Prosecution Insights
Last updated: April 19, 2026

Lam Research Corporation

119 pending office actions

Portfolio Summary

119
Total Pending OAs
31
Final Rejections
88
Non-Final OAs

Pending Office Actions

App #TitleExaminerArt UnitStatusFiled
18865913 THROTTLE VALVE FOR SUBSTRATE PROCESSING SYSTEMS JELLETT, MATTHEW WILLIAM 3753 Non-Final OA Nov 14, 2024
18936877 UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH HOUSTON, ADAM D 2842 Non-Final OA Nov 04, 2024
18932475 VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS MAYY, MOHAMMAD 1718 Non-Final OA Oct 30, 2024
18928852 Systems and Methods for Extracting Process Control Information from Radiofrequency Supply System of Plasma Processing System KAISER, SYED M 2831 Non-Final OA Oct 28, 2024
18924479 SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEMICONDUCTOR PROCESSING TOOLS LE, MINH Q 3753 Non-Final OA Oct 23, 2024
18854754 HEAT GUARD WANG, XIAOBEI 1784 Non-Final OA Oct 07, 2024
18854240 NONCONFORMAL OXIDE FILM DEPOSITION USING CARBON-CONTAINING INHIBITOR TADAYYON ESLAMI, TABASSOM 1718 Non-Final OA Oct 04, 2024
18847683 REDUCING CAPACITANCE IN SEMICONDUCTOR DEVICES MCCLURE, CHRISTINA D 1718 Non-Final OA Sep 17, 2024
18847308 FEEDBACK CONTROL SYSTEMS FOR IMPEDANCE MATCHING FERNANDEZ, PEDRO C 2844 Non-Final OA Sep 16, 2024
18847652 LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NITRIDE GAMBETTA, KELLY M 1718 Non-Final OA Sep 16, 2024
18847173 SEAM-FREE AND CRACK-FREE DEPOSITION MCCLURE, CHRISTINA D 1718 Non-Final OA Sep 13, 2024
18837560 LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS CHEN, BRET P 1718 Non-Final OA Aug 09, 2024
18836329 SYSTEMS AND METHODS FOR CENTRAL FREQUENCY TUNING SATHIRAJU, SRINIVAS 2844 Non-Final OA Aug 06, 2024
18834982 METHOD AND APPARATUS FOR RADIO FREQUENCY GRID DESIGN IN AN ESC TO REDUCE FILM ASYMMETRY PATEL, DHARTI HARIDAS 2838 Non-Final OA Jul 31, 2024
18767915 RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN RESPONSE TO SUBSTRATE BULK RESISTIVITY VARIATIONS BENNETT, CHARLEE 1718 Non-Final OA Jul 09, 2024
18727065 PLASMA RADICAL EDGE RING BARRIER SEAL BYRD, EUGENE G 3675 Non-Final OA Jul 05, 2024
18725961 COMPOSITION MIXTURE CONTROL OF EFEM ENVIRONMENT GRAY, PAUL J 3753 Non-Final OA Jul 01, 2024
18757184 ATOMIC LAYER ETCH AND SELECTIVE DEPOSITION PROCESS FOR EXTREME ULTRAVIOLET LITHOGRAPHY RESIST IMPROVEMENT DEO, DUY VU NGUYEN 1713 Non-Final OA Jun 27, 2024
18747743 Method for Manufacturing ScAlN Target LIANG, ANTHONY M 1734 Non-Final OA Jun 19, 2024
18740501 Voltage Transient Detector and Current Transient Detector BAUER, SCOTT ALLEN 2838 Non-Final OA Jun 11, 2024
18662672 METHOD FOR ETCHING AN ETCH LAYER CULBERT, ROBERTS P 1716 Final Rejection May 13, 2024
18708586 NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT MCCLAIN, GERALD 3652 Non-Final OA May 08, 2024
18707790 SYSTEM FOR MONITORING PERFORMANCE OF ELECTROSTATIC CHUCKS IN SUBSTRATE PROCESSING SYSTEMS AL-TAWEEL, MUAAMAR QAHTAN 2838 Non-Final OA May 06, 2024
18637111 ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION CHAN, LAUREEN 1716 Non-Final OA Apr 16, 2024
18701808 MICROCHANNEL ASSEMBLY COOLED POWER CIRCUITS FOR POWER BOXES OF SUBSTRATE PROCESSING SYSTEMS VORTMAN, ANATOLY 2835 Non-Final OA Apr 16, 2024
18701458 VALVE FOR SEMICONDUCTOR EQUIPMENT PRICE, CRAIG JAMES 3753 Non-Final OA Apr 15, 2024
18691817 REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING YU, YUECHUAN 1718 Non-Final OA Mar 13, 2024
18689007 Junction System for Direct-Drive Radiofrequency Power Supply WELLS, KENNETH B 2842 Final Rejection Mar 04, 2024
18581084 TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE KEENAN, JAMES W 3655 Non-Final OA Feb 19, 2024
18683501 METHOD AND APPARATUS FOR ETCHING A CARBON CONTAINING LAYER TRAN, BINH X 1713 Non-Final OA Feb 13, 2024
18291444 SUBSTRATE SUPPORTS WITH MESOCHANNEL ASSEMBLIES NIEVES, NELSON J 3763 Non-Final OA Jan 23, 2024
18572075 IMAGE ANALYSIS OF PLASMA CONDITIONS JIA, XIN 2663 Non-Final OA Dec 19, 2023
18570061 IN-LINE MACHINE VISION SYSTEM FOR PART TRACKING OF SUBSTRATE PROCESSING SYSTEM COLLINS, MICHAEL 3655 Non-Final OA Dec 13, 2023
18569100 RADICAL-ACTIVATED CARBON FILM DEPOSITION STARK, JARRETT J 2898 Non-Final OA Dec 11, 2023
18385823 DETERMINATION OF RECIPES FOR MANUFACTURING SEMICONDUCTOR DEVICES NGUYEN, NHA T 2851 Non-Final OA Oct 31, 2023
18557250 APPARATUSES FOR MEASURING GAP BETWEEN A SUBSTRATE SUPPORT PLANE AND GAS DISTRIBUTION DEVICE HO, ANTHONY 2817 Non-Final OA Oct 25, 2023
18493614 DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF CHEN, KEATH T 1716 Non-Final OA Oct 24, 2023
18379397 PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS HERNANDEZ-KENNEY, JOSE 1717 Non-Final OA Oct 12, 2023
18550733 CONTROL OF METALLIC CONTAMINATION FROM METAL-CONTAINING PHOTORESIST MARKOFF, ALEXANDER 1711 Non-Final OA Sep 15, 2023
18282021 CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIGH TEMPERATURE DEPOSITION SEQUENCE BERMAN, JASON 1794 Non-Final OA Sep 14, 2023
18244905 REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT MALKOWSKI, KENNETH J 3667 Non-Final OA Sep 11, 2023
18463647 TOOL FOR PREVENTING OR SUPPRESSING ARCING NUCKOLS, TIFFANY Z 1716 Non-Final OA Sep 08, 2023
18256893 HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN LOW-PRESSURE CONDITIONS WITH WIDE GAP ELECTRODE SPACING LU, JIONG-PING 1713 Final Rejection Jun 09, 2023
18256665 MACHINE-LEARNING IN MULTI-STEP SEMICONDUCTOR FABRICATION PROCESSES AZAD, MD ABUL K 2119 Non-Final OA Jun 09, 2023
18265825 ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES THOMAS, BINU 1717 Non-Final OA Jun 07, 2023
18327558 WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION TUROCY, DAVID P 1718 Non-Final OA Jun 01, 2023
18253196 LOW RESISTANCE PULSED CVD TUNGSTEN LOHAKARE, PRATIKSHA JAYANT 2818 Final Rejection May 18, 2023
18037537 PROCESS KIT DE-BUBBLING RUFO, LOUIS J 1795 Non-Final OA May 17, 2023
18253038 LOW RESISTIVITY CONTACTS AND INTERCONNECTS LOUIE, MANDY C 1718 Final Rejection May 16, 2023
18035200 PEDESTAL INCLUDING SEAL CHEN, KEATH T 1716 Non-Final OA May 03, 2023
18034834 SUBSTRATE PROCESSING SYSTEM TOOLS FOR MONITORING, ASSESSING AND RESPONDING BASED ON HEALTH INCLUDING SENSOR MAPPING AND TRIGGERED DATALOGGING BAHLS, JENNIFER E. S. 2853 Non-Final OA May 01, 2023
18250740 Wear Compensating Confinement Ring KACKAR, RAM N 1716 Non-Final OA Apr 26, 2023
18250349 LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING CHEN, KEATH T 1716 Final Rejection Apr 24, 2023
18032154 COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK CHAN, LAUREEN 1716 Final Rejection Apr 14, 2023
18247724 SPARK PLASMA SINTERED COMPONENT FOR PLASMA PROCESSING CHAMBER MCDONALD, RODNEY GLENN 1794 Non-Final OA Apr 03, 2023
18247060 DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY PURELY CHEMICAL MEANS TUROCY, DAVID P 1718 Non-Final OA Mar 28, 2023
18246849 COATED CONDUCTOR FOR HEATER EMBEDDED IN CERAMIC WOLCOTT, BRIAN P 3711 Non-Final OA Mar 27, 2023
18028638 PREPLATING EDGE DRY KURPLE, KARL 1717 Non-Final OA Mar 27, 2023
18187342 ELECTRON EXCITATION ATOMIC LAYER ETCH KLUNK, MARGARET D 1716 Non-Final OA Mar 21, 2023
18026431 AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES LEE, AIDEN Y 1718 Non-Final OA Mar 15, 2023
18026322 HEAT-TRANSFERRING VALVE FLEXURE AND METHODS BASTIANELLI, JOHN 3753 Non-Final OA Mar 14, 2023
18025197 HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS LUND, JEFFRIE ROBERT 1716 Non-Final OA Mar 08, 2023
18042198 C-shroud Modification For Plasma Uniformity Without Impacting Mechanical Strength Or Lifetime Of The C-shroud SWEELY, KURT D 1718 Final Rejection Feb 17, 2023
18041391 COMBINED SELF-FORMING BARRIER AND SEED LAYER BY ATOMIC LAYER DEPOSITION KEBEDE, BROOK 2818 Non-Final OA Feb 10, 2023
18006552 LOW CEILING TEMPERATURE HOMOPOLYMERS AS SACRIFICIAL PROTECTION LAYERS FOR ENVIRONMENTALLY SENSITIVE SUBSTRATES KIELIN, ERIK J 2814 Final Rejection Jan 23, 2023
18017208 THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING FORD, NATHAN K 1716 Non-Final OA Jan 20, 2023
18003894 REMOVABLE CVD POLYMER FILM FOR SURFACE PROTECTION AND QUEUE PERIOD EXTENSION PHAM, THOMAS T 1713 Final Rejection Dec 29, 2022
18013742 FRICTION STIR PROCESSING FOR CORROSION RESISTANCE STONER, KILEY SHAWN 1735 Non-Final OA Dec 29, 2022
18013768 SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE FREY, KIMBERLY NEWMAN 2817 Non-Final OA Dec 29, 2022
18013445 SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEATER ZONES WITH LOCAL THERMAL CONTROL LEE JR, WOODY A 3761 Non-Final OA Dec 28, 2022
18013429 MOVABLE DISK WITH APERTURE FOR ETCH CONTROL KENDALL, BENJAMIN R 2896 Non-Final OA Dec 28, 2022
18003137 LOW RESISTANCE GATE OXIDE METALLIZATION LINER TRAN, TIEN 2812 Final Rejection Dec 22, 2022
18002788 ATOMIC LAYER ETCHING OF A SEMICONDUCTOR, A METAL, OR A METAL OXIDE WITH SELECTIVITY TO A DIELECTRIC LAOBAK, ANDREW KEELAN 1713 Final Rejection Dec 21, 2022
18012194 IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES LAOBAK, ANDREW KEELAN 1713 Final Rejection Dec 21, 2022
18011445 Systems and Methods for Analyzing and Intelligently Collecting Sensor Data GO, RICKY 1716 Non-Final OA Dec 19, 2022
18002289 MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURES FOR BACKSIDE PROCESSING BENNETT, CHARLEE 1718 Non-Final OA Dec 19, 2022
18010990 INTERMITTENT STAGNANT FLOW MARKOFF, ALEXANDER 1711 Non-Final OA Dec 16, 2022
18009903 MATCHED CHEMISTRY COMPONENT BODY AND COATING FOR A SEMICONDUCTOR PROCESSING CHAMBER SWEELY, KURT D 1718 Final Rejection Dec 12, 2022
18001590 REMOVAL OF TIN OXIDE IN CHAMBER CLEANING LAOBAK, ANDREW KEELAN 1713 Non-Final OA Dec 12, 2022
17928747 MONOBLOC PEDESTAL FOR EFFICIENT HEAT TRANSFER WEN, KEVIN GUANHUA 3761 Non-Final OA Nov 30, 2022
17928426 PHOTOELECTRON ASSISTED PLASMA IGNITION YU, YUECHUAN 1718 Final Rejection Nov 29, 2022
17994984 Dual Gas Feed Showerhead for Deposition BENNETT, CHARLEE 1718 Final Rejection Nov 28, 2022
17927297 ATOMIC LAYER DEPOSITION COATED POWDER COATING FOR PROCESSING CHAMBER COMPONENTS KENDALL, BENJAMIN R 2896 Final Rejection Nov 22, 2022
17927328 DISTRIBUTED PLASMA SOURCE ARRAY ALEJANDRO MULERO, LUZ L 1716 Non-Final OA Nov 22, 2022
17999255 LOW RESISTIVITY CONTACTS AND INTERCONNECTS TRAN, TONY 2893 Final Rejection Nov 18, 2022
17926093 WET FUNCTIONALIZATION OF DIELECTRIC SURFACES JEFFERSON, QUOVAUNDA 2899 Non-Final OA Nov 17, 2022
17924618 EVAPORATIVE COOLING OF ELECTROSTATIC CHUCKS NUCKOLS, TIFFANY Z 1716 Non-Final OA Nov 10, 2022
17924354 MID-CHAMBER FLOW OPTIMIZER KENDALL, BENJAMIN R 2896 Final Rejection Nov 09, 2022
17998255 METHODS TO IMPROVE WAFER WETTABILITY FOR PLATING - ENHANCEMENT THROUGH SENSORS AND CONTROL ALGORITHMS CHUNG, HOSUNG CHARLES 1794 Non-Final OA Nov 08, 2022
17997802 INCREASING PLASMA UNIFORMITY IN A RECEPTACLE LEE, WILSON 2844 Non-Final OA Nov 02, 2022
17921930 BLENDED CONTACT FINGERS FOR PREVENTING CRACKS DURING THIN SUBSTRATE HANDLING CONTRERAS, CIEL P 1794 Non-Final OA Oct 27, 2022
17920111 FLOATING PCB DESIGN FOR SUBSTRATE SUPPORT ASSEMBLY NUCKOLS, TIFFANY Z 1716 Non-Final OA Oct 20, 2022
17995461 LOSS PREVENTION DURING ATOMIC LAYER DEPOSITION FAYETTE, NATHALIE RENEE 2812 Non-Final OA Oct 04, 2022
17995243 ELECTROFILL FROM ALKALINE ELECTROPLATING SOLUTIONS WITTENBERG, STEFANIE S 1795 Non-Final OA Sep 30, 2022
17995290 SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS LAOBAK, ANDREW KEELAN 1713 Non-Final OA Sep 30, 2022
17915573 EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Sep 29, 2022
17914499 SUBSTRATE SUPPORT TEMPERATURE PROBE DIAGNOSTICS AND MANAGEMENT LIN, ERICA S Y 2853 Non-Final OA Sep 26, 2022
17905754 APPARATUS AND PROCESS FOR EUV DRY RESIST SENSITIZATION BY GAS PHASE INFUSION OF A SENSITIZER WALKE, AMANDA C 1722 Final Rejection Sep 06, 2022
17905632 STRUCTURE AND METHOD TO ACHIEVE POSITIVE TONE DRY DEVELOP BY A HERMETIC OVERLAYER CHACKO DAVIS, DABORAH 1737 Final Rejection Sep 02, 2022
17905628 RING STRUCTURE WITH COMPLIANT CENTERING FINGERS SCHWENNING, LYNN E 3652 Non-Final OA Sep 02, 2022
17908587 METHOD FOR ARRANGING A SEMICONDUCTOR PROCESSING TOOL ON A PEDESTAL KIM, PAUL D 3729 Final Rejection Sep 01, 2022
17905321 CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING STEVENSON, ANDRE C 2899 Non-Final OA Aug 30, 2022
17821107 ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER HIGH SURFACE BINDING ENERGY MATERIALS NUCKOLS, TIFFANY Z 1716 Final Rejection Aug 19, 2022
17800168 PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS WITH STRUCTURAL CAPACITANCE ALEJANDRO MULERO, LUZ L 1716 Non-Final OA Aug 16, 2022
17799866 HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER LEE, AIDEN Y 1718 Non-Final OA Aug 15, 2022
17759673 ELECTROHYDRODYNAMIC EJECTION PRINTING AND ELECTROPLATING FOR PHOTORESIST-FREE FORMATION OF METAL FEATURES FORTIN, RYAN TIMOTHY 2897 Final Rejection Jul 28, 2022
17795188 SEGMENTED GAS DISTRIBUTION PLATE FOR HIGH-POWER, HIGH-PRESSURE PROCESSES ZERVIGON, RUDY 1716 Non-Final OA Jul 25, 2022
17792996 ALLOY FILM ETCH ANGUIANO, MICHAEL 2899 Final Rejection Jul 14, 2022
17790009 MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT MACARTHUR, SYLVIA 1716 Non-Final OA Jun 29, 2022
17805081 THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING BENNETT, CHARLEE 1718 Final Rejection Jun 02, 2022
17780011 SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY IN PROCESSING A SUBSTRATE SEOANE, TODD MICHAEL 1718 Final Rejection May 25, 2022
17753776 SELECTIVE GRAPHENE DEPOSITION USING REMOTE PLASMA TUROCY, DAVID P 1718 Final Rejection Mar 14, 2022
17671211 MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS MCCONNELL, AARON R 3723 Non-Final OA Feb 14, 2022
17631984 EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS MOORE, KARLA A 1716 Non-Final OA Feb 01, 2022
17612536 SHOWERHEAD INSERT FOR UNIFORMITY TUNING REYES, JOSHUA NATHANIEL PI 1718 Non-Final OA Nov 18, 2021
17605264 HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER MOORE, KARLA A 1716 Final Rejection Oct 21, 2021
17604956 ELECTROSTATIC CHUCK SYSTEM CROWELL, ANNA M 1716 Non-Final OA Oct 19, 2021
17593117 PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Sep 09, 2021
17429909 ELECTROSTATIC CHUCK WITH POWDER COATING DINH, TUAN T 2847 Non-Final OA Aug 10, 2021

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