Last updated: July 17, 2026

Application No. 18/983,055

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR SETTING AND ADJUSTING PARAMETERS OF ELECTRODES IN ELECTROSTATIC CHUCKS

Non-Final OA

Filed

Dec 16, 2024

Priority

Aug 02, 2018 — continuation of 11/183,368 +1 more

Examiner

SATHIRAJU, SRINIVAS

Art Unit

2844

Tech Center

2800 — Semiconductors & Electrical Systems

Assignee

Lam Research Corporation

OA Round

1 (Non-Final)

Interview Optional

— +6.1% interview lift. Interview lift (+6.1%) is below the 15.0% threshold. A written response is recommended.

Based on 820 resolved cases, 2023–2026

Examiner Intelligence

SATHIRAJU, SRINIVAS View full profile →

Grants 89% — above average

Career Allowance Rate

728 granted / 820 resolved

+20.8% vs TC avg

Moderate +6% lift

Without

With

+6.1%

Interview Lift

resolved cases with interview

Fast prosecutor

2y 0m

Avg Prosecution

35 currently pending

Career history

848

Total Applications

across all art units

Statute-Specific Performance

§101

1.3%

-38.7% vs TC avg

§103

62.6%

+22.6% vs TC avg

§102

9.9%

-30.1% vs TC avg

§112

10.0%

-30.0% vs TC avg

Black line = Tech Center average estimate • Based on career data from 820 resolved cases

Prosecution Timeline

Dec 16, 2024

Application Filed

Apr 29, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/535,724

Patent 12683123

PULSED VOLTAGE WAVEFORM BIASING OF PLASMA

2y 7m to grant Granted Jul 14, 2026

18/884,116

Patent 12684673

LIGHTING SYSTEM

1y 10m to grant Granted Jul 14, 2026

18/963,894

Patent 12683124

SUBSTRATE PROCESSING APPARATUS USING PLASMA PHASE SHIFT

1y 7m to grant Granted Jul 14, 2026

18/617,334

Patent 12676293

Plasma Processing Apparatus and Plasma Control Method

2y 3m to grant Granted Jul 07, 2026

18/770,268

Patent 12676290

PLASMA GENERATOR AND METHOD OF USING SAME

1y 12m to grant Granted Jul 07, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

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Prosecution Projections

1-2

Expected OA Rounds

89%

Grant Probability

95%

With Interview (+6.1%)

2y 0m (~5m remaining)

Median Time to Grant

Low

PTA Risk

Based on 820 resolved cases by this examiner. Grant probability derived from career allowance rate.