Last updated: July 05, 2026

Application No. 19/072,038

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION WITH RADIO-FREQUENCY POWER RAMPING

Non-Final OA

Filed

Mar 06, 2025

Priority

Nov 08, 2019 — provisional 62/933,227 +2 more

Examiner

HERNANDEZ-KENNEY, JOSE

Art Unit

1717

Tech Center

1700 — Chemical & Materials Engineering

Assignee

Lam Research Corporation

OA Round

1 (Non-Final)

Interview Optional

— +22.9% interview lift. Interview already conducted in this application's prosecution history. This examiner has a 54% grant rate with +22.9% interview lift. Since an interview has already been tried, recommend written response with narrowed claims based on precedent claim evolution patterns.

Based on 599 resolved cases, 2023–2026

Examiner Intelligence

HERNANDEZ-KENNEY, JOSE View full profile →

Grants 54% of resolved cases

Career Allowance Rate

325 granted / 599 resolved

-10.7% vs TC avg

Strong +23% interview lift

Without

With

+22.9%

Interview Lift

resolved cases with interview

Typical timeline

3y 3m

Avg Prosecution

42 currently pending

Career history

642

Total Applications

across all art units

Statute-Specific Performance

§101

0.5%

-39.5% vs TC avg

§103

83.4%

+43.4% vs TC avg

§102

4.9%

-35.1% vs TC avg

§112

4.0%

-36.0% vs TC avg

Black line = Tech Center average estimate • Based on career data from 599 resolved cases

Prosecution Timeline

Mar 06, 2025

Application Filed

Apr 09, 2026

Non-Final Rejection mailed

Jun 05, 2026

Interview Requested

Jun 30, 2026

Applicant Interview (Telephonic)

Jun 30, 2026

Examiner Interview Summary

Precedent Cases

Applications granted by this same examiner with similar technology

18/482,342

Patent 12668879

ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS

2y 8m to grant Granted Jun 30, 2026

18/744,431

Patent 12658527

SYSTEM AND METHOD FOR DEPOSITING SEPARATOR MATERIAL

2y 0m to grant Granted Jun 16, 2026

17/896,340

Patent 12649969

METHOD FOR SEASONING A CHAMBER

3y 9m to grant Granted Jun 09, 2026

18/198,959

Patent 12643249

METHOD OF COATING A RAZOR BLADE

3y 0m to grant Granted Jun 02, 2026

18/263,377

Patent 12614697

PECVD COATING SYSTEM AND COATING METHOD

2y 9m to grant Granted Apr 28, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

54%

Grant Probability

77%

With Interview (+22.9%)

3y 3m (~1y 11m remaining)

Median Time to Grant

Low

PTA Risk

Based on 599 resolved cases by this examiner. Grant probability derived from career allowance rate.