5 pending office actions • 1 client
| Client (Assignee) | Pending OAs |
|---|---|
| Axcelis Technologies, Inc. | 5 |
| App # | Title | Client | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|---|
| 19063918 | LOW-TEMPERATURE VAPORIZER FOR ION IMPLANTER WITH IN-VACUUM CONTROLLED FLOW | Axcelis Technologies, Inc. | CHEN, KEATH T | 1716 | Final Rejection | Feb 26, 2025 |
| 18944039 | FIXED POSITION FILAMENT | Axcelis Technologies, Inc. | LEE, NATHANIEL J. | 2875 | Non-Final OA | Nov 12, 2024 |
| 18918276 | DEPOSITION MONITOR FOR SEMICONDUCTOR MANUFACTURING SYSTEM | Axcelis Technologies, Inc. | MENDOZA, ALEXANDRIA ARELLANO | 2877 | Non-Final OA | Oct 17, 2024 |
| 18818760 | ION BEAM PROFILING USING OPTICAL TOMOGRAPHY | Axcelis Technologies, Inc. | FOX, DANIELLE A | 2884 | Non-Final OA | Aug 29, 2024 |
| 17348031 | TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM | Axcelis Technologies, Inc. | CHOI, JAMES J | 2878 | Final Rejection | Jun 15, 2021 |
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