Prosecution Insights
Last updated: October 01, 2026
Application No. 18/771,095

BACKSIDE STRUCTURE FOR IMAGE SENSOR

Non-Final OA §DP
Filed
Jul 12, 2024
Priority
Apr 27, 2021 — provisional 63/180,359 +1 more
Examiner
BELOUSOV, ALEXANDER
Art Unit
Tech Center
Assignee
Taiwan Semiconductor Manufacturing Company, Ltd.
OA Round
1 (Non-Final)
77%
Grant Probability
Favorable
1-2
OA Rounds
8m
Est. Remaining
93%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allowance Rate
402 granted / 525 resolved
+16.6% vs TC avg
Strong +16% interview lift
Without
With
+16.3%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
29 currently pending
Career history
548
Total Applications
across all art units

Statute-Specific Performance

§101
0.1%
-39.9% vs TC avg
§103
61.7%
+21.7% vs TC avg
§102
24.9%
-15.1% vs TC avg
§112
12.2%
-27.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 525 resolved cases

Office Action

§DP
DETAILED ACTION Allowable Subject Matter Claims 1-20 are allowed. The following is an examiner’s statement of reasons for allowance (once the double patenting rejection is overcome). Claim 1 recites in part “between the first image sensing element and the second image sensing element, a trench filling layer surrounded by an isolation dielectric stack, wherein the isolation dielectric stack comprises an isolation dielectric liner directly contacting the first high-k dielectric layer with a topmost surface higher than a topmost surface of the first high-k dielectric layer”. Claim 17 recites in part “wherein the first high-k dielectric layer is disposed along bottom and sidewall surfaces of the trench filling layer and extends upwardly to cover a lateral surface of the image sensing element; and a second high-k dielectric layer disposed on a topmost surface of the first high-k dielectric layer and a topmost surface of the trench filling layer”. Claim 19 recites in part “a first high-k dielectric layer and an isolation dielectric liner disposed along bottom and sidewall surfaces of the deep trench, wherein the first high-k dielectric layer extends upwardly along a lateral surface of the first image sensing element and the second image sensing element; a trench filling layer disposed in an inner space of the deep trench; and a second high-k dielectric layer disposed directly on a topmost surface of the trench filling layer”. The instant case is a child case of S/N 17/384,956. Claims 1, 17 and 19 contain almost identical key limitations (cited above) to those recited in parent case (claims 1, 16 & 21) and are therefore indicated as allowable for virtually same reasons (see NOA in S/N 17/384,956, dated 04/05/24). Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.” Double Patenting The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969). A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b). The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13. The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer. Claims 1 & 17 are rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1 & 16 of prior U.S. Patent No. 12062679. Although the claims at issue are not identical, they are not patentably distinct from each other because: An image sensor, comprising: a first image sensing element and a second image sensing element arranged next to one another within an image sensing die; An image sensor, comprising: an image sensing die having a front and a back opposite to the front; a first image sensing element and a second image sensing element arranged next to one another within the image sensing die; a pixel dielectric stack overlying the first image sensing element and the second image sensing element, wherein the pixel dielectric stack comprises a first high-k dielectric layer and a second high-k dielectric layer disposed over the first high-k dielectric layer; and a pixel dielectric stack … overlying the first image sensing element and the second image sensing element, wherein the pixel dielectric stack comprises a first high-k dielectric layer and a second high-k dielectric layer disposed over the first high-k dielectric layer… between the first image sensing element and the second image sensing element, a trench filling layer surrounded by an isolation dielectric stack, wherein the isolation dielectric stack comprises an isolation dielectric liner directly contacting the first high-k dielectric layer with a topmost surface higher than a topmost surface of the first high-k dielectric layer. a backside deep trench isolation (BDTI) structure disposed between the first image sensing element and the second image sensing element … wherein the BDTI structure comprises a trench filling layer surrounded by an isolation dielectric stack, wherein the isolation dielectric stack comprises an isolation dielectric liner directly contacting the first high-k dielectric layer with a topmost surface higher than a topmost surface of the first high-k dielectric layer.... 17. An image sensor, comprising: an image sensing element disposed within an image sensing die; 16. An image sensor, comprising …; an image sensing element disposed within the image sensing die, …; a backside deep trench isolation (BDTI) structure surrounding the image sensing element and comprising a trench filling layer surrounded by a first high-k dielectric layer, a backside deep trench isolation (BDTI) structure surrounding the image sensing element …, wherein the BDTI structure comprises a trench filling layer surrounded by a first high-k dielectric layer, wherein the first high-k dielectric layer is disposed along bottom and sidewall surfaces of the trench filling layer and extends upwardly to cover a lateral surface of the image sensing element; and a second high-k dielectric layer disposed on a topmost surface of the first high-k dielectric layer and a topmost surface of the trench filling layer wherein the first high-k dielectric layer is disposed along bottom and sidewall surfaces of the trench filling layer and extends upwardly to cover a lateral surface of the image sensing element; and a second high-k dielectric layer disposed on the first high-k dielectric layer and extended in lateral crossing a topmost surface of the trench filling layer. Conclusion Additional references (if any) are cited on the PTO-892 as disclosing similar features to those of the instant invention. Any inquiry concerning this communication or earlier communications from the examiner should be directed to Alexander Belousov whose telephone number is (571)-272-3167. The examiner can normally be reached on 10 am-4 pm. If attempts to reach the examiner by telephone are unsuccessful, the examiner's supervisor, Jeff Natalini can be reached on 571-272-2266. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://pair-direct.uspto.gov. Should you have questions on access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative or access to the automated information system, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /Alexander Belousov/Patent Examiner, Art Unit 2894 09/05/26 /JEFF W NATALINI/Supervisory Patent Examiner, Art Unit 2818
Read full office action

Prosecution Timeline

Jul 12, 2024
Application Filed
Sep 15, 2026
Non-Final Rejection mailed — §DP (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12751083
HYBRID CELL HEIGHT DESIGN WITH A BACKSIDE POWER DISTRIBUTION NETWORK
3y 9m to grant Granted Sep 29, 2026
Patent 12740155
BACKSIDE CONDUCTING LINES IN INTEGRATED CIRCUITS
2y 5m to grant Granted Sep 15, 2026
Patent 12733277
LIGHT SHIELD FOR PIXEL OF IMAGE SENSOR
3y 5m to grant Granted Sep 08, 2026
Patent 12733271
ANTI-BLOOMING CONTROL IN OVERFLOW IMAGE SENSOR PIXEL
3y 8m to grant Granted Sep 08, 2026
Patent 12720881
BACK SIDE ILLUMINATED IMAGE SENSOR WITH REDUCED SIDEWALL-INDUCED LEAKAGE
2y 6m to grant Granted Aug 25, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
77%
Grant Probability
93%
With Interview (+16.3%)
2y 11m (~8m remaining)
Median Time to Grant
Low
PTA Risk
Based on 525 resolved cases by this examiner. Grant probability derived from career allowance rate.

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