Prosecution Insights
Last updated: October 02, 2026
Application No. 18/810,102

POST-CHEMICAL MECHANICAL POLISHING CLEANING COMPOSITION, POST-CHEMICAL MECHANICAL POLISHING AND CLEANING TREATMENT METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

Non-Final OA §102§103
Filed
Aug 20, 2024
Priority
Sep 27, 2023 — JP 2023-165941
Examiner
AHMED, SHAMIM
Art Unit
Tech Center
Assignee
Fujimi Incorporated
OA Round
1 (Non-Final)
78%
Grant Probability
Favorable
1-2
OA Rounds
7m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 78% — above average
78%
Career Allowance Rate
955 granted / 1218 resolved
+18.4% vs TC avg
Strong +22% interview lift
Without
With
+22.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
52 currently pending
Career history
1258
Total Applications
across all art units

Statute-Specific Performance

§101
0.6%
-39.4% vs TC avg
§103
55.4%
+15.4% vs TC avg
§102
13.7%
-26.3% vs TC avg
§112
18.8%
-21.2% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1218 resolved cases

Office Action

§102 §103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Group I, claims 1-5, along with the species of component (A) of polyvinyl alcohol (PVA) and component (B) of hexamethylenetetramine, in the reply filed on 7/22/2026 is acknowledged. Specification The abstract of the disclosure is objected to because the current abstract is in multiple paragraphs. A corrected abstract of the disclosure is required and must be presented on a separate sheet, apart from any other text. See MPEP § 608.01(b). Applicant is reminded of the proper language and format for an abstract of the disclosure. The abstract should be in narrative form and generally limited to a single paragraph on a separate sheet within the range of 50 to 150 words in length. The abstract should describe the disclosure sufficiently to assist readers in deciding whether there is a need for consulting the full patent text for details. The language should be clear and concise and should not repeat information given in the title. It should avoid using phrases which can be implied, such as, “The disclosure concerns,” “The disclosure defined by this invention,” “The disclosure describes,” etc. In addition, the form and legal phraseology often used in patent claims, such as “means” and “said,” should be avoided. Claim Rejections - 35 USC § 102 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 1-2 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Schaefer et al (US 2022/0064577). Regarding claims 1-2, Schaefer et al disclose a post-CMP cleaning composition [0005], wherein the composition comprising at least one pH adjusting agent; where the composition has a pH of from about 1 to about 14 [0007]; and selected form alkanolamines (e.g., monoethanolamine, diethanolamine, triethanolamine, methylethanolamine [0018]; and aforesaid at least the “triethanolamine” corresponds to the claimed component (B) a compound having an amino group and a hydroxyl group. Schaefer et al also disclose that the cleaning composition further comprises a polymer, such as polyvinyl alcohol (PVA) [0040]; and which PVA corresponds to the claimed component (A). Claim Rejections - 35 USC § 103 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. This application currently names joint inventors. In considering patentability of the claims the examiner presumes that the subject matter of the various claims was commonly owned as of the effective filing date of the claimed invention(s) absent any evidence to the contrary. Applicant is advised of the obligation under 37 CFR 1.56 to point out the inventor and effective filing dates of each claim that was not commonly owned as of the effective filing date of the later invention in order for the examiner to consider the applicability of 35 U.S.C. 102(b)(2)(C) for any potential 35 U.S.C. 102(a)(2) prior art against the later invention. Claim(s) 1-5 is/are rejected under 35 U.S.C. 103 as being unpatentable over Tamboli (US 2019/0390139) in view of Wojtczak et al (WO 98/30667). Regarding claim 1, Tamboli discloses a post-CMP cleaning formulation (composition) [0046] comprises a polymeric additive, water and optionally a surfactant, corrosion inhibitors, biological preservatives, defoaming agent; pH adjusting agents [0047]; the cleaning composition may comprise a water-soluble polymeric additive. Polymer may be a homopolymer or copolymer. The polymer may contain positively charged species (cationic polymer), negatively charged groups (anionic polymers), nonionic groups (nonionic polymers); and the polymer may comprise polyvinyl alcohol [0050]; and aforesaid polyvinyl alcohol reads on the claimed “component (A)”. Tamboli discloses that the pH of the formulation is preferably between 1 and 7 [0058]; and the claimed limitation of the pH of more than 7 is obvious over the pH value of 7 taught by the Tamboli because they are close enough that one of ordinary skill in the art would have expected them to have the same properties. See MPEP 2144.05.I. Unlike the instant invention, Tamboli fails to disclose that the cleaning composition further comprises a component (B) (elected species of hexamethylenetetramine). However, in the same field of endeavor, Wojtczak et al disclose a cleaning formulation (composition) comprises an organic amine (abstract, and see the summary of the invention at pages 1-2), wherein the amine comprises triethanolamine (TEA) and other amines are effectively used such as “hexamethylenetetramine” (page 2-3, specifically, page 3, line 5), wherein the triethanolamine reads on the claimed component (B), wherein a compound having an amino group and a hydroxyl group. It is noted that “hexamethylenetetramine” is the elected species of the component (B). Therefore, it would have been obvious to one of ordinary skill in the art before the effective filing date of the claimed invention to employ Wojtczak et al's teaching of introducing the organic amines into the teaching of Tamboli for effective cleaning the post-CMP residue as suggested by Wojtczak et al. Regarding claim 2, Tamboli discloses above for the claim 1 and disclose that the polymer may comprise polyvinyl alcohol [0050], which corresponds to the claimed component (A). Regarding claim 3, Wojtczak et al disclose above for the claim 1 and disclose that the amine comprises triethanolamine (TEA) and other amines are effectively used such as “hexamethylenetetramine” (page 2-3, specifically, page 3, line 5), which corresponds to the claimed component (B). Regarding claim 4, Tamboli discloses above that the composition comprises pH adjusting agents [0047]; but nowhere discloses the introduction of a buffer representing by the formula: A-COO-NH4+, the composition of Tamboli is free of such buffer. Regarding claim 5, Tamboli discloses above or the claim 1 and also disclose that the composition the cleaning chemistry may contain biological growth inhibitors include but are not limited to tetramethylammonium chloride, tetraethylammonium chloride, tetrapropylammonium chloride, alkylbenzyldimethylammonium chloride, and alkylbenzyldimethylammonium hydroxide, wherein the alkyl chain ranges from 1 to about 20 carbon atoms, sodium chlorite, sodium hypochlorite, isothiazolinone compounds such as methylisothiazolinone, methylchloroisothiazolinone and benzisothiazolinone [0081]; aforesaid teaching reads on the claimed antiseptic agent. Conclusion The prior art made of record, listed in the PTO-892 and not relied upon is considered pertinent to applicant's disclosure. Any inquiry concerning this communication or earlier communications from the examiner should be directed to SHAMIM AHMED whose telephone number is (571)272-1457. The examiner can normally be reached M-TH (8-5:30pm). Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Joshua Allen can be reached at 571-270-3176. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. SHAMIM AHMED Primary Examiner Art Unit 1713 /SHAMIM AHMED/ Primary Examiner, Art Unit 1713
Read full office action

Prosecution Timeline

Aug 20, 2024
Application Filed
Sep 02, 2026
Non-Final Rejection mailed — §102, §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12745611
SUBSTRATE PROCESSING METHOD AND APPARATUS
3y 11m to grant Granted Sep 22, 2026
Patent 12745608
ENDPOINT DETECTION IN LOW OPEN AREA AND/OR HIGH ASPECT RATIO ETCH APPLICATIONS
2y 2m to grant Granted Sep 22, 2026
Patent 12745583
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
2y 1m to grant Granted Sep 22, 2026
Patent 12735605
POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESSING,METHOD FOR PREPARING POLISHING COMPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT TO WHICH POLISHING COMPOSITION IS APPLIED
3y 3m to grant Granted Sep 15, 2026
Patent 12729340
SILICON NITRIDE ETCHING LIQUID COMPOSITION
5y 0m to grant Granted Sep 08, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2
Expected OA Rounds
78%
Grant Probability
99%
With Interview (+22.2%)
2y 9m (~7m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1218 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month