 2025
Response after Non-Final Action
Jan 21, 2026
Non-Final Rejection — §102, §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12578652
PHOTOMASK AND METHODS FOR MEASURING AND MANUFACTURING THE PHOTOMASK
2y 5m to grant Granted Mar 17, 2026
Patent 12566369
METHOD AND APPARATUS FOR MANUFACTURING A PHOTOMASK FROM A BLANK MASK
2y 5m to grant Granted Mar 03, 2026
Patent 12566377
MULTIPLE PATTERNING WITH ORGANOMETALLIC PHOTOPATTERNABLE LAYERS WITH INTERMEDIATE FREEZE STEPS
2y 5m to grant Granted Mar 03, 2026
Patent 12554191
PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME
2y 5m to grant Granted Feb 17, 2026
Patent 12535740
INTERSTITIAL TYPE ABSORBER FOR EXTREME ULTRAVIOLET MASK
2y 5m to grant Granted Jan 27, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

AI Strategy Recommendation

Get an AI-powered prosecution strategy using examiner precedents, rejection analysis, and claim mapping.
Powered by AI — typically takes 5-10 seconds

Prosecution Projections

1-2
Expected OA Rounds
55%
Grant Probability
90%
With Interview (+34.5%)
3y 3m
Median Time to Grant
Low
PTA Risk
Based on 1351 resolved cases by this examiner. Grant probability derived from career allow rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month