Prosecution Insights
Last updated: July 05, 2026
Application No. 18/539,083

MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, METHODS, APPARATUS, AND MODULES FOR SEMICONDUCTOR MANUFACTURING

Non-Final OA
Filed
Dec 13, 2023
Examiner
MILLER, JR, JOSEPH ALBERT
Art Unit
1712
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Applied Materials Inc.
OA Round
1 (Non-Final)
68%
Grant Probability
Favorable
1-2
OA Rounds
2m
Est. Remaining
84%
With Interview

Examiner Intelligence

Grants 68% — above average
68%
Career Allowance Rate
857 granted / 1257 resolved
+3.2% vs TC avg
Strong +16% interview lift
Without
With
+16.3%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
38 currently pending
Career history
1294
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
88.1%
+48.1% vs TC avg
§102
3.1%
-36.9% vs TC avg
§112
5.7%
-34.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1257 resolved cases

Prosecution Timeline

Dec 13, 2023
Application Filed
Apr 01, 2026
Non-Final Rejection mailed
Jun 03, 2026
Interview Requested
Jun 11, 2026
Examiner Interview (Telephonic)
Jun 11, 2026
Examiner Interview Summary

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12668869
EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS
2y 6m to grant Granted Jun 30, 2026
Patent 12660518
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
3y 8m to grant Granted Jun 16, 2026
Patent 12655521
INJECTION MODULE FOR A PROCESS CHAMBER
3y 8m to grant Granted Jun 16, 2026
Patent 12655516
SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL
3y 8m to grant Granted Jun 16, 2026
Patent 12655523
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
3y 5m to grant Granted Jun 16, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

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Prosecution Projections

1-2
Expected OA Rounds
68%
Grant Probability
84%
With Interview (+16.3%)
2y 9m (~2m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1257 resolved cases by this examiner. Grant probability derived from career allowance rate.

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