Prosecution Insights
Last updated: April 19, 2026

Axcelis Technologies, Inc.

4 pending office actions

Portfolio Summary

4
Total Pending OAs
2
Final Rejections
2
Non-Final OAs

Pending Office Actions

App #TitleExaminerArt UnitStatusFiled
19063918 LOW-TEMPERATURE VAPORIZER FOR ION IMPLANTER WITH IN-VACUUM CONTROLLED FLOW CHEN, KEATH T 1716 Final Rejection Feb 26, 2025
18991879 LIQUID METAL ALLOY FEED MATERIALS FOR ION IMPLANTATION TADAYYON ESLAMI, TABASSOM 1718 Non-Final OA Dec 23, 2024
18944039 FIXED POSITION FILAMENT LEE, NATHANIEL J. 2875 Non-Final OA Nov 12, 2024
17348031 TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM CHOI, JAMES J 2878 Final Rejection Jun 15, 2021

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