CTNF 19/093,111 CTNF 89996 Notice of Non-Final rejection Notice of Pre-AIA or AIA Status 07-03-aia AIA 15-10-aia The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA. Claim Rejections - 35 USC § 102 07-07-aia AIA 07-07 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – 07-08-aia AIA (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. 07-15 AIA Claim s 1-20 are rejected under 35 U.S.C. 102 ( a)(1 ) as being anticipated by US2014/0173158 A1 by Valcore, Jr . Referring to claim 1, Valcore Jr. Fig 1-5 anticipates: A method for communicating information between multiple components of a plasma tool, (See Fig 1 item 100 and abstract) comprising: receiving, at a radio frequency (RF) generator (See Fig 1 item 108 paragraph [0027]), one or more Ethernet for Control Automation (EtherCAT) frames, wherein the RF generator (108) is one of the components of the plasma tool (See claim 1 plasma chamber 128 and connected with Host system via matching and RF system 108;abstract); PNG media_image1.png 448 602 media_image1.png Greyscale extracting, by the RF generator (item 108), a plurality of variable levels from the one or more EtherCAT frames (See EthernetCAT frames in134,136, 138 paragraph [0041]) ; generating, by the RF generator (item 108), an RF signal having the plurality of variable levels for a cycle of a synchronization signal (see paragraph [0039] where Velcore Jr discloses Sync output signal from RF generator); identifying a destination address of the one or more EtherCAT frames (See paragraph [0059] where transfer set point); and sending the one or more EtherCAT frames to another one of the components at the destination address (See paragraph [0039]). Referring to claim 2 Velcore Jr anticipates the method of claim 1, wherein the plurality of variable levels include a first variable level, a second variable level, a third variable level, and a fourth variable level, wherein the RF signal transitions from the first variable level to the second variable level, transitions from the second variable level to the third variable level, and transitions from the third variable level to the fourth variable level during the cycle. (See Fig 3A and paragraph [0076]). PNG media_image2.png 512 484 media_image2.png Greyscale Referring to claim 3 Velcore Jr anticipates the method of claim 1, further comprising identifying an address of the RF generator within one of the one or more EtherCAT frames, wherein said extracting includes obtaining the plurality of variable levels from a field between a field having the address and a field having the destination address of the other one of the components. (See Fig 3A and paragraph [0077]). Referring to claim 4 Velcore Jr anticipates the method of claim 1, wherein the other one of the components includes an impedance matching circuit (See Fig 1 item 120 Z match) that is coupled to the RF generator (Connected to item 108 paragraph [0028]). Referring to claim 5 Velcore Jr anticipates the method of claim 1, wherein each of the plurality of variable levels is a frequency level or a power level (See Fig 1 paragraph [0036]-[0038]). . Referring to claim 6 Velcore Jr anticipates the method of claim 1, wherein the one or more EtherCAT frames (Fig 1 item 134,136, 138) are received from a processor (See paragraph [0025], [0038]), the method further comprising: receiving the one or more EtherCAT frames from the other one of the components (See Fig 1 etherCAT frames goes from RF generator 108 to match and controller); and sending the one or more EtherCAT frames to the processor (See paragraphs [0049] [0050]). Referring to claim 7 Velcore Jr anticipates the method of claim 1, wherein each of the one or more EtherCAT frames has a field for receiving measured data from the RF generator and a field including the plurality of variable levels for providing to the RF generator. (See Fig 2A paragraph [0057] where Velcore Jr teaches etherCAT packets via controller 208 to the RF generators 202) Referring to claim 8 Velcore Jr Fig 1-5 abstract anticipates A radio frequency (RF) generator (Fig 1 item 108 [0027]) comprising: a communication controller (The host system item 102) configured to receive one or more Ethernet for Control Automation (EtherCAT) frames, wherein the communication controller is configured to extract a plurality of variable levels from the one or more EtherCAT frames( see paragraph [0041]); and an RF power supply (Item 108) coupled to the communication controller (item 102), wherein the RF power supply (item 108) is configured to generate an RF signal having the plurality of variable levels for a cycle of a digital pulse signal (paragraphs [0037]), [0038])), wherein the communication controller is configured to identify a destination address of the one or more EtherCAT frames, andwherein the communication controller (item 102) is configured to send the one or more EtherCAT frames to a component at the destination address (See paragraphs [0041] and Fig 2A. (See paragraph [0039]). Referring to claim 9 Velcore Jr anticipates the RF generator of claim 8, wherein the plurality of variable levels include a first variable level, a second variable level, a third variable level, and a fourth variable level, wherein the RF signal transitions from the first variable level to the second variable level, transitions from the second variable level to the third variable level, and transitions from the third variable level to the fourth variable level during the cycle. (See Fig 3A and paragraph [0076]). Referring to claim 10 Velcore Jr anticipates the RF generator of claim 8, wherein the communication controller is configured to identify an address of the RF generator (Fig 1 item 108) within one of the one or more EtherCAT frames, wherein to extract the plurality of variables, the communication controller is configured to obtain the plurality of variable levels from a field between a field having the address and a field having the destination address of the component. (See Fig 3A and paragraph [0077]). Referring to claim 11 Velcore Jr anticipates the RF generator of claim 8, wherein the component includes an impedance matching circuit (See Fig 1 item 120 Z match) that is coupled to the RF generator (Connected to item 108 paragraph [0028]).. Referring to claim 12 Velcore Jr anticipates the RF generator of claim 8, wherein each of the plurality of variable levels is a frequency level or a power level. (See Fig 1 paragraph [0036]-[0038]). . Referring to claim 13 Velcore Jr anticipates the RF generator of claim 8, wherein the one or more EtherCAT frames (See paragraph [0025], [0038]), are received from a processor (See paragraph [0025], [0038]), wherein the communication controller is configured to:receive the one or more EtherCAT frames from the component (See Fig 1 etherCAT frames goes from RF generator 108 to match and controller 102); and send the one or more EtherCAT frames to the processor (See paragraphs (See paragraphs [0049] [0050]). Referring to claim 14 Velcore Jr anticipates the RF generator of claim 8, wherein the RF generator (Fig 1 item 108) includes a processor (item DSP paragraph [0037] [0038]) coupled to the communication controller (item 102), wherein each of the one or more EtherCAT frames has a field forreceiving data from the processor of the RF generator and a field including the plurality of variable levels for providing to the processor of the RF generator (See paragraphs [0049], [0050]). Referring to claim 15 Velcore Jr Fig 1-5 anticipates a plasma system (Fig 1 item 100 plasma system paragraph [0029]) comprising: a computer (paragraph [0026]); and a radio frequency (RF) generator (Fig 1 item 108) coupled to the computer via an Ethernet for Control Automation (EtherCAT) cable (See paragraph [0009], wherein the RF generato (item 108) r is configured to: receive one or more EtherCAT frames from the computer via the EtherCAT cable; extract a plurality of variable levels from the one or more EtherCAT frames; generate an RF signal having the plurality of variable levels for a cycle of a digital signa (See paragraphs [0041] and Fig 2A. (See paragraph [0039]); identify a destination address of the one or more EtherCAT frames (See paragraph [0059] where transfer set point); and send the one or more EtherCAT frames to a component at the destination address (paragraph [0037]). Referring to claim 16 Velcore Jr anticipates the plasma system of claim 15, wherein the plurality of variable levels include a first variable level, a second variable level, a third variable level, and a fourth variable level, wherein the RF signal transitions from the first variable level to the second variable level, transitions from the second variable level to the third variable level, and transitions from the third variable level to the fourth variable level during the cycle. (See Fig 3A and paragraph [0076]). Referring to claim 17 Velcore Jr anticipates the plasma system of claim 15, wherein the RF generator (Fig 1 item 108) includes a communication controller (host system 102), wherein the communication controller (item 102) is configured to identify an address of the RF generator within one of the one or more EtherCAT frames, wherein to extract the plurality of variables, the communication controller is configured to obtain the plurality of variable levels from a field between a field having the address and a field having the destination address of the component. (See Fig 3A and paragraphs [0076], [0077]). Referring to claim 18 Velcore Jr anticipates the plasma system of claim 15, wherein the computer (Fig 1 item 102) includes a communication controller (item 102) and a processor (paragraph [0025]), wherein the processor is coupled to the communication controller (paragraphs [0036, wherein the processor is configured to send data including the plurality of variable levels to the communication controller (See Fig 2A), wherein the communication controller is configured to apply an EtherCAT protocol to the data to generate the one or more EtherCAT frames embedding the data. (Fig 1 paragraphs [0041], [0057]). Referring to claim 19 Velcore Jr anticipates the plasma system of claim 15, wherein the RF generator includes (Fig 1 item 108) a communication controller ( paragraph [0036] [0037]) configured to send the one or more EtherCAT frames to the computer (See Fig2A), wherein the one or more EtherCAT frames includes information measured by a sensor coupled to the RF generator (See paragraph [0049], [0050]). Referring to claim 20 Velcore Jr anticipates the plasma system of claim 15, wherein the RF generator includes a communication controller (Fig 1 item 108 and 102 paragraph [0036], [0037]) configured to receive the one or more EtherCAT frames from an impedance matching circuit (item 120) , wherein the one or more EtherCAT frames include information measured by a sensor (paragraph [0036]) coupled to the impedance matching circuit, wherein the communication controller is configured to send the one or more EtherCAT frames to the computer.(See paragraph [0037]) Conclusion Claims 1-20 are rejected. 07-96 The prior of art made of record and not relied upon is considered to pertinent to applicant’s disclosure. Applicants are directed to consider additional pertinent prior art included on the notice of references cited PTOL 892 attached here with. The examiner has pointed out particular references contained in the prior art of record within the body of this action for the convenience of the Applicants. Although the specified citations are representative of the teachings in the art and are applied to the specific limitations within the individual claim other passages and figures may apply. Applicant, in preparing the response should consider fully the entire reference as potentially teaching all or part of the claimed invention as well as the context of the passage as taught by the prior art or disclosed by the examiner. Any inquiry concerning this communication or earlier communications from the examiner should be directed to SRINIVAS SATHIRAJU whose telephone number is (571)272-4250. The examiner can normally be reached 8:30AM-3:30PM, 5PM -8:30PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, ALEXANDER H TANINGCO can be reached at 5712728048. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /SRINIVAS SATHIRAJU/ 05/30/2026 SRINIVAS . SATHIRAJU Primary Examiner Art Unit 2845 Application/Control Number: 19/093,111 Page 2 Art Unit: 2845 Application/Control Number: 19/093,111 Page 3 Art Unit: 2845 Application/Control Number: 19/093,111 Page 4 Art Unit: 2845 Application/Control Number: 19/093,111 Page 6 Art Unit: 2845 Application/Control Number: 19/093,111 Page 7 Art Unit: 2845 Application/Control Number: 19/093,111 Page 8 Art Unit: 2845 Application/Control Number: 19/093,111 Page 9 Art Unit: 2845 Application/Control Number: 19/093,111 Page 10 Art Unit: 2845
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