Prosecution Insights
Last updated: April 19, 2026
Application No. 18/690,414

DEPOSITION MATERIAL SUITABLE FOR PLASMA ETCHING DEVICE MEMBER ETC., AND METHOD FOR PRODUCING IT

Non-Final OA §102§103
Filed
Aug 15, 2024
Examiner
VETERE, ROBERT A
Art Unit
1712
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tocalo Co. Ltd.
OA Round
1 (Non-Final)
61%
Grant Probability
Moderate
1-2
OA Rounds
3y 6m
To Grant
74%
With Interview

Examiner Intelligence

Grants 61% of resolved cases
61%
Career Allow Rate
530 granted / 872 resolved
-4.2% vs TC avg
Moderate +13% lift
Without
With
+13.4%
Interview Lift
resolved cases with interview
Typical timeline
3y 6m
Avg Prosecution
49 currently pending
Career history
921
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
60.7%
+20.7% vs TC avg
§102
15.6%
-24.4% vs TC avg
§112
16.9%
-23.1% vs TC avg
Black line = Tech Center average estimate • Based on career data from 872 resolved cases

Office Action

§102 §103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Examiner’s Comments This office action is examining the amended claims filed on 3/8/24 rather than the claims submitted on 8/15/25 because the claims submitted on 3/8/24 are clearly marked as amended while the claims submitted on 8/15/25 are a duplicate of the originally filed and unamended claims. In response to this action, applicant should present the correct claims from 3/8/24 (or an amended version of those claims). Election/Restrictions Applicant’s election without traverse of Group I (claims 1-6) in the reply filed on 10/28/25 is acknowledged. Claims 7-12 have been withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention, there being no allowable generic or linking claim. Election was made without traverse in the reply filed on 10/28/25. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claims 1-3 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Wu et al. (US 2020/0024194). Claims 1 and 2: Wu et al. (US 2020/0024194) teaches a composition for depositing a corrosion resistant coating which protects from plasma (Abst.; ¶ 0002), the composition comprising: a solid solution including Y2O3 (¶ 0038) and ZrO2, wherein the ZrO2 is present at 10 mol% (¶¶ 0039-0040) and wherein the solid solution has a hexagonal (i.e. claimed hexahedral) crystal structure (¶ 0039). Claim 3: Wu also teaches the inclusion of other materials, such as hafnium oxide which is present at an amount of 10-20 mol% (¶ 0032). Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows: 1. Determining the scope and contents of the prior art. 2. Ascertaining the differences between the prior art and the claims at issue. 3. Resolving the level of ordinary skill in the pertinent art. 4. Considering objective evidence present in the application indicating obviousness or nonobviousness. Claim 4 is rejected under 35 U.S.C. 103 as being unpatentable over Wu in light of Wu et al. (US 2018/0240648, hereinafter Wu II). Claim 4: Wu teaches that other metal oxides can be included (¶ 0032), but fails to teach Nb2O3. Wu II teaches a composition for forming a plasma corrosion resistant film (Abst.) comprising a solid solution of Y2O3 and explains that the solid solution can also include Nb2O3 (¶¶ 0034-0037). The simple substitution of one known element for another to obtain predictable results is prima facie obvious. MPEP § 2143. Thus, it would have been obvious to one of ordinary skill at the time of filing to have selected Nb2O3 as the additional metal oxide in Wu with the predictable expectation of success. Allowable Subject Matter Claims 5 and 6 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. None of the prior art on record, taken individually or in combination, fairly teaches or suggests all the limitations of claims 5 or 6. Furthermore, the specification evidences the unexpected results associated with these claimed features. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to Robert A Vetere whose telephone number is (571)270-1864. The examiner can normally be reached M-F 7:30-4:00 EST. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael Cleveland can be reached at (571) 270-1034. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /ROBERT A VETERE/ Primary Examiner, Art Unit 1712
Read full office action

Prosecution Timeline

Aug 15, 2024
Application Filed
Dec 03, 2025
Non-Final Rejection — §102, §103 (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
61%
Grant Probability
74%
With Interview (+13.4%)
3y 6m
Median Time to Grant
Low
PTA Risk
Based on 872 resolved cases by this examiner. Grant probability derived from career allow rate.

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