Last updated: August 17, 2026

Application No. 18/847,897

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Non-Final OA

Filed

Sep 17, 2024

Priority

Mar 29, 2022 — JP 2022-054095 +1 more

Examiner

DEO, DUY VU NGUYEN

Art Unit

Tech Center

Assignee

Tokyo Electron Limited

OA Round

1 (Non-Final)

Interview Optional

— +7.0% interview lift. Interview lift (+7.0%) is below the 15.0% threshold. A written response is recommended.

Based on 1042 resolved cases, 2023–2026

Examiner Intelligence

DEO, DUY VU NGUYEN View full profile →

Grants 82% — above average

Career Allowance Rate

859 granted / 1042 resolved

+22.4% vs TC avg

Moderate +7% lift

Without

With

+7.0%

Interview Lift

resolved cases with interview

Typical timeline

2y 4m

Avg Prosecution

33 currently pending

Career history

1058

Total Applications

across all art units

Statute-Specific Performance

§101

0.4%

-39.6% vs TC avg

§103

44.7%

+4.7% vs TC avg

§102

26.9%

-13.1% vs TC avg

§112

13.7%

-26.3% vs TC avg

Black line = Tech Center average estimate • Based on career data from 1042 resolved cases

Prosecution Timeline

Sep 17, 2024

Application Filed

Jul 29, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/436,248

Patent 12707936

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

2y 6m to grant Granted Aug 11, 2026

18/689,825

Patent 12700567

MULTI-STATE RF PULSING IN CYCLING RECIPES TO REDUCE CHARGING INDUCED DEFECTS

2y 5m to grant Granted Aug 04, 2026

18/347,683

Patent 12696696

DIELECTRIC DENSIFICATION

3y 0m to grant Granted Jul 28, 2026

18/463,754

Patent 12696702

COMPOSITION FOR TREATING SEMICONDUCTOR AND METHOD FOR TREATING OBJECT TO BE TREATED

2y 10m to grant Granted Jul 28, 2026

17/973,903

Patent 12665171

METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A SUBSTRATE

3y 8m to grant Granted Jun 23, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

82%

Grant Probability

89%

With Interview (+7.0%)

2y 4m (~5m remaining)

Median Time to Grant

Low

PTA Risk

Based on 1042 resolved cases by this examiner. Grant probability derived from career allowance rate.