Prosecution Insights
Last updated: October 27, 2026
Application No. 18/393,632

Plasma Etching Method and Apparatus

Non-Final OA §112
Filed
Dec 21, 2023
Priority
Jun 30, 2023 — GB 2310034.0
Examiner
ALANKO, ANITA KAREN
Art Unit
1713
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Spts Technologies Limited
OA Round
1 (Non-Final)
70%
Grant Probability
Favorable
1-2
OA Rounds
1m
Est. Remaining
54%
With Interview

Examiner Intelligence

Grants 70% — above average
70%
Career Allowance Rate
497 granted / 711 resolved
+4.9% vs TC avg
Minimal -16% lift
Without
With
+-16.1%
Interview Lift
resolved cases with interview
Typical timeline
2y 12m
Avg Prosecution
30 currently pending
Career history
744
Total Applications
across all art units

Statute-Specific Performance

§101
0.7%
-39.3% vs TC avg
§103
46.7%
+6.7% vs TC avg
§102
19.8%
-20.2% vs TC avg
§112
21.5%
-18.5% vs TC avg
Black line = Tech Center average estimate • Based on career data from 711 resolved cases

Office Action

§112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Continued Examination Under 37 CFR 1.114 A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after allowance or after an Office action under Ex Parte Quayle, 25 USPQ 74, 453 O.G. 213 (Comm'r Pat. 1935). Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, prosecution in this application has been reopened pursuant to 37 CFR 1.114. Applicant's submission filed on April 8, 2026, has been entered. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 1-10 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. In claim 1, lines 11-12, the terms “a cooling gas” and “an associated pressure” do not have proper antecedent basis. In claim 1, lines 16-18; claim 2, line 1; claim 8, line 3, the term “the pressure” lacks proper antecedent basis. This rejection would be overcome by reciting - - the cooling gas - - and - - the associated pressure - - . Claims 3-7 and 9-10 fail to cure the indefiniteness of the base claim, and are therefore also rejected. Allowable Subject Matter Claim 1 would be allowable if rewritten or amended to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action. Claims 2-10 would be allowable if rewritten to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action and to include all of the limitations of the base claim and any intervening claims. The claims remain allowable over the prior art for the same reasons as cited in the office action dated March 17, 2026. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to ANITA K ALANKO whose telephone number is (571)270-0297. The examiner can normally be reached Monday-Friday, 9 am-5pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Joshua Allen can be reached at 571-270-3176. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /ANITA K ALANKO/ Primary Examiner, Art Unit 1713
Read full office action

Prosecution Timeline

Dec 21, 2023
Application Filed
Apr 08, 2026
Request for Continued Examination
Apr 10, 2026
Response after Non-Final Action
Apr 20, 2026
Non-Final Rejection mailed — §112
Oct 19, 2026
Response Filed

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12766664
Polish Apparatus and Methods for Use
3y 5m to grant Granted Oct 20, 2026
Patent 12772767
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
2y 6m to grant Granted Oct 20, 2026
Patent 12753516
PRODUCTION METHOD FOR ETCHING LIQUID COMPOSITION
1y 7m to grant Granted Oct 06, 2026
Patent 12731765
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
2y 12m to grant Granted Sep 08, 2026
Patent 12725762
METHOD FOR ETCHING ATOMIC LAYER
2y 10m to grant Granted Sep 01, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
70%
Grant Probability
54%
With Interview (-16.1%)
2y 12m (~1m remaining)
Median Time to Grant
Low
PTA Risk
Based on 711 resolved cases by this examiner. Grant probability derived from career allowance rate.

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