Prosecution Insights
Last updated: April 19, 2026
Application No. 18/885,134

Plasma Source and Plasma Processing Apparatus

Non-Final OA §112
Filed
Sep 13, 2024
Examiner
SATHIRAJU, SRINIVAS
Art Unit
2844
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Tokyo Electron Limited
OA Round
1 (Non-Final)
89%
Grant Probability
Favorable
1-2
OA Rounds
2y 2m
To Grant
94%
With Interview

Examiner Intelligence

Grants 89% — above average
89%
Career Allow Rate
715 granted / 806 resolved
+20.7% vs TC avg
Moderate +5% lift
Without
With
+5.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 2m
Avg Prosecution
30 currently pending
Career history
836
Total Applications
across all art units

Statute-Specific Performance

§101
2.1%
-37.9% vs TC avg
§103
43.6%
+3.6% vs TC avg
§102
17.6%
-22.4% vs TC avg
§112
16.7%
-23.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 806 resolved cases

Office Action

§112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Drawings The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the Matching circuit to the ignition power as claimed in claims 2, 16 are not shown in the drawings, must be shown or the feature(s) canceled from the claim(s). No new matter should be entered. Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 2, 6, 8, and 11 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Referring to claims 2. 16 the impedance matching device claimed in the claim limitations is not a shown in drawings but a resonator was shown. Also, specification has failed to discuss the circuitry of the matching supply and It is not clear how a matching device can be accommodated whereas in the disclosure it was termed as a resonator. Therefore, It is not clear to the examiner on how to interpret this limitation as both different circuitry. Hence, examiner rejecting claim 2, and depending claims 6, 8, 11 and independent claim 16 and depending claims 17-20 on indefiniteness. However, examiner suggests to remove this limitation and suggest to keep the resonator limitation as there is support for resonator in the specification as well as drawings. Allowable Subject Matter Claims 1, 3-5, 7, 9, 10, 12-15 are allowed. The following is a statement of reasons for the indication of allowable subject matter: Referring to claim 1, the closest prior art of record fails to teach or reasonably suggest a plasma source comprising: an ignition power supply port disposed in the housing to supply a radio-frequency (RF) power for igniting the plasma in the plasma generation space; and a maintenance power supply port disposed in the housing to supply the RF power for maintaining the plasma ignited in the plasma generation space. It is non-obvious to a person with ordinary skill. Hence, claim 1 and depending claims 3-5, 7, 9, 10, 12-14 are allowed. Referring to claim 15, the closest prior art of record fails to teach or reasonably suggest a plasma source comprising: A plasma processing apparatus comprising: an ignition power supply port disposed in the housing to supply an RF power for igniting the plasma in the plasma generation space; and a maintenance power supply port disposed in the housing to supply an RF power for maintaining the plasma ignited in the plasma generation space. Hence, claim 15 is allowed. Conclusion Claims 1, 3-5, 7, 9, 10, 12-15 are allowed. Claims 2, 6, 8, 11, 16-20 are rejected. Any inquiry concerning this communication or earlier communications from the examiner should be directed to SRINIVAS SATHIRAJU whose telephone number is (571)272-4250. The examiner can normally be reached 8:30AM-5.30 PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Regis J Betsch can be reached at 571-270-7101. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /SRINIVAS SATHIRAJU/Examiner, Art Unit 2844 02/07/2026
Read full office action

Prosecution Timeline

Sep 13, 2024
Application Filed
Feb 07, 2026
Non-Final Rejection — §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12603248
PLASMA PROCESSING APPARATUS
2y 5m to grant Granted Apr 14, 2026
Patent 12604387
PLASMA CONFINEMENT SYSTEM AND METHODS FOR USE
2y 5m to grant Granted Apr 14, 2026
Patent 12598689
ROTATING CORE PLASMA COMPRESSION SYSTEM
2y 5m to grant Granted Apr 07, 2026
Patent 12598691
BEAM TRANSPORT SYSTEM AND METHOD, ACCELERATOR INCLUDING BEAM TRANSPORT SYSTEM, AND ION SOURCE INCLUDING THE ACCELERATOR
2y 5m to grant Granted Apr 07, 2026
Patent 12592362
PLASMA PROCESSING APPARATUS
2y 5m to grant Granted Mar 31, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
89%
Grant Probability
94%
With Interview (+5.2%)
2y 2m
Median Time to Grant
Low
PTA Risk
Based on 806 resolved cases by this examiner. Grant probability derived from career allow rate.

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