Last updated: July 05, 2026

Application No. 18/414,252

OXIDATION BASED ATOMIC LAYER ETCHING

Non-Final OA

Filed

Jan 16, 2024

Examiner

TRAN, TRANG Q

Art Unit

2811

Tech Center

2800 — Semiconductors & Electrical Systems

Assignee

Tokyo Electron Limited

OA Round

1 (Non-Final)

Interview Optional

— +7.2% interview lift. Interview lift (+7.2%) is below the 15.0% threshold. A written response is recommended.

Based on 725 resolved cases, 2023–2026

Examiner Intelligence

TRAN, TRANG Q View full profile →

Grants 81% — above average

Career Allowance Rate

587 granted / 725 resolved

+13.0% vs TC avg

Moderate +7% lift

Without

With

+7.2%

Interview Lift

resolved cases with interview

Typical timeline

2y 8m

Avg Prosecution

32 currently pending

Career history

767

Total Applications

across all art units

Statute-Specific Performance

§101

0.1%

-39.9% vs TC avg

§103

77.4%

+37.4% vs TC avg

§102

16.8%

-23.2% vs TC avg

§112

4.4%

-35.6% vs TC avg

Black line = Tech Center average estimate • Based on career data from 725 resolved cases

Prosecution Timeline

Jan 16, 2024

Application Filed

May 23, 2025

Response after Non-Final Action

May 12, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

17/735,126

Patent 12672576

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

4y 1m to grant Granted Jun 30, 2026

17/397,176

Patent 12667000

Semiconductor Device that Uses Bonding Layer to Join Semiconductor Substrates Together

4y 10m to grant Granted Jun 23, 2026

17/579,434

Patent 12667029

PACKAGE COMPRISING A SUBSTRATE WITH POST INTERCONNECTS AND A SOLDER RESIST LAYER HAVING A CAVITY

4y 5m to grant Granted Jun 23, 2026

17/822,879

Patent 12653010

Adaptive Interconnect Structure for Semiconductor Package

3y 9m to grant Granted Jun 09, 2026

18/151,071

Patent 12642149

Package Formation Using UBM-First Approach and the Corresponding Packages

3y 4m to grant Granted May 26, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

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Prosecution Projections

1-2

Expected OA Rounds

81%

Grant Probability

88%

With Interview (+7.2%)

2y 8m (~2m remaining)

Median Time to Grant

Low

PTA Risk

Based on 725 resolved cases by this examiner. Grant probability derived from career allowance rate.