Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 11-12 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Regarding claim 11, the claim has “the substrate” (line 3) that lacks proper antecedence. For the purpose of examination, it is being considered as “a substrate”.
Note: The dependent claim 12 necessarily inherit the indefiniteness of the claim on which it depends.
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
1. Claim(s) 1-3,5,8-13 is/are rejected under 35 U.S.C. 102a(1) as being anticipated by US 20250142812 A1 (Song).
Regarding claim 1, Song shows (Fig. 1-6) a semiconductor device, comprising:
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a plurality of bit lines (BL, para 23) each extending in a first direction (Y, Fig. 2);
a plurality of oxide films (170, para 54) each extending in a second direction (X, Fig. 4) and disposed over the bit lines; and
a plurality of landing pads (LP, para 24) arranged along the oxide films (Fig. 4);
wherein each of the landing pads has an upper portion (below 182) formed above a top surface of one of the bit lines and a lower portion formed below the top surface thereof (Fig. 3).
Regarding claim 2, Song shows (Fig. 1-6) wherein the plurality of landing pads (LP) are alternately arranged on two adjacent bit lines (BL) along the first direction (as shown above).
Regarding claim 3, Song shows (Fig. 1-6) wherein about 50 to 100 percent of an area of one of the plurality of landing pads overlaps one of the bit lines (as shown above).
Regarding claim 5, Song shows (Fig. 3) wherein a thickness of the upper portion of one of the plurality of landing pads (LP) on the top surface of the bit line (BL) is substantially equal to a thickness of the oxide film (170).
Regarding claim 8, Song shows (Fig. 3,6) further comprising:
a contact area (BC, para 50) under one of the plurality of landing pads;
wherein the bit lines and the oxide films form a plurality of grids, wherein the contact area is defined within one of the contact areas;
wherein the lower portion of the landing pad is disposed within the contact area.
Regarding claim 9, Song shows (Fig. 3) further comprising: a lower electrode (182, para 24) disposed on and electrically connected with the upper portion of one of the landing pads (LP).
Regarding claim 10, Song shows (Fig. 3) wherein one of the landing pad has an area overlapping one of the bit line (all of the LP portion overlapping with BL), which is greater than an area overlapping contact area (the bottom part of LP contacting BC).
Regarding claim 11, Song shows (Fig. 3) further comprising:
a storage node contact (BC or bit line contact which is the same as storage node contact) formed between two of the bit lines (BL);
wherein the contact area has a contact hole recessed in the substrate (hole in 110, para 33, for BC) to receive the storage node contact;
wherein the lower portion of the landing pad (LP) is in contact with and electrically connected to the storage node contact.
Regarding claim 12, Song shows (Fig. 3) wherein a bottom surface of the storage node contact (BC) is positioned lower than a bottom surface of the bit line (BL).
Regarding claim 13, Song shows (Fig. 3) wherein the lower electrode (182, para 56) is vertically overlapped with one of the bit lines (BL).
Claim Rejections - 35 USC § 103
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
1. Claim(s) 4 is/are rejected under 35 U.S.C. 103 as being unpatentable over Song as applied to claim 1 above further in view of US 20250048619 A1 (Kang).
Regarding claim 4, Song shows surface of one of the plurality of landing pads overlaps one of the bit lines.
Song does not show a curved surface of surface of one of the plurality of landing pads overlapping on of the bit lines.
Kang shows (Fig. 2) a curved surface of surface of one of the plurality of landing pads (LP, para 31) overlapping on one of the bit lines (BL, para 31).
It would have been obvious to one of ordinary skill in the art, at or before the effective filing date of the invention was made, to add the invention of Kang, with curved surface of landing pad of Kang, to the invention of Song.
The motivation to do so is that the selection of an art recognized shape of landing pad of Kang is suitable for the intended use of Song (MPEP §2144.07).
2. Claim(s) 6-7 is/are rejected under 35 U.S.C. 103 as being unpatentable over Song, as applied to claim 5 in view of US 20190043865 A1 (Chang).
Regarding claim 6, Song shows the landing pad and the bit line.
Cho does not show the upper portion of the landing pad tapers away from the bit line.
Chang shows (Fig. 7B) the upper portion of the landing pad (22a, para 34) tapers away from the bit line (16, para 28).
It would have been obvious to one of ordinary skill in the art, at or before the effective filing date of the invention was made, to add the invention of Chang, with tapered landing pad, to the invention of Song.
The motivation to do so is that the combination produces the predictable result of avoiding the short circuits with the adjacent bit line mask (para 34).
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Regarding claim 7, Song in view of Chang shows wherein an angle defined by the landing pad and the top surface of the bit line is about 70 to 90 degrees (as shown by the two arrows and the angle between them).
Response to Arguments
Applicant’s arguments with respect to claim(s) 1 have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument.
Conclusion
Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a).
A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to WASIUL HAIDER whose telephone number is (571)272-1554. The examiner can normally be reached M-F 9 a.m. - 6 p.m..
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/WASIUL HAIDER/Primary Examiner, Art Unit 2812