Prosecution Insights
Last updated: October 02, 2026
Application No. 18/867,900

METHOD FOR PRODUCING HETEROEPITAXIAL WAFER

Non-Final OA §103§DOUBLEPATENT
Filed
Nov 21, 2024
Priority
Jun 14, 2022 — JP 2022-095410 +1 more
Examiner
KUNEMUND, ROBERT M
Art Unit
1714
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Shin-Etsu Chemical Co., Ltd.
OA Round
1 (Non-Final)
82%
Grant Probability
Favorable
1-2
OA Rounds
1y 0m
Est. Remaining
95%
With Interview

Examiner Intelligence

Grants 82% — above average
82%
Career Allowance Rate
1100 granted / 1341 resolved
+17.0% vs TC avg
Moderate +13% lift
Without
With
+13.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
35 currently pending
Career history
1359
Total Applications
across all art units

Statute-Specific Performance

§101
0.9%
-39.1% vs TC avg
§103
66.8%
+26.8% vs TC avg
§102
12.0%
-28.0% vs TC avg
§112
10.3%
-29.7% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1341 resolved cases

Office Action

§103 §DOUBLEPATENT
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969). A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b). The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13. The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer. Claims 8 to 23 provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 10,14 and 20 to 22 of copending Application No. 18/707,810 (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because the sole difference between the instant claims and the copending claims in the nucleation gas. However, it would have been obvious to one of ordinary skill in the art to modify the copending application to use a carbon only gas in the nucleation step in order to increase control over the nucleation reaction and sites controlling the growth, noting the parameters for this step are similar.. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. Claims 8 to 23 provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 12 to 26 of copending Application No. 18/692,926 (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because the sole difference between the instant claims and the copending claims in the nucleation gas. However, it would have been obvious to one of ordinary skill in the art to modify the copending application to use a carbon only gas in the nucleation step in order to increase control over the nucleation reaction and sites controlling the growth, noting the parameters for this step are similar.. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. Claims 8 to 23 provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1 to 14 of copending Application No. 18/695,073 (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because the sole difference between the instant claims and the copending claims in the nucleation gas. However, it would have been obvious to one of ordinary skill in the art to modify the copending application to use a carbon only gas in the nucleation step in order to increase control over the nucleation reaction and sites controlling the growth, noting the parameters for this step are similar.. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. This application currently names joint inventors. In considering patentability of the claims the examiner presumes that the subject matter of the various claims was commonly owned as of the effective filing date of the claimed invention(s) absent any evidence to the contrary. Applicant is advised of the obligation under 37 CFR 1.56 to point out the inventor and effective filing dates of each claim that was not commonly owned as of the effective filing date of the later invention in order for the examiner to consider the applicability of 35 U.S.C. 102(b)(2)(C) for any potential 35 U.S.C. 102(a)(2) prior art against the later invention. Claim(s) 8 to 15 is/are rejected under 35 U.S.C. 103 as being unpatentable over Jp 4313000 in view of GB 2540608 and Won et al (KR 20130142415). The Jp 4313000 reference teaches a method of growing a silicon carbide layer, note entire translation. The base layer is a silicon substrate, which is first cleaned to remove any native oxides, para 0023. Then a first layer of silicon carbide is deposited onto the silicon substrate at a temperature below 950c, note para 0015. Then a second layer of silicon carbide is deposited by chemical vapor deposition onto the first layer and substrate at a high temperature, note, para 0016. The differences between the instant claim and the prior art are the deposition pressure and separation of the grown layers. However, GB 2540608 reference teaches using low pressures under the limit claimed to deposit silicon carbide, note page 1. The Won et al reference teaches growing a nucleation site using only a carbon source and reacting with the silicon, note translation, page 3 and then growing 3c-SiC. It would have been obvious to one of ordinary skill in the art before the filing date of the instant invention to modify the Jp 4313000 reference by the teachings of the GB 2540608 and Won et al references to deposit at lower pressures and use only carbon source in order to create silicon carbide wafer for further uses in device formations with desired lattices 3C-SiC. With regards to claim 9, the Won et al reference teaches a carbon source which can include acetylene, note page 2. With regards to claims 10 and 11, the Jp 4313000 reference teaches monomethyl silane, note para 0007. With regards to claims 12 to 15 the Jp 4313000 reference teaches oxide removal step in hydrogen at a temperature of 1000c note para 0023. Claim(s) 16 to 23 is/are rejected under 35 U.S.C. 103 as being unpatentable over Jp 4313000 in view of GB 2540608 and Won et al . The Jp 4313000, GB 2540608 and Won et al references are relied on for the same reasons as stated, supra, and differ from the instant claims in the temperature change during the second and third steps. However, it would have been obvious to one of ordinary skill in the art before the filing date of the instant invention to determine through routine experimentation the optimum, operable temperature increase during the second and third steps in the combined references as the temperatures are within the range of the art in order to increase deposition rates after nucleation. Examiner’s Remarks The remaining references are merely cited of interest as showing the state of the art in SiC growth. Any inquiry concerning this communication or earlier communications from the examiner should be directed to ROBERT M KUNEMUND whose telephone number is (571)272-1464. The examiner can normally be reached M-F 8:00 am to 4:30 pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Kaj Olsen can be reached at 571-272-1344. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. RMK /ROBERT M KUNEMUND/Primary Examiner, Art Unit 1714
Read full office action

Prosecution Timeline

Nov 21, 2024
Application Filed
Aug 19, 2026
Non-Final Rejection mailed — §103, §DOUBLEPATENT (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12742254
METHOD FOR EVALUATING QUARTZ GLASS CRUCIBLE, METHOD FOR MANUFACTURING THE SAME, AND QUARTZ GLASS CRUCIBLE
3y 0m to grant Granted Sep 22, 2026
Patent 12735806
METHOD FOR SIC STEP FLOW GROWTH BY REGULATING GROWTH MONMOERS USING CHEMICAL POTENTIAL UNDER NON-EQUILIBRIUM CONDITION
2y 7m to grant Granted Sep 15, 2026
Patent 12735801
NANOWIRES NETWORK
2y 10m to grant Granted Sep 15, 2026
Patent 12735804
CERAMIC SUPPORT PLATE
2y 6m to grant Granted Sep 15, 2026
Patent 12729455
Method of producing a crystal for a scintillation crystal detector and a crystal for a scintillation crystal detector
2y 9m to grant Granted Sep 08, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2
Expected OA Rounds
82%
Grant Probability
95%
With Interview (+13.2%)
2y 11m (~1y 0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1341 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month