Prosecution Insights
Last updated: October 25, 2026
Application No. 19/062,941

OPTICAL METHOD TO ENHANCE DETECTION VISIBILITY USING BRIGHT EMISSIVE PROBE

Non-Final OA §103
Filed
Feb 25, 2025
Priority
May 10, 2024 — provisional 63/645,179
Examiner
GUNBERG, EDWIN C
Art Unit
2884
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
KLA Corporation
OA Round
1 (Non-Final)
78%
Grant Probability
Favorable
1-2
OA Rounds
9m
Est. Remaining
85%
With Interview

Examiner Intelligence

Grants 78% — above average
78%
Career Allowance Rate
498 granted / 637 resolved
+10.2% vs TC avg
Moderate +7% lift
Without
With
+6.9%
Interview Lift
resolved cases with interview
Typical timeline
2y 5m
Avg Prosecution
24 currently pending
Career history
672
Total Applications
across all art units

Statute-Specific Performance

§101
2.7%
-37.3% vs TC avg
§103
54.1%
+14.1% vs TC avg
§102
25.9%
-14.1% vs TC avg
§112
14.7%
-25.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 637 resolved cases

Office Action

§103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows: 1. Determining the scope and contents of the prior art. 2. Ascertaining the differences between the prior art and the claims at issue. 3. Resolving the level of ordinary skill in the pertinent art. 4. Considering objective evidence present in the application indicating obviousness or nonobviousness. Claims 1-8, 10-18, and 20-27 are rejected under 35 U.S.C. 103 as being unpatentable over Chen et al. (2023/0408422) in view of Dsouza et al., “Fluorescent Dyes and Their Supramolecular Host/Guest Complexes with Macrocycles in Aqueous Solution” (cited by Applicant) Regarding claim 1, Chen teaches an inspection system (100) comprising: an illumination source (102) configured to generate one or more illumination beams (104); a set of optical elements (110) configured to direct the illumination beam (104) to a surface of a substrate (106), wherein the substrate comprises a first substrate material (202), a photoluminescent material (212) configured to bind to the first substrate material (202) to enhance a feature of interest on the substrate (106) comprising: a photoluminescent compound comprising a fluorophore; one or more detectors (112) configured to detect photoluminescent emission (120) emitted by the photoluminescent material (212) bound to the first substrate material (202); the set of optical elements (122) configured to direct the photoluminescent emission (120) from the photoluminescent material to the first substrate material (106) to the detectors (112) (see paragraphs [0020]-[0051], [0059] and figures 1-2C, 4). Chen lacks explicit teaching of a photoluminescent material of a substrate comprises an intermolecular blocking agent configured to hinder quenching of a fluorophore caused by intermolecular interaction with another fluorophore. Dsouza teaches the incorporation of an intermolecular blocking agent used to inhibit quenching (increasing fluorescence intensity) in phosphorescent molecules (Dsouza, Table 2, entries where Ibound / Ifree > 1) It would have been obvious to one of ordinary skill in the art before the filing date of the claimed invention to incorporate the intermolecular blocking agent of Dsouza into the inspection system of Chen in order to increase brightness and therefore detectability of the photoluminescent material. Regarding claim 2, the combination of Chen and Dsouza further teaches the substrate comprises a second substrate material, wherein the first substrate material is different from the second substrate material, wherein the photoluminescent material is configured to bind selectively to the first substrate material. (Chen, [0046]) Regarding claim 3, the combination of Chen and Dsouza further teaches the intermolecular blocking agent comprises at least one of an intermolecular blocking compound or an intermolecular blocking moiety linked to the photoluminescent compound. (Dsouza, p. 7962, second column, under the heading “4. Macrocycle – Dye Interactions”) Regarding claim 4, the combination of Chen and Dsouza further teaches the photoluminescent material comprises a caged intermolecular blocking compound, wherein the caged intermolecular blocking compound comprises at least one of a catenane, a rotaxane, a dendrimer, a nanocarrier, a coordination cage, a metal-organic framework, or a cyclodextrin. (Dsouza, at least p. 7952, second column, “3.1. Cyclodextrins”) Regarding claim 5, the combination of Chen and Dsouza further teaches the photoluminescent material comprises a caged intermolecular blocking compound, wherein the caged intermolecular blocking compound comprises at least one of a catenane, a rotaxane, a dendrimer, a nanocarrier, a coordination cage, a metal-organic framework, or a cyclodextrin. (Dsouza, at least p. 7952, second column, “3.1. Cyclodextrins”) Regarding claim 6, the combination of Chen and Dsouza further teaches the caged intermolecular blocking compound comprises cyclodextrin. (Dsouza, at least p. 7952, second column, “3.1. Cyclodextrins”) Regarding claim 7, the combination of Chen and Dsouza further teaches the substrate comprises a semiconductor wafer. (Chen, [0034]) Regarding claim 8, the combination of Chen and Dsouza further teaches the photoluminescent compound comprises 4-(5-phenyloxazol-2-yl)phenylpropionic acid (DPOA). (Dsouza, p. 7949, first column, only paragraph) Regarding claim 10, the combination of Chen and Dsouza further teaches the photoluminescent compound comprises at least one of 4-(5-phenyloxazol-2-yl)phenylpropionic acid (DPOA), 2,5- diphenyloxazole (PPO), p-terphenyl, carbostyril 124, pacific blue 3-carboxy-6,8-difluoro- 7-hydroxycoumarin, or a pentiptycene-based dye. (Dsouza, p. 7949, first column, only paragraph) Regarding Claim 11, claim 11 differs from claim 1 in that it includes a patterned sample – the combination of Chen and Dsouza further teaches the patterned sample. (Chen, [0034] and figures 2A-2C: the sample (106) may include a patterned sample (106)) Regarding claims 12-18 and 20, claims 12-18 and 20 contain subject matter previously addressed in claims 2-8 and 10 above, and are rejected on the same grounds. Regarding claims 21-27 claims 21-27 contain subject matter corresponding to claims 2, 3, 4,5, 6, 8, and 7 above, and are therefore rejected on the same grounds. Claims 9 and 19 are rejected under 35 U.S.C. 103 as being unpatentable over Chen in view of Dsouza and McKee (2017/0242002) Regarding claims 9 and 19, the combination of Chen and Dsouza lacks explicit teaching of the photoluminescent material comprises a noncaging intermolecular blocking compound, wherein the noncaging intermolecular blocking compound comprises a surfactant. McKee teaches incorporation of a surfactant into a fluorescent marker in order to inhibit quenching and thereby increase detectable fluorescence. (McKee, [0037], [0038]) It would have been obvious to one of ordinary skill in the art before the filing date of the claimed invention to use a surfactant, as taught by McKee, as a quenching inhibitor to increase the detectable fluorescence in the combination of Chen and Dsouza. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to EDWIN C GUNBERG whose telephone number is (571)270-3107. The examiner can normally be reached Monday-Friday, 8:30AM-5:00PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Uzma Alam can be reached at 571-272-3995. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /EDWIN C GUNBERG/ Primary Examiner, Art Unit 2884
Read full office action

Prosecution Timeline

Feb 25, 2025
Application Filed
Sep 29, 2026
Non-Final Rejection mailed — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
78%
Grant Probability
85%
With Interview (+6.9%)
2y 5m (~9m remaining)
Median Time to Grant
Low
PTA Risk
Based on 637 resolved cases by this examiner. Grant probability derived from career allowance rate.

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