Prosecution Insights
Last updated: October 23, 2026
Application No. 18/635,945

Resist Material, Resist Composition, And Patterning Process

Non-Final OA §DP
Filed
Apr 15, 2024
Priority
Apr 19, 2023 — JP 2023-068853
Examiner
CHU, JOHN S Y
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Shin-Etsu Chemical Co., Ltd.
OA Round
1 (Non-Final)
77%
Grant Probability
Favorable
1-2
OA Rounds
5m
Est. Remaining
82%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allowance Rate
753 granted / 981 resolved
+11.8% vs TC avg
Moderate +5% lift
Without
With
+5.4%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
57 currently pending
Career history
1054
Total Applications
across all art units

Statute-Specific Performance

§101
0.9%
-39.1% vs TC avg
§103
55.3%
+15.3% vs TC avg
§102
20.7%
-19.3% vs TC avg
§112
14.2%
-25.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 981 resolved cases

Office Action

§DP
DETAILED CORRESPONDENCE This Office action is in response to the application received August 29, 2018. Double Patenting The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969). A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b). The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13. The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer. Claims 1-19 are provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1-12 of copending Application No. 2025/0231482 A1 (OTOMO et al and 2024/0361690 A1 (HATAKEYAMA et al) (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because the copending application claims a resist composition comprising repeat units which are the same or similar based on the disclose groups. OTOMO et al claim repeating units having a side chain group wherein the aromatic ring contains an iodine substituent and a carboxylate end unit, see claim 1 below: PNG media_image1.png 884 372 media_image1.png Greyscale . And claim 3 recite a repeating unit comprising a repeating unit being a sulfonium or iodonium salt of a sulfonic acid bonded to a polymer main chain, see below: PNG media_image2.png 588 398 media_image2.png Greyscale HATAKEYAMA et al claim a resist material comprising a repeating unit containing a sulfonium or iodonium salt of a monovalent aromatic carboxylic and claim 7 recites a repeating unit comprising a sulfonium or iodonium salt of a sulfonic acid, see the below: PNG media_image3.png 68 364 media_image3.png Greyscale PNG media_image4.png 572 312 media_image4.png Greyscale PNG media_image4.png 572 312 media_image4.png Greyscale A patent to either of the U.S. Patent applications would extend the grant to the same or similar invention beyond the statutory length of 20 years from filing. Claims 2 and 3 are met by the repeating units above in OTOMO et al and HATAKEYAMA et al. Claims 4 to Z2B wherein at least one iodine is contained is met by claims 2 and 7 of OTOMO et al and HATAKEYAMA et al, respectively. Claims 5-8 are met in claims 5-7 or OTOMO et al and claims 5-9 of HATAKEYAMA et al. Claims 9-17 recite a resist composition which is recited in OTOMO et al and HATAKEYAMA et al. Claims 18-20 to a pattern process are seen in claims 10-12 of OTOMO et al and claims 12-13 of HATAKEYAMA et al. It would have been prima facie obvious to one of ordinary skill in the art of photosensitive compositions to duplicate the resist composition of OTOMO et al or HATAKEYAMA et al with the reasonable expectation of having a same or similar invention which improperly extends the grant to the claimed resist composition and process of forming a pattern. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. Claims 1-19 are rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1-13 of U.S. Patent No. 11,953,832. Although the claims at issue are not identical, they are not patentably distinct from each other because the U.S. Patent claims a resist composition comprising repeat units which are the same or similar based on the disclosed groups. HATAKEYAMA et al claim repeating units having a side chain group wherein the aromatic ring contains an iodine substituent and a carboxylate end unit, see claim 1 below: PNG media_image5.png 150 416 media_image5.png Greyscale PNG media_image6.png 428 388 media_image6.png Greyscale . A patent to either of the U.S. Patent application would extend the grant to the same or similar invention beyond the statutory length of 20 years from filing. Claims 2-4 to the repeating unit -b are met by claim 6 of HATAKEYAMA et al by reciting the claimed repeating unit having a sulfonium or iodonium salt of a sulfonic acid with Z3 meeting Z2B of claim 4, see below: PNG media_image7.png 266 444 media_image7.png Greyscale PNG media_image8.png 860 390 media_image8.png Greyscale Claims 5 and 6 are met by claim 4 in HATAKEYAMA et al which disclose acid-labile containing repeating units, see below: PNG media_image9.png 590 394 media_image9.png Greyscale Claim 7 is met by claim 5 of HATAKEYAMA et al for the repeating units having an adhesive group selected from the group consisting of hydroxy, carboxy, lactone ring, carbonate bond, etc. Claims 8-17 to a resist composition are the same as the recited claims from HATAKEYAMA et al, claims 1-10 Claims 18 and 19 to the process are met by claims 11 and 12 in HATAKEYAMA et al. It would have been prima facie obvious to one of ordinary skill in the art of photosensitive compositions to duplicate the resist composition of HATAKEYAMA et al with the reasonable expectation of having a same or similar invention which improperly extends the grant to the claimed resist composition and process of forming a pattern. The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. HATAKEYAMA et al (10,871,711) disclose resist compositions comprising photoacid generators having aromatic groups with iodine substituents and a repeating unit having sulfonium or iodonium salts of sulfonic acid. Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN S CHU whose telephone number is (571)272-1329. The examiner can normally be reached M-F, IFP-Flex. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Keith Hendricks, can be reached at telephone number 571-272-1401. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://portal.uspto.gov/external/portal. Should you have questions about access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. /John S. Chu/ Primary Examiner, Art Unit 1737 J. Chu September 28, 2026
Read full office action

Prosecution Timeline

Apr 15, 2024
Application Filed
Oct 01, 2026
Non-Final Rejection mailed — §DP (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
77%
Grant Probability
82%
With Interview (+5.4%)
2y 11m (~5m remaining)
Median Time to Grant
Low
PTA Risk
Based on 981 resolved cases by this examiner. Grant probability derived from career allowance rate.

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