Prosecution Insights
Last updated: April 19, 2026
Application No. 18/753,682

OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR

Non-Final OA §103
Filed
Jun 25, 2024
Examiner
TON, TRI T
Art Unit
2877
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Applied Materials, Inc.
OA Round
1 (Non-Final)
86%
Grant Probability
Favorable
1-2
OA Rounds
2y 3m
To Grant
97%
With Interview

Examiner Intelligence

Grants 86% — above average
86%
Career Allow Rate
1011 granted / 1169 resolved
+18.5% vs TC avg
Moderate +11% lift
Without
With
+10.8%
Interview Lift
resolved cases with interview
Typical timeline
2y 3m
Avg Prosecution
47 currently pending
Career history
1216
Total Applications
across all art units

Statute-Specific Performance

§101
3.9%
-36.1% vs TC avg
§103
50.4%
+10.4% vs TC avg
§102
21.7%
-18.3% vs TC avg
§112
17.0%
-23.0% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1169 resolved cases

Office Action

§103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . DETAILED ACTION Drawings 1. The drawings filed on 06/25/24. These drawings are acceptable. Claim Rejections - 35 USC § 103 2. The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102 of this title, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. 3. Claim(s) 1-2, 8-9, 15-16, 20, is/are rejected under 35 U.S.C. 103 as being unpatentable over Yamada (Pub. No. 2024/0319082 in view of Wilkens (U.S. Pat. No. 2003/0090228). Hereafter “Yamada” and “Wilkens”. Regarding Claim(s) 1, 9, 16, Yamada teaches a system/method/medium comprising: an interferometer configured to emit a laser beam ([0088], lines 3-7; figure 1, first light source 51, second light source 41 emit a laser beam. Interference optical system is not different from an interferometer); a first object coupled to a non-moving portion, the first object configured to reflect a first portion of the laser beam (figure 1, fixed mirror 34 or light reflector 442, is not different from a first object coupled to a non-moving portion, reflecting a first portion of the laser beam L1b, L2a); a second object coupled to a moving portion, the second object configured to reflect a second portion of the laser beam (figure 1, moving mirror 33 is not different from a second object coupled to a moving portion, reflecting a second portion of the laser beam L1a, L2b); and a processor to perform operations (figure 1, calculation device 7 is not different from a processor) comprising: receiving a first image comprising a plurality of first linear interference fringes corresponding to the first portion of the laser beam (figure 1, first image from fixed mirror 34, receiving element 36 receives first linear interference fringes of the laser beam L1b; [0112-0113]); determining a first characteristic of the plurality of first linear interference fringes ([0113]. A temporal change in intensity is not different from a first characteristic); receiving a second image comprising a plurality of second linear interference fringes corresponding to the second portion of the laser beam (figure 1, second image from moving mirror 33, receiving element 45 receives second linear interference fringes of laser beam L2b; [0123, 0126]); determining a second characteristic of the plurality of second linear interference fringes ([0126]. A temporal change in intensity is not different from a second characteristic); and determining, based at least in part on the first characteristic and the second characteristic, an off-axis motion of the second object in at least one direction ([0138, 0141]. “The interferogram F(x) is represented by a function of an optical path difference between reflected light from the moving mirror 33 and reflected light from the fixed mirror 34, and the optical path difference in the analysis optical system 3 is a difference between an optical path length between the beam splitter 32 and the moving mirror 33 and an optical path length between the beam splitter 32 and the fixed mirror 34”, this limitation is not different from an off-axis motion of the mirror 33 in at least one direction). However, Yamada does not teach a portion of a linear actuator. Wilkens a portion of a linear actuator ([0022, 0023]). It would have been obvious to one having ordinary skill in the art before the effective filing date of the invention was made to modify Yamada by having a portion of a linear actuator in order to monitor the movement direction of a portion of the linear actuator. Regarding Claim(s) 2, Yamada teaches at least one of a piezo linear actuator, electromagnetic linear actuator, stepper motor, servo motor, or a linear motor ([0059, 0060]). Regarding Claim(s) 8, 15, 20, Yamada teaches at least one of fitting a reference signal corresponding to the first characteristic with an objective signal corresponding to the second characteristic or applying Fourier transform to the reference signal and the objective signal ([0006, 0008, 0025, 0032, 0041, 0047, 0158, 0176, 0221, 0226, 0232, 0359, 0408, 0412, 0416, 0421, 0427]). 4. Claim(s) 3, 5, 10, 12, 17, 18, is/are rejected under 35 U.S.C. 103 as being unpatentable over Yamada (Pub. No. 2024/0319082) in view of Wilkens (U.S. Pat. No. 2003/0090228), further in view of Tiemann et al. (U.S. Pat. No. 10,578,494). Hereafter “Yamada”, “Wilkens”, “Tiemann”. Regarding Claim(s) 3, 5, 10, 12, 17, 18, Yamada teaches determining a phase of the plurality of first linear interference fringes ([0108, 0121, 0260, 0332, 0350]); determining an average period of a plurality of first interference fringes ([0130, 0291, 0319, 0320, 0368, 0369, 0370, 0373, 0388]); determining a clock angle of the first interference fringe with respect to a horizontal axis (Abstract, lines 15; [0002, 0020, 0024, 0028, 0035, 0037, 0038, 0040, 0041, 0043, 0046, 0050, 0062, 0063, 0065, 0084, 0085, 0093, 0095, 0097]); and determining a tilt or twist in the second object ([0307]). However, Yamada and Wilkens do not teach average fringe period. Tiemann teaches average fringe period (column 15, lines 26-33, 40-52). It would have been obvious to one having ordinary skill in the art before the effective filing date of the invention was made to modify Yamada and Wilkens by having average fringe period in order to calculate a coarse wavelength with an associated uncertainty in wavelength, (column 15, lines 26-33, 40-52). 5. Claim(s) 7, 14, 19, is/are rejected under 35 U.S.C. 103 as being unpatentable over Yamada (Pub. No. 2024/0319082 in view of Wilkens (U.S. Pat. No. 2003/0090228), further in view of Fitts (U.S. Pat. No. 5,175,601). Hereafter “Yamada”, “Wilkens”, “Fitts”. Regarding Claim(s) 7, 14, 19, Yamada and Wilkens teach all the limitations of claim 1 as stated above except for at least one of vertical interference fringes, horizontal interference fringes, or angular interference fringes. Fitts teaches Fitts, (column 12, lines 51-65; Column 13, lines 17-33). It would have been obvious to one having ordinary skill in the art before the effective filing date of the invention was made to modify Yamada and Wilkens by having at least one of vertical interference fringes, horizontal interference fringes, or angular interference fringes in order to implement suitable fringe patterns for inspection, (column 12, lines 51-65; Column 13, lines 17-33). Allowable Subject Matter 6. Claims 4, 6, 11, 13, are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. 7. The following is a statement of reasons for the indication of allowable subject matter: there was no prior art found by the examiner that suggested modification or combination with the cited art so as to satisfy the combination of all the limitations in claims 4, 6. 8. As claims 4, 11, the prior art of record taken alone or in combination, fails to disclose or render obvious a system/method comprising a first object coupled to a non-moving portion of a linear actuator, to reflect a first portion of the laser beam; a second object coupled to a moving portion of the linear actuator, to reflect a second portion of the laser beam; receiving a first image of first linear interference fringes corresponding to the first portion; determining a first characteristic of first linear interference fringes; receiving a second image of second linear interference fringes corresponding to the second portion; determining a second characteristic of the plurality of second linear interference fringes; based on the first characteristic and the second characteristic, an off-axis motion of the second object in at least one direction; wherein determining comprises determining a phase of linear interference fringes; an average period of interference fringes; a clock angle of the first interference fringe with respect to a horizontal axis; and determining a tilt in the second object based on the average period and the clock angle; wherein the tilt is determined using a formula: PNG media_image1.png 134 544 media_image1.png Greyscale in combination with the rest of the limitations of claims 1 and 3 and 4, or 9 and 10 and 11. 9. As claims 6, 13, the prior art of record taken alone or in combination, fails to disclose or render obvious a system/method comprising a first object coupled to a non-moving portion of a linear actuator, to reflect a first portion of the laser beam; a second object coupled to a moving portion of the linear actuator, to reflect a second portion of the laser beam; receiving a first image of first linear interference fringes corresponding to the first portion; determining a first characteristic of first linear interference fringes; receiving a second image of second linear interference fringes corresponding to the second portion; determining a second characteristic of the plurality of second linear interference fringes; based on the first characteristic and the second characteristic, an off-axis motion of the second object in at least one direction; wherein determining comprises determining a phase of linear interference fringes; an average period of interference fringes; a clock angle of the first interference fringe with respect to a horizontal axis; and determining a twist in the second object based on the average period and the clock angle; wherein the twist is determined using a formula: PNG media_image2.png 52 326 media_image2.png Greyscale PNG media_image3.png 66 542 media_image3.png Greyscale in combination with the rest of the limitations of claims 1 and 5 and 6, or 9 and 12 and 13. Fax/Telephone Information Any inquiry concerning this communication or earlier communications from the examiner should be directed to TRI T TON whose telephone number is (571)272-9064. The examiner can normally be reached on 8am-4pm. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michelle Iacoletti can be reached on (571)270-5789. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://pair-direct.uspto.gov. Should you have questions on access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative or access to the automated information system, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
Read full office action

Prosecution Timeline

Jun 25, 2024
Application Filed
Feb 05, 2026
Non-Final Rejection — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
86%
Grant Probability
97%
With Interview (+10.8%)
2y 3m
Median Time to Grant
Low
PTA Risk
Based on 1169 resolved cases by this examiner. Grant probability derived from career allow rate.

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