Last updated: July 17, 2026

Application No. 18/700,642

APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTOR PROCESSING

Non-Final OA

Filed

Apr 11, 2024

Priority

Oct 12, 2021 — provisional 63/262,444 +1 more

Examiner

MILLER, JR, JOSEPH ALBERT

Art Unit

Tech Center

Assignee

Lam Research Corporation

OA Round

1 (Non-Final)

Interview Optional

— +16.4% interview lift. Interview already conducted in this application's prosecution history. This examiner has a 68% grant rate with +16.4% interview lift. Since an interview has already been tried, recommend written response with narrowed claims based on precedent claim evolution patterns.

Based on 1260 resolved cases, 2023–2026

Examiner Intelligence

MILLER, JR, JOSEPH ALBERT View full profile →

Grants 68% — above average

Career Allowance Rate

860 granted / 1260 resolved

+8.3% vs TC avg

Strong +16% interview lift

Without

With

+16.4%

Interview Lift

resolved cases with interview

Typical timeline

2y 9m

Avg Prosecution

42 currently pending

Career history

1296

Total Applications

across all art units

Statute-Specific Performance

§101

0.2%

-39.8% vs TC avg

§103

88.1%

+48.1% vs TC avg

§102

3.1%

-36.9% vs TC avg

§112

5.7%

-34.3% vs TC avg

Black line = Tech Center average estimate • Based on career data from 1260 resolved cases

Prosecution Timeline

Apr 11, 2024

Application Filed

May 26, 2026

Examiner Interview (Telephonic)

Jun 02, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

17/587,871

Patent 12674235

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

4y 5m to grant Granted Jul 07, 2026

18/537,044

Patent 12668869

EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS

2y 6m to grant Granted Jun 30, 2026

17/954,960

Patent 12660518

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

3y 8m to grant Granted Jun 16, 2026

17/968,561

Patent 12655521

INJECTION MODULE FOR A PROCESS CHAMBER

3y 8m to grant Granted Jun 16, 2026

17/995,292

Patent 12655516

SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL

3y 8m to grant Granted Jun 16, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

68%

Grant Probability

85%

With Interview (+16.4%)

2y 9m (~6m remaining)

Median Time to Grant

Low

PTA Risk

Based on 1260 resolved cases by this examiner. Grant probability derived from career allowance rate.

APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTOR PROCESSING

Interview Optional

Examiner Intelligence

Statute-Specific Performance

Prosecution Timeline

Precedent Cases

Applications granted by this same examiner with similar technology

Strategy Recommendation AI-generated — please review before filing

Prosecution Projections

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