Prosecution Insights
Last updated: August 16, 2026
Application No. 18/598,293

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Non-Final OA §112
Filed
Mar 07, 2024
Priority
Sep 27, 2021 — JP 2021-157161 +2 more
Examiner
GAMBETTA, KELLY M
Art Unit
1718
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Kokusai Electric Corporation
OA Round
3 (Non-Final)
72%
Grant Probability
Favorable
3-4
OA Rounds
7m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 72% — above average
72%
Career Allowance Rate
677 granted / 941 resolved
+6.9% vs TC avg
Strong +33% interview lift
Without
With
+33.0%
Interview Lift
resolved cases with interview
Typical timeline
3y 0m
Avg Prosecution
40 currently pending
Career history
987
Total Applications
across all art units

Statute-Specific Performance

§101
0.8%
-39.2% vs TC avg
§103
58.0%
+18.0% vs TC avg
§102
17.7%
-22.3% vs TC avg
§112
18.7%
-21.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 941 resolved cases

Office Action

§112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Continued Examination Under 37 CFR 1.114 A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 6/5/2026 has been entered. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 1-5, 7, 11-18 and 21-24 rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 1 does not properly define adsorption sites; it is established that an inhibitor layer is formed on a first surface and a modifying agent to adsorb inhibitor molecules contained in the modifying agent on the first surface. However, this does not establish the existence of adsorption sites on the inhibitor layer. Further, it is worded in a confusing manner – does the modifying agent adsorb the same inhibitor molecules from the inhibitor layer or are they different? Are the adsorption sites on the inhibitor layer or the modifying agent? Appropriate correction is required. Claim 1 requires a modifying agent to adsorb inhibitor molecules that are contained in the modifying agent. It is unclear how the modifying agent absorbs itself or where the inhibitor molecules are initially located. Claim 1 further defines a, b and c, and states two possible relationships between a, b, and c but does not state if the relationship is required by the claims or not, making this clause indefinite. Claim 1 recites the limitation “the interval”. There is insufficient antecedent basis for this limitation in the claim. As to claim 7, it is unclear if this is a separate step or is repetitive as the density of the adsorption sites are adjusted in claim 1. Claim 21 refers to a regulating step in claim 1 when that was amended to be an adjusting step. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to KELLY M GAMBETTA whose telephone number is (571)272-2668. The examiner can normally be reached M-F 9-5:30. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Gordon Baldwin can be reached at 571-272-5166. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. KELLY M. GAMBETTA Primary Examiner Art Unit 1718 /KELLY M GAMBETTA/Primary Examiner, Art Unit 1718
Read full office action

Prosecution Timeline

Show 2 earlier events
Jan 07, 2026
Response Filed
Mar 05, 2026
Final Rejection mailed — §112
May 22, 2026
Interview Requested
May 28, 2026
Applicant Interview (Telephonic)
May 28, 2026
Examiner Interview Summary
Jun 05, 2026
Request for Continued Examination
Jun 09, 2026
Response after Non-Final Action
Jul 17, 2026
Non-Final Rejection mailed — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

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THIN-FILM FORMING RAW MATERIAL, WHICH IS USED IN ATOMIC LAYER DEPOSITION METHOD, THIN-FILM, METHOD OF PRODUCING THIN-FILM, AND ZINC COMPOUND
2y 11m to grant Granted Aug 11, 2026
Patent 12680159
CHAMBER-ACCUMULATION EXTENSION VIA IN-SITU PASSIVATION
4y 7m to grant Granted Jul 14, 2026
Patent 12685045
DEPOSITION OF OXIDE THIN FILMS
1y 9m to grant Granted Jul 14, 2026
Patent 12666886
Flowable CVD Film Defect Reduction
5y 1m to grant Granted Jun 23, 2026
Patent 12654878
METAL PLATING RETENTION ON ADDITIVELY MANUFACTURE PLASTIC PARTS FOR AN AIRCRAFT
2y 10m to grant Granted Jun 16, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
72%
Grant Probability
99%
With Interview (+33.0%)
3y 0m (~7m remaining)
Median Time to Grant
High
PTA Risk
Based on 941 resolved cases by this examiner. Grant probability derived from career allowance rate.

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