Prosecution Insights
Last updated: August 18, 2026
Application No. 18/526,788

HARDWARE DESIGN WITH INDEPENDENT CONTROL TO IMPROVE WIW UNIFORMITY

Non-Final OA §112
Filed
Dec 01, 2023
Examiner
CHEN, KEATH T
Art Unit
1716
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Applied Materials Inc.
OA Round
1 (Non-Final)
30%
Grant Probability
At Risk
1-2
OA Rounds
12m
Est. Remaining
55%
With Interview

Examiner Intelligence

Grants only 30% of cases
30%
Career Allowance Rate
348 granted / 1151 resolved
-34.8% vs TC avg
Strong +25% interview lift
Without
With
+24.6%
Interview Lift
resolved cases with interview
Typical timeline
3y 8m
Avg Prosecution
66 currently pending
Career history
1223
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
57.2%
+17.2% vs TC avg
§102
15.1%
-24.9% vs TC avg
§112
25.6%
-14.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1151 resolved cases

Office Action

§112
CTNF 18/526,788 CTNF 83642 DETAILED CORRESPONDENCE Notice of Pre-AIA or AIA Status 07-03-aia AIA 15-10-aia The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA. Election/Restrictions Applicant's election with traverse of Invention Group I, Species Fig. 5, in the reply filed on 04/17/2026 is acknowledged. The traversal is on the ground(s) that Fig. 6 and Fig. 5 is the same showerhead from different angle. This is found persuasive after the examiner went through the claim analysis as shown below. The election of Species between Fig. 5 and Fig. 6 is withdrawn and are examined together. On the other hand, The restriction between Group I and Group II is considered as without traverse. The confusion about whether Fig. 5 and 6 is partly due the discrepancies in drawing and the Specification. The examiner suggests that changing the description of “Fig. 6 is a cross sectional view of one aspect of the multizone baffle from a different viewing angle” will be clearer. 08-05 AIA Claim s 15-20 are withdrawn from further consideration pursuant to 37 CFR 1.142(b), as being drawn to a nonelected Invention group II , there being no allowable generic or linking claim. Applicant timely traversed the restriction (election) requirement in the reply filed on 04/17/2026 . The examiner called Applicants’ representative multiple times from 04/30/2026 trying to resolve the discrepancy in the disclosure. However, Applicants’ voice mail box is full. The examiner left messages to the law firm operator but no response was received . Drawings The drawings are objected to as failing to comply with 37 CFR 1.84(p)(4) because reference characters "223" (bullnosed edge surface) and "225" (a first frustoconical surface) are pointing to the same component (Fig. 2A). The “annular sealing ring 352” and “the dome 114” are pointing to the same component (Fig. 3B), inconsistent with Fig. 3A. The drawings are objected to as failing to comply with 37 CFR 1.84(p)(5) because they include the following reference character(s) not mentioned in the description: “158” (Fig. 1), “224” (Fig. 2B, Fig. 2C), “228” (Fig. 2C), “404”, “411”, “412”, “421”, “422”, “423” “440” “358a” (Fig. 4), “224”, “257a”, “260a” (Fig. 5) and “228”, “516” (Fig 6). 06-22-03 AIA The drawings are objected to as failing to comply with 37 CFR 1.84(p)(4) because reference character “ 156 ” has been used to designate both “a lower loading position” and a component next to the microwave generator 151. Furthermore, “234” (a plurality of fourth openings) is pointing to openings in Fig. 2B and the same component as “220” (distal end) in Fig. 2C. Still furthermore, “301” has been designated temperature control plate ([0042]), “the spacer layer” ([0049], [0050], [0052]), “the spacer plate 301” ([0049]). The opening 232 in Fig. 6 is not pointing to opening, contrary to Fig. 2A, 2C. The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the “first gas discharge passage” must be shown or the feature(s) canceled from the claim(s). No new matter should be entered. Also, “wherein the plurality of through passages open through the second end (220) between the first frustoconical surface and the second frustoconical surface (225 and 227)” of claims 6 and 13, this is inconsistent with Fig. 6 as currently depicted (see also 112(b) rejection below for “second end” issue) . Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance. The examiner also notices the “distal end 220” in Fig. 2A is located at the middle portion of the baffle 200, not at the “end” of the baffle. The “distal end 360) in Fig. 3A is at the middle of the manifold 300. The “annular sixth planar surface 327” (Fig. 3A) looks cylindrical instead of annular. The examiner also considers “a plurality of fourth manifold bores 311, 312, and 313 (FIG. 4)” and “the arcuate openings 311, 312 and 333” ([0057]) is describing the same component (except typo 333 should be 313, note 333, [0049], is annular bore shown in Fig. 3A). Specification 07-29 AIA The disclosure is objected to because of the following informalities: The “A third manifold perimeter surface 321 ” ([0049]) is inconsistent and “the curved surface 321 of the baffle 200” ([0057], it seems this should be “the curved surface 221”). The “to reach the third manifold facing surface 206 which forms the base surface of a source gas plenum 192 (FIG. 3C)” ([0043]) should be to reach the third manifold facing surface 206 which forms the base surface of a source gas plenum 192 (FIG. 3B )” . Appropriate correction is required. 07-30-03-h AIA Claim Interpretations As most of the claimed terms are drastically different than what was described in the Specification and drawing, and the drawing and Specification includes numerous inaccuracies, the examiner tried the best to match the label to each of the claimed terms, the label will be in the parenthesis below. Applicants are highly encouraged to supply their own list of claimed terms vs. labels. The “at least a first frustoconical surface and a second frustoconical surface extending around the first frustoconical surface” of claim 1, around will be examined inclusive “near” or “about”, see OneLook.com. Applicants’ Specification indicated that first frustoconical surface 225 … second frustoconical surface 227 ([0045]). The examiner will first show assigning this to the clam will lead to 112(a) disclosure issues. The examiner will then show the interpretation “at least a first frustoconical surface (227) and a second frustoconical surface (225) extending around the first frustoconical surface” is more consistent with the Specification. Interpretation (1), based on “at least a first frustoconical surface (225) and a second frustoconical surface (227) extending around the first frustoconical surface”: The “a first gas feed passage (257a) extending inwardly of the body from the proximal end thereof, the first gas feed passage terminating at a first passage distal end disposed inwardly of the body; at least one first gas discharge passage (232a) extending from the distal end of the first gas feed passage (257a) and opening (232) through the first frustoconical surface (225); at least one second gas feed passage (250a) extending inwardly of the body from the proximal end thereof, the second gas passage terminating at a second gas passage distal end disposed inwardly of the body and fluidly isolated from the first gas feed passage (257a); a second gas discharge passage (233a) extending from the second gas passage distal end and opening (233) through the second frustoconical surface (227); and a third gas discharge passage (260a) extending from the second gas discharge passage (233a) and opening (230) through the outer surface of the body at a location between the proximal end and the distal end of the body ”, as Fig. 5 shows the passage 260a (not explained in the Specification) is connected to 232a, the bold faced portion would have a new matter issue. Interpretation (2), based on “at least a first frustoconical surface (227) and a second frustoconical surface (225) extending around the first frustoconical surface”: The “a first gas feed passage (250a) extending inwardly of the body from the proximal end thereof, the first gas feed passage terminating at a first passage distal end disposed inwardly of the body; at least one first gas discharge passage (233a) extending from the distal end of the first gas feed passage (250a) and opening (233) through the first frustoconical surface (227); at least one second gas feed passage (257a) extending inwardly of the body from the proximal end thereof, the second gas passage terminating at a second gas passage distal end disposed inwardly of the body and fluidly isolated from the first gas feed passage (250a); a second gas discharge passage (232a) extending from the second gas passage distal end and opening (232) through the second frustoconical surface (225); and a third gas discharge passage (260a) extending from the second gas discharge passage (232a) and opening (230) through the outer surface of the body at a location between the proximal end (210) and the distal end (220) of the body”. Applicants Specification and drawing does not disclose what the gas passage distal end and how the discharge passage is connected to each of the gas passage distal end. Although Figs. 5 and 6 show the 233a have an less than 180 degree angle relative to 250 and differ in diameter, claim 1 include the gas passage and the discharge passage being at a straight line and having the same diameter based on BRI. The “a plurality of through passages” is considered as openings 235. Claim Rejections - 35 USC § 112 07-30-02 AIA The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. 07-34-01 Claims 5-6 and 12-13 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claims 5-6 and 12-13 each recites “the second end of the body”, there is no antecedent basis of this limitation. Claims 5-6 and 12-13 will be examined inclusive “the distal end of the body”. Allowable Subject Matter 12-151-07 AIA 07-97 12-51-07 Claim s 1-4, 7-11, and 14 are allowed. Assuming the examiner’s interpretation (2) is correct, the following is a statement of reasons for the indication of allowable subject matter: US 20060196603 has two frustoconical surfaces and opening at both frustoconical surfaces (Fig. 5C). Applicants submitted IDS, CN 220106445 teaches a single frustoconical surface (Fig. 3). US 7758698 (Fig. 2A), US 20050167529 (Fig.1 A), and US 20160145743 (Fig. 2A) each teaches a single frustoconical surface (Fig.1 A). None of these references teaches “a third gas discharge passage extending from the second gas discharge passage and opening through the outer surface of the body at a location between the proximal end and the distal end of the body” in the context of claims 1 and 8. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to KEATH T CHEN whose telephone number is (571)270-1870. The examiner can normally be reached 8:30am-5:00 pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Parviz Hassanzadeh can be reached at 571-272-1435. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /KEATH T CHEN/ Primary Examiner, Art Unit 1716 Application/Control Number: 18/526,788 Page 2 Art Unit: 1716 Application/Control Number: 18/526,788 Page 3 Art Unit: 1716 Application/Control Number: 18/526,788 Page 4 Art Unit: 1716 Application/Control Number: 18/526,788 Page 5 Art Unit: 1716 Application/Control Number: 18/526,788 Page 6 Art Unit: 1716 Application/Control Number: 18/526,788 Page 7 Art Unit: 1716 Application/Control Number: 18/526,788 Page 8 Art Unit: 1716 Application/Control Number: 18/526,788 Page 9 Art Unit: 1716 Application/Control Number: 18/526,788 Page 10 Art Unit: 1716 Application/Control Number: 18/526,788 Page 11 Art Unit: 1716
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Prosecution Timeline

Dec 01, 2023
Application Filed
May 12, 2026
Non-Final Rejection mailed — §112 (current)

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Prosecution Projections

1-2
Expected OA Rounds
30%
Grant Probability
55%
With Interview (+24.6%)
3y 8m (~12m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1151 resolved cases by this examiner. Grant probability derived from career allowance rate.

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