Last updated: July 17, 2026

Application No. 18/433,210

DRY DEPOSITION OF EXTREME ULTRAVIOLET (EUV) UNDERLAYER FOR LITHOGRAPHY AND PATTERNING

Non-Final OA

Filed

Feb 05, 2024

Examiner

OH, JAEHWAN

Art Unit

2899

Tech Center

2800 — Semiconductors & Electrical Systems

Assignee

Applied Materials Inc.

OA Round

1 (Non-Final)

Interview Optional

— +10.2% interview lift. Interview lift (+10.2%) is below the 15.0% threshold. A written response is recommended.

Based on 669 resolved cases, 2023–2026

Examiner Intelligence

OH, JAEHWAN View full profile →

Grants 85% — above average

Career Allowance Rate

568 granted / 669 resolved

+16.9% vs TC avg

Moderate +10% lift

Without

With

+10.2%

Interview Lift

resolved cases with interview

Fast prosecutor

2y 2m

Avg Prosecution

18 currently pending

Career history

687

Total Applications

across all art units

Statute-Specific Performance

§101

0.9%

-39.1% vs TC avg

§103

68.3%

+28.3% vs TC avg

§102

19.3%

-20.7% vs TC avg

§112

3.0%

-37.0% vs TC avg

Black line = Tech Center average estimate • Based on career data from 669 resolved cases

Prosecution Timeline

Feb 05, 2024

Application Filed

Apr 09, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/229,884

Patent 12685043

REACTIVE-ION DEPOSITION PROCESSES FOR DIELECTRIC MATERIAL FORMATION

2y 11m to grant Granted Jul 14, 2026

18/036,521

Patent 12674233

RHYTHMIC DEPOSITION PRODUCTION METHOD AND EQUIPMENT FOR PEROVSKITE THIN FILM

3y 1m to grant Granted Jul 07, 2026

18/584,903

Patent 12677466

DEEPLY RECESSED TOP METAL GATE FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTOR

2y 4m to grant Granted Jul 07, 2026

18/343,092

Patent 12671018

THERMISTOR INTEGRATED WITH A BIAS RESISTOR

3y 0m to grant Granted Jun 30, 2026

18/140,365

Patent 12660560

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL LAYER

3y 1m to grant Granted Jun 16, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

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Prosecution Projections

1-2

Expected OA Rounds

85%

Grant Probability

95%

With Interview (+10.2%)

2y 2m (~0m remaining)

Median Time to Grant

Low

PTA Risk

Based on 669 resolved cases by this examiner. Grant probability derived from career allowance rate.