Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Specification
The specification is objected to as failing to provide proper antecedent basis for the claimed subject matter. See 37 CFR 1.75(d)(1) and MPEP § 608.01(o). Correction of the following is required: See the below drawing objections.
Drawings
The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the below enumerated “not shown by Applicants” must be shown or the features canceled from the claims. No new matter should be entered.
Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1-20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
The numerous claimed “azimuthal angles” do not have structurally defined rays that terminate along defined points within the claimed “paths”. The angles are defined only as “extending along” which is structurally indefinite. Where, along the numerous paths/openings, do each of the “azimuthal angles” rays terminate thereby defining the claimed “azimuthal angle”?
The term “opaque material” in claim 10 is a relative term which renders the claim indefinite. The term “opaque material” is not defined by the claim, the specification does not provide a standard for ascertaining the requisite degree, and one of ordinary skill in the art would not be reasonably apprised of the scope of the invention. Although the specification provides examples for the claimed material, “opacity” is subject to the wavelength of light through which said light travels.
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claims 1-3, 6, 9-17, 20 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Luo, Lee et al. (US 20040086640 A1). Luo teaches a substrate processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]), comprising: one or more sidewalls at least partially defining a processing volume, the one or more sidewalls comprising a metallic body (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]); a substrate support (122; Figure 2A,3,4; [0028],[0030]) disposed in the processing volume; one or more heat sources (118; Figure 2A,3,4; [0028]) operable to heat the processing volume; a first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) disposed in the processing volume, the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) disposed inwardly of the metallic body (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) and abutting against (“a few physical contacting points”; [0040]) the metallic body (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]), the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) comprising: a first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); a first outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) opposing the first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); and a first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C) extending into the first outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1), the first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C) extending along a first azimuthal angle (360º around chamber body 106-Applicant’s A1; Figure 7B) greater than 90º, the first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C) defining a flow channel (“conduit” in 109; [0039]; Figure 2A,3) between the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) and the metallic body (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]), as claimed by claim 1. The Examiner emphasizes that the claimed “first flow opening extending into the first outer face and extending at least partially about the first liner” is required if Luo’s first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) is to be a “conduit” that contains Luo’s “temperature-controlled fluid” as discussed by Luo ([0039]).
Luo further teaches:
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 1, wherein the processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) further comprises: a second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) at least partially supporting the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1), the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) comprising: a second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); a second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) opposing the first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); a second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) at least partially aligning with the first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C), the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) extending into the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) extending along a second azimuthal angle (360º around chamber body 106-Applicant’s A2) greater than 90º; and a third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C) extending into the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), the third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C) extending along a third azimuthal angle (arcuate angle between 1st,2nd flow opening around chamber body 106) greater than 90º, as claimed by claim 2
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 2, wherein the third azimuthal angle (arcuate angle between 1st,2nd flow opening around chamber body 106) is greater than 180º, as claimed by claim 3
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 2, wherein the processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) further comprises: a gas inlet (123-125; Figure 2A); and a gas exhaust (143; Figure 2A), as claimed by claim 6
A liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) for a substrate processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]), comprising: an inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); an outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) opposing the inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); an inlet opening (inlet “conduit” in 109; [0039]; Figure 2A,3-not shown by Applicants) extending into the inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); an outlet opening (outlet “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 704; Figure 7B) extending into the inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); and a curved flow opening (arcuate “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 159/259; Figure 2,4,8A,B) extending into the outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1), the curved flow opening (arcuate “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 159/259; Figure 2,4,8A,B) extending along an azimuthal angle (360º around chamber body 106) greater than 90º, as claimed by claim 9
The liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) of claim 9, wherein the liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) comprises an opaque material, as claimed by claim 10
The liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) of claim 9, wherein the azimuthal angle (360º around chamber body 106) is greater than 180º, as claimed by claim 11
The liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) of claim 9, wherein the curved flow opening (arcuate “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 159/259; Figure 2,4,8A,B) is a recess that at least partially defines a shoulder (planar portions of 109) along the outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants), as claimed by claim 12. The Examiner notes that all fluid paths, including Luo’s “conduit” are recesses into their confining conduits.
The liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) of claim 9, wherein the liner (109; Figure 4,5; [0039]-[0041]; “anodized aluminum, ceramic”-Applicant’s 163; Figure 1) further comprises: a first side face (three-dimensional continuity for 109; not shown) extending between the inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants); and a second side face (three-dimensional continuity for 109; not shown) extending between the inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants), the second side face (three-dimensional continuity for 109; not shown) opposing the first side face (three-dimensional continuity for 109; not shown), wherein the curved flow opening (arcuate “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 159/259; Figure 2,4,8A,B) , the inlet opening (inlet “conduit” in 109; [0039]; Figure 2A,3-not shown by Applicants) , and the outlet opening (outlet “conduit” in 109; [0039]; Figure 2A,3-Applicant’s 704; Figure 7B) extend into the second side face (three-dimensional continuity for 109; not shown), as claimed by claim 13
A chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) for a substrate processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]), comprising: a first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-“anodized aluminum, ceramic”-Applicant’s 163; Figure 1) comprising: a first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); a first outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) opposing the first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); and a first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C) extending into the first outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-“anodized aluminum, ceramic”-Applicant’s 163; Figure 1), the first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C) extending along a first azimuthal angle (360º around chamber body 106-Applicant’s A1; Figure 7B) greater than 90º; and a second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) comprising: a second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); a second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) opposing the first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); and a second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) sized and shaped to at least partially align with the first flow opening (inlet “conduit” in 109; [0039]; Figure 2A,3-assumed to be Applicant’s “curved flow opening” 159; Figure 7C), the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) extending into the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) extending along a second azimuthal angle (360º around chamber body 106-Applicant’s A2) greater than 90º, as claimed by claim 14
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 14, wherein the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) is a recess, as claimed by claim 15. The Examiner notes that all fluid paths, including Luo’s “conduit” are recesses into their confining conduits.
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 14, wherein the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) further comprises: a third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C) extending into the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants) and extending at least partially about the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), the third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C) extending along a third azimuthal angle (arcuate angle between 1st,2nd flow opening around chamber body 106) greater than 90º, as claimed by claim 16
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 16, wherein the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) further comprises: a first side face (three-dimensional continuity for 109; not shown) extending between the second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants); and a second side face (three-dimensional continuity for 109; not shown) extending between the second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants), the second side face (three-dimensional continuity for 109; not shown) opposing the first side face (three-dimensional continuity for 109; not shown), wherein the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) extends into the first side face (three-dimensional continuity for 109; not shown) and the third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C) extends into the second side face (three-dimensional continuity for 109; not shown), as claimed by claim 17
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 14, wherein the first azimuthal angle (360º around chamber body 106-Applicant’s A1; Figure 7B) and the second azimuthal angle (360º around chamber body 106-Applicant’s A2) are respectively greater than 180º, as claimed by claim 20
Allowable Subject Matter
Claims 4, 5, 7, 8 and 18-19 would be allowable if rewritten to overcome the rejections under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action and to include all of the limitations of the base claim and any intervening claims.
The following is a statement of reasons for the indication of allowable subject matter: The cited prior art do not teach, alone or in combination:
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 2, wherein the processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) further comprises a third liner (Applicant’s 117; Figure 1) at least partially supporting the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), the third liner (Applicant’s 117; Figure 1) comprising: a third inner face; a third outer face opposing the first inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants); and a fourth flow opening at least partially aligning with the third flow opening (between inlet and outlet of “conduit” 109; [0039]-Applicant’s 359; Figure 8C), the fourth flow opening extending into the third outer face and extending at least partially about the third liner (Applicant’s 117; Figure 1), the fourth flow opening extending along a fourth azimuthal angle (360º around chamber body 106) greater than 90º, as claimed by claim 4
processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) further comprises: a ring disposed between the first liner (top 109 above 166; Figure 4,5; [0039]-[0041]-Applicant’s 163; Figure 1) and the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) – claim 5
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 6, wherein the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) further comprises: one or more through holes (Applicant’s 161; Figure 2) extending between the second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants), as claimed by claim 7
The processing chamber (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 7, wherein the one or more through holes (Applicant’s 161; Figure 2) interface with one or more exhaust openings formed in the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), as claimed by claim 8
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 14, wherein the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]) further comprises: one or more through holes (Applicant’s 161; Figure 2) extending between the second inner face (inner face of 109; Figure 2A,3,4-not shown by Applicants) and the second outer face (outer face of 109; Figure 2A,3,4-not shown by Applicants), as claimed by claim 18
The chamber kit (106; Figure 2A,3,4; “aluminum alloy” [0027]-Applicant’s 156,113,112,148; Figure 1; [0029]) of claim 18, wherein the one or more through holes (Applicant’s 161; Figure 2) extend into a recessed outer surface at least partially defined by the second flow opening (outlet “conduit” in 109; [0039]; Figure 2A,3-asumed to be Applicant’s “second curve flow opening” 259; Figure 2,4,8A,B) of the second liner (bottom 109 below 166; Figure 4,5; [0039]-[0041]-Applicant’s 115/117; Figure 1; [0077]), as claimed by claim 19
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Reactor liners for surface protection from processing environments similar to the claimed invention include US 20260085445 A1; WO 2021162932 A1; US 5884009 A; US 7468104 B2; US 20260068564 A1; US 20260068550 A1
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/Rudy Zervigon/ Primary Examiner, Art Unit 1716
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