Prosecution Insights
Last updated: July 17, 2026
Application No. 18/788,133

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR

Non-Final OA
Filed
Jul 30, 2024
Priority
Jul 11, 2022 — divisional of 17/811,876
Examiner
MOORE, KARLA A
Art Unit
1716
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Taiwan Semiconductor Manufacturing Company, Ltd.
OA Round
1 (Non-Final)
43%
Grant Probability
Moderate
1-2
OA Rounds
2y 2m
Est. Remaining
57%
With Interview

Examiner Intelligence

Grants 43% of resolved cases
43%
Career Allowance Rate
335 granted / 777 resolved
-21.9% vs TC avg
Moderate +14% lift
Without
With
+13.9%
Interview Lift
resolved cases with interview
Typical timeline
4y 1m
Avg Prosecution
53 currently pending
Career history
848
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
74.3%
+34.3% vs TC avg
§102
4.3%
-35.7% vs TC avg
§112
15.6%
-24.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 777 resolved cases

Prosecution Timeline

Jul 30, 2024
Application Filed
Mar 25, 2026
Non-Final Rejection mailed
Jun 11, 2026
Examiner Interview Summary
Jun 11, 2026
Applicant Interview (Telephonic)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12668877
UNIFORM DEPOSITION
6y 8m to grant Granted Jun 30, 2026
Patent 12603260
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
3y 5m to grant Granted Apr 14, 2026
Patent 12588451
BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM
5y 11m to grant Granted Mar 24, 2026
Patent 12580165
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR MEASURING DEGREE OF WEAR OF CONSUMABLE COMPONENT
4y 5m to grant Granted Mar 17, 2026
Patent 12575357
INTEGRATED WET CLEAN FOR GATE STACK DEVELOPMENT
3y 8m to grant Granted Mar 10, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
43%
Grant Probability
57%
With Interview (+13.9%)
4y 1m (~2y 2m remaining)
Median Time to Grant
Low
PTA Risk
Based on 777 resolved cases by this examiner. Grant probability derived from career allowance rate.

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