Last updated: July 05, 2026

Application No. 18/573,740

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

Non-Final OA

Filed

Dec 22, 2023

Priority

Jun 29, 2021 — JP 2021-108131 +1 more

Examiner

BRAYTON, JOHN JOSEPH

Art Unit

1794

Tech Center

1700 — Chemical & Materials Engineering

Assignee

Tokyo Electron Limited

OA Round

1 (Non-Final)

This examiner grants 48% of cases after interview

— +22.3% interview lift. A telephonic interview to clarify the technical implementation could significantly improve the outcome.

Based on 709 resolved cases, 2023–2026

Examiner Intelligence

BRAYTON, JOHN JOSEPH View full profile →

Grants 48% of resolved cases

Career Allowance Rate

339 granted / 709 resolved

-17.2% vs TC avg

Strong +22% interview lift

Without

With

+22.3%

Interview Lift

resolved cases with interview

Typical timeline

3y 10m

Avg Prosecution

29 currently pending

Career history

745

Total Applications

across all art units

Statute-Specific Performance

§101

0.1%

-39.9% vs TC avg

§103

86.8%

+46.8% vs TC avg

§102

1.6%

-38.4% vs TC avg

§112

3.7%

-36.3% vs TC avg

Black line = Tech Center average estimate • Based on career data from 709 resolved cases

Prosecution Timeline

Dec 22, 2023

Application Filed

Apr 15, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/209,026

Patent 12668876

PUMP LINER FOR PROCESS CHAMBER

3y 0m to grant Granted Jun 30, 2026

18/256,261

Patent 12662730

CoZrTa(X) Sputtering Target with Improved Magnetic Properties

3y 0m to grant Granted Jun 23, 2026

18/300,209

Patent 12662727

Method And System For Vacuum Vapor Deposition Of Functional Materials In Space

3y 2m to grant Granted Jun 23, 2026

18/230,669

Patent 12655515

IN SITU AND TUNABLE DEPOSITION OF A FILM

2y 10m to grant Granted Jun 16, 2026

18/340,942

Patent 12660569

CERAMIC SUSCEPTOR

2y 11m to grant Granted Jun 16, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

48%

Grant Probability

70%

With Interview (+22.3%)

3y 10m (~1y 4m remaining)

Median Time to Grant

Low

PTA Risk

Based on 709 resolved cases by this examiner. Grant probability derived from career allowance rate.